DE69818485D1 - Verfahren zur herstellung von elektronischen bauteilen - Google Patents

Verfahren zur herstellung von elektronischen bauteilen

Info

Publication number
DE69818485D1
DE69818485D1 DE69818485T DE69818485T DE69818485D1 DE 69818485 D1 DE69818485 D1 DE 69818485D1 DE 69818485 T DE69818485 T DE 69818485T DE 69818485 T DE69818485 T DE 69818485T DE 69818485 D1 DE69818485 D1 DE 69818485D1
Authority
DE
Germany
Prior art keywords
electronic components
producing electronic
producing
components
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69818485T
Other languages
English (en)
Other versions
DE69818485T2 (de
Inventor
Christopher David Mccullough
Kevin Barry Ray
Alan Stanley Monk
John David Riches
Anthony Paul Kitson
Gareth Rhodri Parsons
David Stephen Riley
Peter Andrew Bennett
Richard David Hoare
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kodak Graphics Holding Inc
Original Assignee
Kodak Graphics Holding Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9717120.1A external-priority patent/GB9717120D0/en
Priority claimed from GBGB9722861.3A external-priority patent/GB9722861D0/en
Priority claimed from GBGB9809346.1A external-priority patent/GB9809346D0/en
Application filed by Kodak Graphics Holding Inc filed Critical Kodak Graphics Holding Inc
Application granted granted Critical
Publication of DE69818485D1 publication Critical patent/DE69818485D1/de
Publication of DE69818485T2 publication Critical patent/DE69818485T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C1/00—Forme preparation
    • B41C1/10—Forme preparation for lithographic printing; Master sheets for transferring a lithographic image to the forme
    • B41C1/1008—Forme preparation for lithographic printing; Master sheets for transferring a lithographic image to the forme by removal or destruction of lithographic material on the lithographic support, e.g. by laser or spark ablation; by the use of materials rendered soluble or insoluble by heat exposure, e.g. by heat produced from a light to heat transforming system; by on-the-press exposure or on-the-press development, e.g. by the fountain of photolithographic materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C1/00—Forme preparation
    • B41C1/10—Forme preparation for lithographic printing; Master sheets for transferring a lithographic image to the forme
    • B41C1/1008—Forme preparation for lithographic printing; Master sheets for transferring a lithographic image to the forme by removal or destruction of lithographic material on the lithographic support, e.g. by laser or spark ablation; by the use of materials rendered soluble or insoluble by heat exposure, e.g. by heat produced from a light to heat transforming system; by on-the-press exposure or on-the-press development, e.g. by the fountain of photolithographic materials
    • B41C1/1016—Forme preparation for lithographic printing; Master sheets for transferring a lithographic image to the forme by removal or destruction of lithographic material on the lithographic support, e.g. by laser or spark ablation; by the use of materials rendered soluble or insoluble by heat exposure, e.g. by heat produced from a light to heat transforming system; by on-the-press exposure or on-the-press development, e.g. by the fountain of photolithographic materials characterised by structural details, e.g. protective layers, backcoat layers or several imaging layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C2210/00—Preparation or type or constituents of the imaging layers, in relation to lithographic printing forme preparation
    • B41C2210/02—Positive working, i.e. the exposed (imaged) areas are removed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C2210/00—Preparation or type or constituents of the imaging layers, in relation to lithographic printing forme preparation
    • B41C2210/06—Developable by an alkaline solution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C2210/00—Preparation or type or constituents of the imaging layers, in relation to lithographic printing forme preparation
    • B41C2210/14—Multiple imaging layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C2210/00—Preparation or type or constituents of the imaging layers, in relation to lithographic printing forme preparation
    • B41C2210/22—Preparation or type or constituents of the imaging layers, in relation to lithographic printing forme preparation characterised by organic non-macromolecular additives, e.g. dyes, UV-absorbers, plasticisers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C2210/00—Preparation or type or constituents of the imaging layers, in relation to lithographic printing forme preparation
    • B41C2210/24—Preparation or type or constituents of the imaging layers, in relation to lithographic printing forme preparation characterised by a macromolecular compound or binder obtained by reactions involving carbon-to-carbon unsaturated bonds, e.g. acrylics, vinyl polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C2210/00—Preparation or type or constituents of the imaging layers, in relation to lithographic printing forme preparation
    • B41C2210/26—Preparation or type or constituents of the imaging layers, in relation to lithographic printing forme preparation characterised by a macromolecular compound or binder obtained by reactions not involving carbon-to-carbon unsaturated bonds
    • B41C2210/262—Phenolic condensation polymers, e.g. novolacs, resols
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks
DE69818485T 1997-08-14 1998-08-11 Verfahren zur herstellung von elektronischen bauteilen Expired - Lifetime DE69818485T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
GB9717120 1997-08-14
GBGB9717120.1A GB9717120D0 (en) 1997-08-14 1997-08-14 Improvements in relation to electronic parts
GBGB9722861.3A GB9722861D0 (en) 1997-10-29 1997-10-29 Improvements in relation to the manufacture of lithographic printing forms
GB9722861 1997-10-29
GB9809346 1998-05-01
GBGB9809346.1A GB9809346D0 (en) 1998-05-01 1998-05-01 Improvements in relation to pattern-forming methods and radiation sensitive materials
PCT/GB1998/002418 WO1999008879A1 (en) 1997-08-14 1998-08-11 Method of making masks and electronic parts

Publications (2)

Publication Number Publication Date
DE69818485D1 true DE69818485D1 (de) 2003-10-30
DE69818485T2 DE69818485T2 (de) 2004-07-22

