EP2306019A4 - Piezoelektrisches mikrogebläse - Google Patents

Piezoelektrisches mikrogebläse

Info

Publication number
EP2306019A4
EP2306019A4 EP09754572.7A EP09754572A EP2306019A4 EP 2306019 A4 EP2306019 A4 EP 2306019A4 EP 09754572 A EP09754572 A EP 09754572A EP 2306019 A4 EP2306019 A4 EP 2306019A4
Authority
EP
European Patent Office
Prior art keywords
piezoelectric microblower
microblower
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09754572.7A
Other languages
English (en)
French (fr)
Other versions
EP2306019A1 (de
Inventor
Atsuhiko Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of EP2306019A1 publication Critical patent/EP2306019A1/de
Publication of EP2306019A4 publication Critical patent/EP2306019A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
EP09754572.7A 2008-05-30 2009-05-14 Piezoelektrisches mikrogebläse Withdrawn EP2306019A4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008142250 2008-05-30
PCT/JP2009/058968 WO2009145064A1 (ja) 2008-05-30 2009-05-14 圧電マイクロブロア

Publications (2)

Publication Number Publication Date
EP2306019A1 EP2306019A1 (de) 2011-04-06
EP2306019A4 true EP2306019A4 (de) 2014-10-15

Family

ID=41376945

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09754572.7A Withdrawn EP2306019A4 (de) 2008-05-30 2009-05-14 Piezoelektrisches mikrogebläse

Country Status (4)

Country Link
US (1) US20110070110A1 (de)
EP (1) EP2306019A4 (de)
JP (1) JP5287854B2 (de)
WO (1) WO2009145064A1 (de)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8485793B1 (en) * 2007-09-14 2013-07-16 Aprolase Development Co., Llc Chip scale vacuum pump
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
JP5528404B2 (ja) * 2011-09-06 2014-06-25 株式会社村田製作所 流体制御装置
JP5533823B2 (ja) 2011-09-06 2014-06-25 株式会社村田製作所 流体制御装置
EP2767715B1 (de) 2011-10-11 2018-04-04 Murata Manufacturing Co., Ltd. Flüssigkeitssteuerungsvorrichtung und verfahren zur einstellung der flüssigkeitssteuerungsvorrichtung
WO2013125364A1 (ja) * 2012-02-21 2013-08-29 株式会社村田製作所 流体制御装置
JP5928160B2 (ja) 2012-05-29 2016-06-01 オムロンヘルスケア株式会社 圧電ポンプおよびこれを備えた血圧情報測定装置
CN103016317B (zh) * 2012-12-13 2015-07-08 江苏大学 一种基于附壁效应的三腔无阀压电泵
WO2014174957A1 (ja) * 2013-04-24 2014-10-30 株式会社村田製作所 カフ圧制御装置
FR3012443B1 (fr) 2013-10-24 2021-04-30 Univ Sciences Technologies Lille Procede pour generer un ecoulement de fluide
KR20150085612A (ko) * 2014-01-16 2015-07-24 삼성전기주식회사 마이크로 펌프
JP6061054B2 (ja) * 2014-03-07 2017-01-18 株式会社村田製作所 ブロア
JP6052475B2 (ja) 2014-07-16 2016-12-27 株式会社村田製作所 流体制御装置
WO2016140181A1 (ja) * 2015-03-03 2016-09-09 株式会社村田製作所 吸引装置
TWI557321B (zh) * 2015-06-25 2016-11-11 科際精密股份有限公司 壓電泵及其操作方法
EP3203081B1 (de) 2016-01-29 2021-06-16 Microjet Technology Co., Ltd Miniaturfluidsteuerungsvorrichtung
EP3203077B1 (de) 2016-01-29 2021-06-16 Microjet Technology Co., Ltd Piezoelektrischer aktuator
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
EP3203079B1 (de) 2016-01-29 2021-05-19 Microjet Technology Co., Ltd Piezoelektrischer aktuator
US10371136B2 (en) 2016-01-29 2019-08-06 Microjet Technology Co., Ltd. Miniature pneumatic device
US10584695B2 (en) * 2016-01-29 2020-03-10 Microjet Technology Co., Ltd. Miniature fluid control device
US10388849B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
US10451051B2 (en) 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
US10487821B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature fluid control device
EP3203080B1 (de) 2016-01-29 2021-09-22 Microjet Technology Co., Ltd Pneumatische miniaturvorrichtung
TWI661127B (zh) 2016-09-05 2019-06-01 研能科技股份有限公司 微型流體控制裝置
CN107795465B (zh) * 2016-09-05 2020-10-30 研能科技股份有限公司 微型流体控制装置
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
TWI638097B (zh) * 2017-02-20 2018-10-11 研能科技股份有限公司 微型氣體傳輸裝置
TWI652652B (zh) * 2017-08-21 2019-03-01 研能科技股份有限公司 具致動傳感模組之裝置
TWI663332B (zh) * 2017-08-31 2019-06-21 研能科技股份有限公司 氣體輸送裝置
TWI698584B (zh) * 2017-08-31 2020-07-11 研能科技股份有限公司 氣體輸送裝置
TWI683059B (zh) * 2017-08-31 2020-01-21 研能科技股份有限公司 氣體輸送裝置
GB2583226B (en) * 2018-02-16 2022-11-16 Murata Manufacturing Co Fluid control apparatus
TWI695934B (zh) * 2019-03-29 2020-06-11 研能科技股份有限公司 微機電泵浦
WO2021072729A1 (en) * 2019-10-18 2021-04-22 Healtell (Guangzhou) Medical Technology Co., Ltd. Microfluidic chip pumps and methods thereof
EP4006367B1 (de) 2020-11-27 2024-05-22 European Space Agency Gaslagersystem

