DE69806327D1 - Kurzbogenlampe - Google Patents

Kurzbogenlampe

Info

Publication number
DE69806327D1
DE69806327D1 DE69806327T DE69806327T DE69806327D1 DE 69806327 D1 DE69806327 D1 DE 69806327D1 DE 69806327 T DE69806327 T DE 69806327T DE 69806327 T DE69806327 T DE 69806327T DE 69806327 D1 DE69806327 D1 DE 69806327D1
Authority
DE
Germany
Prior art keywords
arc lamp
short arc
short
lamp
arc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69806327T
Other languages
English (en)
Other versions
DE69806327T2 (de
Inventor
Youichiro Higashimoto
Yoshihiko Shinohara
Yukuhiro Morimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Application granted granted Critical
Publication of DE69806327D1 publication Critical patent/DE69806327D1/de
Publication of DE69806327T2 publication Critical patent/DE69806327T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/32—Special longitudinal shape, e.g. for advertising purposes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/16—Selection of substances for gas fillings; Specified operating pressure or temperature having helium, argon, neon, krypton, or xenon as the principle constituent

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
DE69806327T 1997-10-31 1998-10-29 Kurzbogenlampe Expired - Lifetime DE69806327T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31464997A JP3430887B2 (ja) 1997-10-31 1997-10-31 ショートアークランプ

Publications (2)

Publication Number Publication Date
DE69806327D1 true DE69806327D1 (de) 2002-08-08
DE69806327T2 DE69806327T2 (de) 2003-02-27

Family

ID=18055878

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69806327T Expired - Lifetime DE69806327T2 (de) 1997-10-31 1998-10-29 Kurzbogenlampe

Country Status (4)

Country Link
US (1) US6356018B1 (de)
EP (1) EP0913855B1 (de)
JP (1) JP3430887B2 (de)
DE (1) DE69806327T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3480364B2 (ja) * 1999-04-23 2003-12-15 ウシオ電機株式会社 ショートアーク型放電ランプ
JP2001015070A (ja) * 1999-06-29 2001-01-19 Ushio Inc 放電ランプ
EP1065698B1 (de) * 1999-07-02 2008-07-30 Phoenix Electric Co., Ltd. Aufbauanordnung für Lampe und Dichtungsstruktur einer Lampe mit einer solchen Aufbauanordnung
JP3636654B2 (ja) * 2000-11-14 2005-04-06 株式会社小糸製作所 アークチューブ
JP3687582B2 (ja) * 2001-09-12 2005-08-24 ウシオ電機株式会社 放電ランプ
JP2003123992A (ja) * 2001-10-17 2003-04-25 Ushio Inc キセノン放電ランプ点灯装置
JP3858718B2 (ja) * 2002-02-13 2006-12-20 ウシオ電機株式会社 ショートアーク放電ランプ
JP4036039B2 (ja) * 2002-06-19 2008-01-23 ウシオ電機株式会社 ショートアーク型放電ランプ
JP2004178894A (ja) * 2002-11-26 2004-06-24 Ushio Inc ショートアーク型放電ランプ
DE102004002455A1 (de) * 2003-03-14 2004-09-23 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Lampe mit fixiertem Glasbauteil
JP4042605B2 (ja) * 2003-03-31 2008-02-06 ウシオ電機株式会社 キセノンランプ
JP4358729B2 (ja) * 2004-12-22 2009-11-04 株式会社オーク製作所 ショートアーク型放電灯
DE102005046483A1 (de) * 2005-09-28 2007-03-29 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Entladungslampe
JP2007290233A (ja) * 2006-04-25 2007-11-08 Ushio Inc 光照射器およびインクジェットプリンタ
US8084944B2 (en) 2006-12-22 2011-12-27 Osram Ag Lamp device and method for the production of a lamp device
DE102007020067B4 (de) 2007-04-27 2013-07-18 Osram Gmbh Verfahren zur Herstellung einer Molybdänfolie für den Lampenbau und Molybdänfolie sowie Lampe mit Molybdänfolie
JP5696878B2 (ja) * 2010-11-17 2015-04-08 ウシオ電機株式会社 キセノンショートアークランプ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7506655A (nl) * 1975-06-05 1976-12-07 Philips Nv Korte-boog ontladingslamp.
NL182439C (nl) 1978-05-23 1988-03-01 Philips Nv Korteboogontladingslamp.
JP2621891B2 (ja) 1987-12-07 1997-06-18 東芝ライテック株式会社 高圧放電灯
JPH04101348A (ja) 1990-08-17 1992-04-02 Ushio Inc 高圧放電灯
JP3166526B2 (ja) 1994-12-22 2001-05-14 ウシオ電機株式会社 ショートアーク型放電ランプ
JPH1021882A (ja) 1996-06-28 1998-01-23 Toshiba Lighting & Technol Corp 高圧放電ランプ，照射装置，点灯装置および露光装置
JPH10149801A (ja) 1996-11-19 1998-06-02 Iwasaki Electric Co Ltd ショートアーク型放電ランプ

Also Published As

Publication number Publication date
US6356018B1 (en) 2002-03-12
JPH11135067A (ja) 1999-05-21
EP0913855B1 (de) 2002-07-03
DE69806327T2 (de) 2003-02-27
EP0913855A2 (de) 1999-05-06
JP3430887B2 (ja) 2003-07-28
US20020021091A1 (en) 2002-02-21
EP0913855A3 (de) 1999-06-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition