DE69704385D1 - Kurzbogenentladungslampe - Google Patents
KurzbogenentladungslampeInfo
- Publication number
- DE69704385D1 DE69704385D1 DE69704385T DE69704385T DE69704385D1 DE 69704385 D1 DE69704385 D1 DE 69704385D1 DE 69704385 T DE69704385 T DE 69704385T DE 69704385 T DE69704385 T DE 69704385T DE 69704385 D1 DE69704385 D1 DE 69704385D1
- Authority
- DE
- Germany
- Prior art keywords
- discharge lamp
- arc discharge
- short arc
- short
- lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Discharge Lamp (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8060357A JPH09231946A (ja) | 1996-02-23 | 1996-02-23 | ショートアーク型放電ランプ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69704385D1 true DE69704385D1 (de) | 2001-05-03 |
DE69704385T2 DE69704385T2 (de) | 2001-08-09 |
Family
ID=13139834
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69704385T Expired - Lifetime DE69704385T2 (de) | 1996-02-23 | 1997-02-21 | Kurzbogenentladungslampe |
Country Status (6)
Country | Link |
---|---|
US (1) | US5929565A (de) |
EP (1) | EP0791950B1 (de) |
JP (1) | JPH09231946A (de) |
KR (1) | KR100428960B1 (de) |
DE (1) | DE69704385T2 (de) |
TW (1) | TW408852U (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19652822A1 (de) | 1996-12-18 | 1998-06-25 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Sinterelektrode |
US6215247B1 (en) * | 1997-10-03 | 2001-04-10 | Orc Manufacturing Co., Ltd. | Construction of electrode for high pressure discharge lamp and process for producing the same |
DE29823366U1 (de) * | 1998-08-06 | 1999-07-08 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Elektrode für eine Hochdruckentladungslampe mit langer Lebensdauer |
JP2000306546A (ja) * | 1999-04-21 | 2000-11-02 | Ushio Inc | ショートアーク放電ランプ |
JP2005108435A (ja) * | 1999-06-30 | 2005-04-21 | Hamamatsu Photonics Kk | フラッシュランプ |
AU745886B2 (en) * | 1999-12-20 | 2002-04-11 | Toshiba Lighting & Technology Corporation | A high-pressure metal halide A.C. discharge lamp and a lighting apparatus using the lamp |
JP4512968B2 (ja) | 2000-08-03 | 2010-07-28 | ウシオ電機株式会社 | ショートアーク型高圧放電ランプ |
JP3596453B2 (ja) * | 2000-09-28 | 2004-12-02 | ウシオ電機株式会社 | ショートアーク放電ランプ |
JP3846282B2 (ja) * | 2001-11-21 | 2006-11-15 | ウシオ電機株式会社 | ショートアーク型高圧放電ランプ |
JP4295527B2 (ja) * | 2003-02-27 | 2009-07-15 | 株式会社アライドマテリアル | 放電ランプ及びその電極構造 |
JP4042605B2 (ja) * | 2003-03-31 | 2008-02-06 | ウシオ電機株式会社 | キセノンランプ |
JP4714418B2 (ja) * | 2004-03-02 | 2011-06-29 | ウシオ電機株式会社 | 放電ランプ |
US20060175973A1 (en) * | 2005-02-07 | 2006-08-10 | Lisitsyn Igor V | Xenon lamp |
JP2009105059A (ja) * | 2009-01-05 | 2009-05-14 | Allied Material Corp | 放電ランプの電極構造 |
DE102009021235B4 (de) * | 2009-05-14 | 2018-07-26 | Osram Gmbh | Entladungslampe mit beschichteter Elektrode |
JP5299132B2 (ja) * | 2009-07-07 | 2013-09-25 | ウシオ電機株式会社 | デジタルプロジェクター用キセノンショートアークランプ |
JP5584093B2 (ja) * | 2010-11-05 | 2014-09-03 | 株式会社ユメックス | ショートアーク放電灯用陰極およびその製造方法 |
JP6487720B2 (ja) * | 2015-03-03 | 2019-03-20 | 株式会社ユメックス | ショートアーク放電ランプ用陽極およびその製法 |
US20160358751A1 (en) * | 2015-06-03 | 2016-12-08 | Jong-Hyun Lee | Arc discharge apparatus and plasma processing system including the same |
JP6647678B2 (ja) * | 2015-12-02 | 2020-02-14 | 岩崎電気株式会社 | ショートアーク型放電ランプ |
AT15991U1 (de) | 2017-05-12 | 2018-10-15 | Plansee Se | Hochtemperaturkomponente |
JP7013068B1 (ja) * | 2020-04-30 | 2022-01-31 | 株式会社ユメックス | ショートアーク放電ランプ用電極およびその生成方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1182743B (de) * | 1961-11-10 | 1964-12-03 | Patra Patent Treuhand | Anode fuer eine Hochdruckentladungslampe, insbesondere fuer eine Edelgas-Hochdruckentladungslampe |
US3723783A (en) * | 1970-04-22 | 1973-03-27 | Itt | Gaseous discharge high intensity lamp with fluid cooled electrode |
DE2245717A1 (de) * | 1972-09-18 | 1974-03-28 | Patra Patent Treuhand | Elektrode mit einem poroesen sinterkoerper |
JPS60110973U (ja) * | 1983-12-28 | 1985-07-27 | ウシオ電機株式会社 | シヨ−トア−ク放電灯 |
JP2601435B2 (ja) * | 1989-03-29 | 1997-04-16 | ウシオ電機株式会社 | 半導体ウエハー露光用ショートアーク水銀ランプ |
JPH02304857A (ja) * | 1989-05-19 | 1990-12-18 | Ushio Inc | ショートアーク型高圧水銀蒸気ランプ |
GB9413973D0 (en) * | 1994-07-11 | 1994-08-31 | Rank Brimar Ltd | Electrode structure |
-
1996
- 1996-02-23 JP JP8060357A patent/JPH09231946A/ja active Pending
-
1997
- 1997-01-28 TW TW088202462U patent/TW408852U/zh not_active IP Right Cessation
- 1997-02-21 DE DE69704385T patent/DE69704385T2/de not_active Expired - Lifetime
- 1997-02-21 KR KR1019970005373A patent/KR100428960B1/ko not_active IP Right Cessation
- 1997-02-21 EP EP97102911A patent/EP0791950B1/de not_active Expired - Lifetime
- 1997-02-24 US US08/806,515 patent/US5929565A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0791950B1 (de) | 2001-03-28 |
KR970063318A (ko) | 1997-09-12 |
EP0791950A2 (de) | 1997-08-27 |
EP0791950A3 (de) | 1997-12-10 |
KR100428960B1 (ko) | 2004-07-15 |
JPH09231946A (ja) | 1997-09-05 |
US5929565A (en) | 1999-07-27 |
TW408852U (en) | 2000-10-11 |
DE69704385T2 (de) | 2001-08-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |