KR970063318A - 쇼트아크형 방전램프 - Google Patents

쇼트아크형 방전램프 Download PDF

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Publication number
KR970063318A
KR970063318A KR1019970005373A KR19970005373A KR970063318A KR 970063318 A KR970063318 A KR 970063318A KR 1019970005373 A KR1019970005373 A KR 1019970005373A KR 19970005373 A KR19970005373 A KR 19970005373A KR 970063318 A KR970063318 A KR 970063318A
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KR
South Korea
Prior art keywords
anode
discharge lamp
short arc
light emitting
arc type
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Application number
KR1019970005373A
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English (en)
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KR100428960B1 (ko
Inventor
쇼이치 마야마
스스무 나카니시
Original Assignee
다나카 아키히로
우시오덴키 가부시키가이샤
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Publication of KR970063318A publication Critical patent/KR970063318A/ko
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Publication of KR100428960B1 publication Critical patent/KR100428960B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Discharge Lamp (AREA)

Abstract

본 발명은 발광관내에 양극과 음극이 대향배치된 쇼트아크형 방전램프에 관한 것으로, 점등시에 양극온도의 승온을 가능한 한 억제하여, 양극부재의 조기 증발로 인한 발광관의 내벽 혹화를 억제함으로 상기 램프의 사용수명을 연장하는 양극구조를 제공한다. 쇼트아크형 방전램프(1)에 있어서 양극(4)의 선단 근방을 제외한 외표면에 미립자형상 텅스텐의 소결층(6)을 형성함으로써 양극(4)의 실효 표면적을 증가시키고, 양극(4)으로부터 방열을 촉진시켜서 양극부재의 조기증발을 억제한다.

Description

쇼트아크형 방전램프
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (3)

  1. 발광관내에 양극과 음극이 대향배치되어 발광물질이 봉입된 쇼트아크형 방전램프에 있어서, 상기 양극의 선단 근방을 제외한 외표면에 미립자형상 텅스텐의 소결층이 형성되어 있는 것을 특징으로 하는 쇼트아크형 방전램프.
  2. 제1항에 있어서, 발광관내에 양극과 음극이 대향배치되고, 당해 발광관내에 Hg와 희가스로서 Xe, Ar, Kr, Ne중 적어도 1종 이상을 봉입한 것을 특징으로 하는 쇼트아크형 방전램프.
  3. 제1항에 있어서, 상기 양극의 선단에서 미립자 형상 텅스텐의 소결층이 형성된 영역의 경계까지의 거리를 x라 하고, 상기 양극 보디부의 직경을 D라고 했을 때, 0.1Dx0.45D인 것을 특징으로 하는 쇼트아크형 방전램프.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970005373A 1996-02-23 1997-02-21 쇼트아크형방전램프 KR100428960B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP96-60357 1996-02-23
JP8060357A JPH09231946A (ja) 1996-02-23 1996-02-23 ショートアーク型放電ランプ

Publications (2)

Publication Number Publication Date
KR970063318A true KR970063318A (ko) 1997-09-12
KR100428960B1 KR100428960B1 (ko) 2004-07-15

Family

ID=13139834

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970005373A KR100428960B1 (ko) 1996-02-23 1997-02-21 쇼트아크형방전램프

Country Status (6)

Country Link
US (1) US5929565A (ko)
EP (1) EP0791950B1 (ko)
JP (1) JPH09231946A (ko)
KR (1) KR100428960B1 (ko)
DE (1) DE69704385T2 (ko)
TW (1) TW408852U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100764385B1 (ko) * 2004-03-02 2007-10-08 우시오덴키 가부시키가이샤 방전 램프

