EP2306019A4 - Piezoelectric microblower - Google Patents

Piezoelectric microblower

Info

Publication number
EP2306019A4
EP2306019A4 EP09754572.7A EP09754572A EP2306019A4 EP 2306019 A4 EP2306019 A4 EP 2306019A4 EP 09754572 A EP09754572 A EP 09754572A EP 2306019 A4 EP2306019 A4 EP 2306019A4
Authority
EP
European Patent Office
Prior art keywords
piezoelectric microblower
microblower
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09754572.7A
Other languages
German (de)
French (fr)
Other versions
EP2306019A1 (en
Inventor
Atsuhiko Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of EP2306019A1 publication Critical patent/EP2306019A1/en
Publication of EP2306019A4 publication Critical patent/EP2306019A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
EP09754572.7A 2008-05-30 2009-05-14 Piezoelectric microblower Withdrawn EP2306019A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008142250 2008-05-30
PCT/JP2009/058968 WO2009145064A1 (en) 2008-05-30 2009-05-14 Piezoelectric microblower

Publications (2)

Publication Number Publication Date
EP2306019A1 EP2306019A1 (en) 2011-04-06
EP2306019A4 true EP2306019A4 (en) 2014-10-15

Family

ID=41376945

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09754572.7A Withdrawn EP2306019A4 (en) 2008-05-30 2009-05-14 Piezoelectric microblower

Country Status (4)

Country Link
US (1) US20110070110A1 (en)
EP (1) EP2306019A4 (en)
JP (1) JP5287854B2 (en)
WO (1) WO2009145064A1 (en)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8485793B1 (en) * 2007-09-14 2013-07-16 Aprolase Development Co., Llc Chip scale vacuum pump
JP5528404B2 (en) * 2011-09-06 2014-06-25 株式会社村田製作所 Fluid control device
JP5682513B2 (en) * 2011-09-06 2015-03-11 株式会社村田製作所 Fluid control device
JP5533823B2 (en) * 2011-09-06 2014-06-25 株式会社村田製作所 Fluid control device
WO2013054801A1 (en) * 2011-10-11 2013-04-18 株式会社村田製作所 Fluid-control device, and method for adjusting fluid-control device
JP5652551B2 (en) * 2012-02-21 2015-01-14 株式会社村田製作所 Fluid control device
JP5928160B2 (en) * 2012-05-29 2016-06-01 オムロンヘルスケア株式会社 Piezoelectric pump and blood pressure information measuring apparatus including the same
CN103016317B (en) * 2012-12-13 2015-07-08 江苏大学 Three-cavity valveless piezoelectric pump based on wall-attachment effect
WO2014174957A1 (en) * 2013-04-24 2014-10-30 株式会社村田製作所 Cuff pressure control device
FR3012443B1 (en) 2013-10-24 2021-04-30 Univ Sciences Technologies Lille PROCESS FOR GENERATING A FLUID FLOW
KR20150085612A (en) * 2014-01-16 2015-07-24 삼성전기주식회사 Micro pump device
JP6061054B2 (en) * 2014-03-07 2017-01-18 株式会社村田製作所 Blower
WO2016009870A1 (en) 2014-07-16 2016-01-21 株式会社村田製作所 Fluid control device
WO2016140181A1 (en) * 2015-03-03 2016-09-09 株式会社村田製作所 Suction device
TWI557321B (en) * 2015-06-25 2016-11-11 科際精密股份有限公司 Piezoelectric pump and operating method thereof
US10584695B2 (en) * 2016-01-29 2020-03-10 Microjet Technology Co., Ltd. Miniature fluid control device
US10451051B2 (en) 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
EP3203076B1 (en) 2016-01-29 2021-05-12 Microjet Technology Co., Ltd Miniature fluid control device
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
EP3203078B1 (en) 2016-01-29 2021-05-26 Microjet Technology Co., Ltd Miniature pneumatic device
US10388849B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
EP3203079B1 (en) 2016-01-29 2021-05-19 Microjet Technology Co., Ltd Piezoelectric actuator
EP3203080B1 (en) 2016-01-29 2021-09-22 Microjet Technology Co., Ltd Miniature pneumatic device
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
EP3203077B1 (en) 2016-01-29 2021-06-16 Microjet Technology Co., Ltd Piezoelectric actuator
EP3203081B1 (en) 2016-01-29 2021-06-16 Microjet Technology Co., Ltd Miniature fluid control device
CN107795465B (en) * 2016-09-05 2020-10-30 研能科技股份有限公司 Micro fluid control device
TWI661127B (en) 2016-09-05 2019-06-01 研能科技股份有限公司 Micro-fluid control device
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
TWI638097B (en) * 2017-02-20 2018-10-11 研能科技股份有限公司 Micro fluid transmission device
TWI652652B (en) * 2017-08-21 2019-03-01 研能科技股份有限公司 Apparatus having actuating sensor module within
TWI663332B (en) * 2017-08-31 2019-06-21 研能科技股份有限公司 Gas transmitting device
TWI698584B (en) * 2017-08-31 2020-07-11 研能科技股份有限公司 Gas transmitting device
TWI683059B (en) * 2017-08-31 2020-01-21 研能科技股份有限公司 Gas transmitting device
JP6908175B2 (en) * 2018-02-16 2021-07-21 株式会社村田製作所 Fluid control device
TWI695934B (en) * 2019-03-29 2020-06-11 研能科技股份有限公司 Micro-electromechanical system pump
WO2021072729A1 (en) * 2019-10-18 2021-04-22 Healtell (Guangzhou) Medical Technology Co., Ltd. Microfluidic chip pumps and methods thereof
EP4006367B1 (en) 2020-11-27 2024-05-22 European Space Agency Gas bearing system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140491A (en) * 1982-02-16 1983-08-20 Matsushita Electric Ind Co Ltd Flow generating device
US20040033146A1 (en) * 2002-08-15 2004-02-19 Xunhu Dai Micropumps with passive check valves
EP1523038A2 (en) * 2003-10-07 2005-04-13 Samsung Electronics Co., Ltd. Valveless micro air delivery device
WO2007055136A1 (en) * 2005-11-09 2007-05-18 Nitto Kohki Co., Ltd. Pump using unimorph vibration diaphragm

