GB2469410B - Mems transducers - Google Patents

Mems transducers

Info

Publication number
GB2469410B
GB2469410B GB1012727A GB201012727A GB2469410B GB 2469410 B GB2469410 B GB 2469410B GB 1012727 A GB1012727 A GB 1012727A GB 201012727 A GB201012727 A GB 201012727A GB 2469410 B GB2469410 B GB 2469410B
Authority
GB
United Kingdom
Prior art keywords
mems transducers
mems
transducers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1012727A
Other versions
GB201012727D0 (en
GB2469410A (en
Inventor
Robert Errol Mcmullen
Richard Ian Laming
Anthony Bernard Traynor
Tsjerk Hoekstra
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cirrus Logic International UK Ltd
Original Assignee
Wolfson Microelectronics PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wolfson Microelectronics PLC filed Critical Wolfson Microelectronics PLC
Priority to GB1012727A priority Critical patent/GB2469410B/en
Publication of GB201012727D0 publication Critical patent/GB201012727D0/en
Publication of GB2469410A publication Critical patent/GB2469410A/en
Application granted granted Critical
Publication of GB2469410B publication Critical patent/GB2469410B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
  • Transducers For Ultrasonic Waves (AREA)
GB1012727A 2008-05-07 2008-05-07 Mems transducers Active GB2469410B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1012727A GB2469410B (en) 2008-05-07 2008-05-07 Mems transducers

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1012727A GB2469410B (en) 2008-05-07 2008-05-07 Mems transducers
GB0808294A GB2459863B (en) 2008-05-07 2008-05-07 Mems transducers

Publications (3)

Publication Number Publication Date
GB201012727D0 GB201012727D0 (en) 2010-09-15
GB2469410A GB2469410A (en) 2010-10-13
GB2469410B true GB2469410B (en) 2011-01-19

Family

ID=39537415

Family Applications (4)

Application Number Title Priority Date Filing Date
GB1012728A Active GB2469411B (en) 2008-05-07 2008-05-07 Mems transducers
GB1012729A Active GB2469412B (en) 2008-05-07 2008-05-07 MEMS transducers
GB0808294A Active GB2459863B (en) 2008-05-07 2008-05-07 Mems transducers
GB1012727A Active GB2469410B (en) 2008-05-07 2008-05-07 Mems transducers

Family Applications Before (3)

Application Number Title Priority Date Filing Date
GB1012728A Active GB2469411B (en) 2008-05-07 2008-05-07 Mems transducers
GB1012729A Active GB2469412B (en) 2008-05-07 2008-05-07 MEMS transducers
GB0808294A Active GB2459863B (en) 2008-05-07 2008-05-07 Mems transducers

Country Status (1)

Country Link
GB (4) GB2469411B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2459866B (en) * 2008-05-07 2011-08-31 Wolfson Microelectronics Plc Mems transducer
US10899605B2 (en) 2018-03-05 2021-01-26 Sharp Kabushiki Kaisha MEMS device and manipulation method for micro-objects
US10636936B2 (en) 2018-03-05 2020-04-28 Sharp Kabushiki Kaisha MEMS array system and method of manipulating objects
WO2023077504A1 (en) * 2021-11-08 2023-05-11 重庆康佳光电技术研究院有限公司 Chip structure, chip structure manufacturing method, and chip transfer method
EP4181163A1 (en) * 2021-11-12 2023-05-17 ETH Zurich Zero-power operable classification device and switching device and voice-operated powerless wake-up switch

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6314057B1 (en) * 1999-05-11 2001-11-06 Rodney J Solomon Micro-machined ultrasonic transducer array
US20070215964A1 (en) * 2006-02-28 2007-09-20 Butrus Khuri-Yakub Capacitive micromachined ultrasonic transducer (CMUT) with varying thickness membrane

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3248452B2 (en) * 1997-05-26 2002-01-21 住友金属工業株式会社 Acoustic sensor
US6585653B2 (en) * 2001-07-31 2003-07-01 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) array
EP1779784B1 (en) * 2004-06-07 2015-10-14 Olympus Corporation Electrostatic capacity type ultrasonic transducer
JP4715236B2 (en) * 2005-03-01 2011-07-06 株式会社デンソー Ultrasonic sensor device
EP1764162B1 (en) * 2005-09-14 2008-04-30 Esaote S.p.A. Electro-acoustic transducer for high frequency applications

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6314057B1 (en) * 1999-05-11 2001-11-06 Rodney J Solomon Micro-machined ultrasonic transducer array
US20070215964A1 (en) * 2006-02-28 2007-09-20 Butrus Khuri-Yakub Capacitive micromachined ultrasonic transducer (CMUT) with varying thickness membrane

Also Published As

Publication number Publication date
GB2459863B (en) 2011-01-19
GB201012727D0 (en) 2010-09-15
GB2469410A (en) 2010-10-13
GB201012728D0 (en) 2010-09-15
GB2469411A (en) 2010-10-13
GB0808294D0 (en) 2008-06-11
GB2469412A (en) 2010-10-13
GB2459863A (en) 2009-11-11
GB201012729D0 (en) 2010-09-15
GB2469411B (en) 2011-01-19
GB2469412B (en) 2011-01-19

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20150820 AND 20150826