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19652822A1 (de) 1996-12-18 1998-06-25 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Sinterelektrode
US6215247B1 (en) * 1997-10-03 2001-04-10 Orc Manufacturing Co., Ltd. Construction of electrode for high pressure discharge lamp and process for producing the same
DE19835476A1 (de) 1998-08-06 2000-02-10 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Elektrode für eine Hochdruckentladungslampe mit langer Lebensdauer
JP2000306546A (ja) * 1999-04-21 2000-11-02 Ushio Inc ショートアーク放電ランプ
JP2005108435A (ja) * 1999-06-30 2005-04-21 Hamamatsu Photonics Kk フラッシュランプ
AU745886B2 (en) * 1999-12-20 2002-04-11 Toshiba Lighting & Technology Corporation A high-pressure metal halide A.C. discharge lamp and a lighting apparatus using the lamp
JP4512968B2 (ja) 2000-08-03 2010-07-28 ウシオ電機株式会社 ショートアーク型高圧放電ランプ
JP3596453B2 (ja) * 2000-09-28 2004-12-02 ウシオ電機株式会社 ショートアーク放電ランプ
JP3846282B2 (ja) * 2001-11-21 2006-11-15 ウシオ電機株式会社 ショートアーク型高圧放電ランプ
JP4295527B2 (ja) * 2003-02-27 2009-07-15 株式会社アライドマテリアル 放電ランプ及びその電極構造
JP4042605B2 (ja) * 2003-03-31 2008-02-06 ウシオ電機株式会社 キセノンランプ
US20060175973A1 (en) * 2005-02-07 2006-08-10 Lisitsyn Igor V Xenon lamp
JP2009105059A (ja) * 2009-01-05 2009-05-14 Allied Material Corp 放電ランプの電極構造
DE102009021235B4 (de) 2009-05-14 2018-07-26 Osram Gmbh Entladungslampe mit beschichteter Elektrode
JP5299132B2 (ja) * 2009-07-07 2013-09-25 ウシオ電機株式会社 デジタルプロジェクター用キセノンショートアークランプ
JP5584093B2 (ja) * 2010-11-05 2014-09-03 株式会社ユメックス ショートアーク放電灯用陰極およびその製造方法
JP6487720B2 (ja) * 2015-03-03 2019-03-20 株式会社ユメックス ショートアーク放電ランプ用陽極およびその製法
US20160358751A1 (en) * 2015-06-03 2016-12-08 Jong-Hyun Lee Arc discharge apparatus and plasma processing system including the same
JP6647678B2 (ja) * 2015-12-02 2020-02-14 岩崎電気株式会社 ショートアーク型放電ランプ
AT15991U1 (de) * 2017-05-12 2018-10-15 Plansee Se Hochtemperaturkomponente
KR20220054888A (ko) * 2020-04-30 2022-05-03 유멕스 인크. 쇼트 아크 방전 램프용 전극 및 그 생성 방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1182743B (de) * 1961-11-10 1964-12-03 Patra Patent Treuhand Anode fuer eine Hochdruckentladungslampe, insbesondere fuer eine Edelgas-Hochdruckentladungslampe
US3723783A (en) * 1970-04-22 1973-03-27 Itt Gaseous discharge high intensity lamp with fluid cooled electrode
DE2245717A1 (de) * 1972-09-18 1974-03-28 Patra Patent Treuhand Elektrode mit einem poroesen sinterkoerper
JPS60110973U (ja) * 1983-12-28 1985-07-27 ウシオ電機株式会社 シヨ−トア−ク放電灯
JP2601435B2 (ja) * 1989-03-29 1997-04-16 ウシオ電機株式会社 半導体ウエハー露光用ショートアーク水銀ランプ
JPH02304857A (ja) * 1989-05-19 1990-12-18 Ushio Inc ショートアーク型高圧水銀蒸気ランプ
GB9413973D0 (en) * 1994-07-11 1994-08-31 Rank Brimar Ltd Electrode structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100764385B1 (ko) * 2004-03-02 2007-10-08 우시오덴키 가부시키가이샤 방전 램프

Also Published As

Publication number Publication date
JPH09231946A (ja) 1997-09-05
KR100428960B1 (ko) 2004-07-15
EP0791950A2 (en) 1997-08-27
TW408852U (en) 2000-10-11
DE69704385D1 (de) 2001-05-03
DE69704385T2 (de) 2001-08-09
EP0791950A3 (en) 1997-12-10
EP0791950B1 (en) 2001-03-28
US5929565A (en) 1999-07-27

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