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5541584U (en) * 1978-09-13 1980-03-17
US6227809B1 (en) * 1995-03-09 2001-05-08 University Of Washington Method for making micropumps
JP4873014B2 (en) * 2006-12-09 2012-02-08 株式会社村田製作所 Piezoelectric micro blower

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140491A (en) * 1982-02-16 1983-08-20 Matsushita Electric Ind Co Ltd Flow generating device
US20040033146A1 (en) * 2002-08-15 2004-02-19 Xunhu Dai Micropumps with passive check valves
EP1523038A2 (en) * 2003-10-07 2005-04-13 Samsung Electronics Co., Ltd. Valveless micro air delivery device
JP2005113918A (en) * 2003-10-07 2005-04-28 Samsung Electronics Co Ltd Valve-less micro air supply device
WO2007055136A1 (en) * 2005-11-09 2007-05-18 Nitto Kohki Co., Ltd. Pump using unimorph vibration diaphragm

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2009145064A1 *

Also Published As

Publication number Publication date
EP2306019A1 (en) 2011-04-06
WO2009145064A1 (en) 2009-12-03
JP5287854B2 (en) 2013-09-11
JPWO2009145064A1 (en) 2011-10-06
US20110070110A1 (en) 2011-03-24

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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DAX Request for extension of the european patent (deleted)
A4 Supplementary search report drawn up and despatched

Effective date: 20140916

RIC1 Information provided on ipc code assigned before grant

Ipc: F04B 45/047 20060101AFI20140910BHEP

Ipc: F04B 45/04 20060101ALI20140910BHEP

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Effective date: 20150417