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140491A (ja) * 1982-02-16 1983-08-20 Matsushita Electric Ind Co Ltd 流れ発生装置
US20040033146A1 (en) * 2002-08-15 2004-02-19 Xunhu Dai Micropumps with passive check valves
EP1523038A2 (de) * 2003-10-07 2005-04-13 Samsung Electronics Co., Ltd. Ventilfreie Luftzuführungs-Mikroeinrichtung
WO2007055136A1 (ja) * 2005-11-09 2007-05-18 Nitto Kohki Co., Ltd. ユニモルフ振動板を用いたポンプ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5541584U (de) * 1978-09-13 1980-03-17
US6227809B1 (en) * 1995-03-09 2001-05-08 University Of Washington Method for making micropumps
JP4873014B2 (ja) * 2006-12-09 2012-02-08 株式会社村田製作所 圧電マイクロブロア

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140491A (ja) * 1982-02-16 1983-08-20 Matsushita Electric Ind Co Ltd 流れ発生装置
US20040033146A1 (en) * 2002-08-15 2004-02-19 Xunhu Dai Micropumps with passive check valves
EP1523038A2 (de) * 2003-10-07 2005-04-13 Samsung Electronics Co., Ltd. Ventilfreie Luftzuführungs-Mikroeinrichtung
JP2005113918A (ja) * 2003-10-07 2005-04-28 Samsung Electronics Co Ltd バルブレスマイクロ空気供給装置
WO2007055136A1 (ja) * 2005-11-09 2007-05-18 Nitto Kohki Co., Ltd. ユニモルフ振動板を用いたポンプ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2009145064A1 *

Also Published As

Publication number Publication date
JP5287854B2 (ja) 2013-09-11
US20110070110A1 (en) 2011-03-24
WO2009145064A1 (ja) 2009-12-03
EP2306019A1 (de) 2011-04-06
JPWO2009145064A1 (ja) 2011-10-06

Similar Documents

Publication Publication Date Title
EP2312158A4 (de) Piezoelektrisches mikrogebläse
EP2306019A4 (de) Piezoelektrisches mikrogebläse
AU322949S (en) Vibrator
EP2251313A4 (de) Bleifreies piezoelektrisches material
EP2306018A4 (de) Piezoelektrisches mikrogebläse
EP2256923A4 (de) Piezoelektrische vorrichtung
EP2280616A4 (de) Babybody
EP2262094A4 (de) Piezoelektrische stromerzeugungseinheit
EP2257170A4 (de) Tetrahydrofuropyridone
EP2285758A4 (de) Dünger-pestizid-paket
EP2313147A4 (de) Quetschzange
EP2233305A4 (de) Graphikdrucker
EP2285375A4 (de) Spiroazaindole
EP2377177A4 (de) Piezoelektrischer motor
GB0800389D0 (en) Gileo hang-it
GB0800161D0 (en) Rota-board
GB2466361B (en) Orangery
GB0801763D0 (en) Piezoelectric motor
GB2470849B (en) Transducer
AU3935P (en) DPV308 Dianella prunina
AU3972P (en) Tobruk xTriticosecale
AU3977P (en) PARV01 Myoporum parvifolium
AU4098P (en) NPW2 Dianella tasmanica
GB0815013D0 (en) Transducers
HU3600U (en) Transducer

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20101220

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA RS

DAX Request for extension of the european patent (deleted)
A4 Supplementary search report drawn up and despatched

Effective date: 20140916

RIC1 Information provided on ipc code assigned before grant

Ipc: F04B 45/047 20060101AFI20140910BHEP

Ipc: F04B 45/04 20060101ALI20140910BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20150417