Family

ID=27268971

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69818485T Expired - Lifetime DE69818485T2 (de) 1997-08-14 1998-08-11 Verfahren zur herstellung von elektronischen bauteilen

Country Status (9)

Country Link
US (1) US6596469B2 (de)
EP (1) EP1003645B1 (de)
JP (1) JP2003533707A (de)
AR (1) AR016621A1 (de)
AU (1) AU8739598A (de)
DE (1) DE69818485T2 (de)
IL (1) IL134522A (de)
TW (1) TW515929B (de)
WO (1) WO1999008879A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9722862D0 (en) * 1997-10-29 1997-12-24 Horsell Graphic Ind Ltd Pattern formation
GB2342459B (en) 1998-10-07 2003-01-15 Horsell Graphic Ind Ltd Improvements in relation to electronic parts
US6255033B1 (en) 1999-07-30 2001-07-03 Creo, Ltd. Positive acting photoresist compositions and imageable element
US6251559B1 (en) 1999-08-03 2001-06-26 Kodak Polychrome Graphics Llc Heat treatment method for obtaining imagable coatings and imagable coatings
US6706466B1 (en) 1999-08-03 2004-03-16 Kodak Polychrome Graphics Llc Articles having imagable coatings
US6300038B1 (en) 1999-11-19 2001-10-09 Kodak Polychrome Graphics Llc Articles having imagable coatings
US6391524B2 (en) 1999-11-19 2002-05-21 Kodak Polychrome Graphics Llc Article having imagable coatings
US6558787B1 (en) 1999-12-27 2003-05-06 Kodak Polychrome Graphics Llc Relation to manufacture of masks and electronic parts
US6506533B1 (en) 2000-06-07 2003-01-14 Kodak Polychrome Graphics Llc Polymers and their use in imagable products and image-forming methods
AU2001281317A1 (en) 2000-08-04 2002-02-18 Kodak Polychrome Graphics Co. Ltd. Lithographic printing form and method of preparation and use thereof
US6558872B1 (en) 2000-09-09 2003-05-06 Kodak Polychrome Graphics Llc Relation to the manufacture of masks and electronic parts
US6451502B1 (en) 2000-10-10 2002-09-17 Kodak Polychrome Graphics Llc manufacture of electronic parts
WO2002034517A1 (en) 2000-10-26 2002-05-02 Kodak Polychrome Graphics Company, Ltd. Compositions comprising a pigment
US7049046B2 (en) * 2004-03-30 2006-05-23 Eastman Kodak Company Infrared absorbing compounds and their use in imageable elements
US6723489B2 (en) 2002-01-30 2004-04-20 Kodak Polychrome Graphics Llp Printing form precursors
US6843176B2 (en) 2002-04-26 2005-01-18 Kodak Polychrome Graphics, Llc Method to remove unwanted, unexposed, radiation-sensitive layer in a lithographic printing plate
US6790590B2 (en) 2003-01-27 2004-09-14 Kodak Polychrome Graphics, Llp Infrared absorbing compounds and their use in imageable elements
US6908726B2 (en) * 2003-04-07 2005-06-21 Kodak Polychrome Graphics Llc Thermally imageable elements imageable at several wavelengths
US7371454B2 (en) * 2003-12-15 2008-05-13 Eastman Kodak Company Imageable element comprising sulfated polymers
US6969570B1 (en) 2004-10-26 2005-11-29 Kodak Polychrome Graphics, Llc Solvent resistant imageable element
GB2442016B (en) * 2006-09-20 2009-02-18 Exitech Ltd Method for thermally curing thin films on moving substrates
JP4927505B2 (ja) * 2006-11-16 2012-05-09 株式会社リコー 微細構造体製造方法および微細構造体形成用媒体
US9097977B2 (en) 2012-05-15 2015-08-04 Tokyo Electron Limited Process sequence for reducing pattern roughness and deformity

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GB1245924A (en) 1967-09-27 1971-09-15 Agfa Gevaert Improvements relating to thermo-recording
GB1260662A (en) 1968-03-27 1972-01-19 Agfa Gevaert Improvements relating to the sub-titling of processed photographic materials
US4115120A (en) 1977-09-29 1978-09-19 International Business Machines Corporation Method of forming thin film patterns by differential pre-baking of resist
JPS58162389A (ja) * 1982-03-23 1983-09-27 Ricoh Co Ltd 感熱記録材料
JPS60250686A (ja) 1984-05-25 1985-12-11 日本碍子株式会社 セラミツク配線基板の製造方法
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JPH07120045B2 (ja) 1987-10-22 1995-12-20 富士写真フイルム株式会社 パターン形成方法
US5102775A (en) 1988-09-30 1992-04-07 Kansai Paint Co., Ltd. Visible light sensitive electrodeposition coating composition and image-forming method using the same
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IL98660A (en) 1991-06-28 1996-10-16 Orbotech Ltd Method of printing an image on a substrate particularly useful for producing printed circuit boards
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CA2091286A1 (en) 1992-07-20 1994-01-21 John Grunwald Direct imaging process for forming resist pattern on a surface, and use thereof in fabricating printed boards
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Also Published As

Publication number Publication date
DE69818485T2 (de) 2004-07-22
AU8739598A (en) 1999-03-08
EP1003645B1 (de) 2003-09-24
EP1003645A1 (de) 2000-05-31
IL134522A0 (en) 2001-04-30
WO1999008879A1 (en) 1999-02-25
TW515929B (en) 2003-01-01
JP2003533707A (ja) 2003-11-11
IL134522A (en) 2003-12-10
US20020136961A1 (en) 2002-09-26
US6596469B2 (en) 2003-07-22
AR016621A1 (es) 2001-07-25

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