DE69605392D1 - Entladungslampe - Google Patents

Entladungslampe

Info

Publication number
DE69605392D1
DE69605392D1 DE69605392T DE69605392T DE69605392D1 DE 69605392 D1 DE69605392 D1 DE 69605392D1 DE 69605392 T DE69605392 T DE 69605392T DE 69605392 T DE69605392 T DE 69605392T DE 69605392 D1 DE69605392 D1 DE 69605392D1
Authority
DE
Germany
Prior art keywords
discharge lamp
lamp
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69605392T
Other languages
English (en)
Other versions
DE69605392T2 (de
Inventor
Tatsushi Igarashi
Osamu Mizuno
Kazuo Nakamura
Shoichi Mayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Publication of DE69605392D1 publication Critical patent/DE69605392D1/de
Application granted granted Critical
Publication of DE69605392T2 publication Critical patent/DE69605392T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/38—Devices for influencing the colour or wavelength of the light
    • H01J61/40—Devices for influencing the colour or wavelength of the light by light filters; by coloured coatings in or on the envelope

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
DE69605392T 1995-12-20 1996-12-19 Entladungslampe Expired - Lifetime DE69605392T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35497295A JP3261961B2 (ja) 1995-12-20 1995-12-20 放電ランプ

Publications (2)

Publication Number Publication Date
DE69605392D1 true DE69605392D1 (de) 2000-01-05
DE69605392T2 DE69605392T2 (de) 2000-06-08

Family

ID=18441119

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69605392T Expired - Lifetime DE69605392T2 (de) 1995-12-20 1996-12-19 Entladungslampe

Country Status (5)

Country Link
US (1) US5861715A (de)
EP (1) EP0780880B1 (de)
JP (1) JP3261961B2 (de)
KR (1) KR100426580B1 (de)
DE (1) DE69605392T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001332216A (ja) * 2000-03-14 2001-11-30 Toshiba Lighting & Technology Corp 放電ランプ、光照射装置、殺菌装置、液体処理装置および空気清浄装置
US6670758B2 (en) * 2001-11-27 2003-12-30 Luxtel Llc Short arc lamp improved thermal transfer characteristics
DE10222954A1 (de) 2002-05-24 2003-12-04 Philips Intellectual Property Hochdruckgasentladungslampe
TWI288277B (en) * 2004-02-20 2007-10-11 Jr-Yung Liou Flat light source with high brightness and high uniformity
JP4736900B2 (ja) * 2006-03-30 2011-07-27 ウシオ電機株式会社 ショートアーク型水銀ランプ
DE112008003255A5 (de) * 2008-02-05 2011-01-20 Osram Gesellschaft mit beschränkter Haftung Lampe mit thermischer Verbesserung
JP5167955B2 (ja) * 2008-05-27 2013-03-21 ウシオ電機株式会社 キセノンランプ
DE102010028472A1 (de) * 2010-05-03 2011-11-03 Osram Gesellschaft mit beschränkter Haftung Edelgas - Kurzbogen - Entladungslampe
KR101295700B1 (ko) * 2011-08-08 2013-08-14 김우섭 포토 리소그래피 시스템의 노광장치 또는 ｌｃｄ 경화 시스템에서의 램프
JP5891795B2 (ja) * 2012-01-11 2016-03-23 ウシオ電機株式会社 光源装置
DE102015209382A1 (de) * 2015-05-21 2016-11-24 Dr. Laure Plasmatechnologie Gmbh Leuchtmittel, Beschichtung für ein Leuchtmittel und Beschichtungsverfahren
US10840051B2 (en) 2015-09-22 2020-11-17 Lightlab Sweden Ab Extraction structure for a UV lamp

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1177704A (en) * 1981-07-20 1984-11-13 James D. Rancourt Optical coatings for high temperature applications
JPS5958753A (ja) * 1982-09-28 1984-04-04 株式会社東芝 白熱電球
KR890004640B1 (ko) * 1984-09-28 1989-11-21 가부시끼 가이샤 도시바 광확산코우팅 및 그 형성방법과 코우팅한 램프
JP2668828B2 (ja) * 1988-07-05 1997-10-27 ウシオ電機株式会社 ショートアーク放電灯
JPH0773042B2 (ja) * 1989-11-24 1995-08-02 東芝ライテック株式会社 管 球
JPH05242864A (ja) * 1991-04-08 1993-09-21 Shinetsu Quartz Prod Co Ltd 放電管
DE4230986C2 (de) * 1991-09-16 2001-03-08 Hitachi Metals Ltd Nanokristalline, weichmagnetische Legierung
JPH0570901A (ja) 1991-09-16 1993-03-23 Hitachi Metals Ltd Ｆｅ基軟磁性合金
JP3222546B2 (ja) * 1992-06-04 2001-10-29 旭光学工業株式会社 紫外線照射装置の多層膜反射鏡および紫外線照射装置
EP0657752A1 (de) * 1993-12-08 1995-06-14 Osram Sylvania Inc. Optische Beschichtung und damit beschichtete Lampe
EP0682356B1 (de) * 1994-05-12 2000-01-26 Iwasaki Electric Co., Ltd. Metallhalogenidlampe
JP3312670B2 (ja) * 1994-05-12 2002-08-12 岩崎電気株式会社 メタルハライドランプ
US5552671A (en) * 1995-02-14 1996-09-03 General Electric Company UV Radiation-absorbing coatings and their use in lamps

Also Published As

Publication number Publication date
JP3261961B2 (ja) 2002-03-04
EP0780880B1 (de) 1999-12-01
KR100426580B1 (ko) 2004-07-05
US5861715A (en) 1999-01-19
EP0780880A1 (de) 1997-06-25
DE69605392T2 (de) 2000-06-08
KR970051787A (ko) 1997-07-29
JPH09171800A (ja) 1997-06-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition