DE69802791D1 - Ätzverfahren - Google Patents

Ätzverfahren

Info

Publication number
DE69802791D1
DE69802791D1 DE69802791T DE69802791T DE69802791D1 DE 69802791 D1 DE69802791 D1 DE 69802791D1 DE 69802791 T DE69802791 T DE 69802791T DE 69802791 T DE69802791 T DE 69802791T DE 69802791 D1 DE69802791 D1 DE 69802791D1
Authority
DE
Germany
Prior art keywords
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69802791T
Other languages
English (en)
Other versions
DE69802791T2 (de
Inventor
William Eason
William Ross
George Smith
Eric Barry
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qinetiq Ltd
Original Assignee
Qinetiq Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9707769.7A external-priority patent/GB9707769D0/en
Priority claimed from GBGB9803164.4A external-priority patent/GB9803164D0/en
Application filed by Qinetiq Ltd filed Critical Qinetiq Ltd
Publication of DE69802791D1 publication Critical patent/DE69802791D1/de
Application granted granted Critical
Publication of DE69802791T2 publication Critical patent/DE69802791T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C30B29/22—Complex oxides
    • C30B29/30—Niobates; Vanadates; Tantalates
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/355—Non-linear optics characterised by the materials used
    • G02F1/3558—Poled materials, e.g. with periodic poling; Fabrication of domain inverted structures, e.g. for quasi-phase-matching [QPM]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/241—Light guide terminations
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3688—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier using laser ablation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Weting (AREA)
  • Optical Integrated Circuits (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE69802791T 1997-04-17 1998-04-17 Ätzverfahren Expired - Lifetime DE69802791T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GBGB9707769.7A GB9707769D0 (en) 1997-04-17 1997-04-17 Etching method
GBGB9713362.3A GB9713362D0 (en) 1997-04-17 1997-06-24 Etching method
GBGB9803164.4A GB9803164D0 (en) 1997-04-17 1998-02-13 Etching method
PCT/GB1998/001123 WO1998046813A1 (en) 1997-04-17 1998-04-17 Etching method

Publications (2)

Publication Number Publication Date
DE69802791D1 true DE69802791D1 (de) 2002-01-17
DE69802791T2 DE69802791T2 (de) 2002-06-20

Family

ID=27268814

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69802791T Expired - Lifetime DE69802791T2 (de) 1997-04-17 1998-04-17 Ätzverfahren

Country Status (7)

Country Link
US (1) US6344150B1 (de)
EP (1) EP0975828B1 (de)
JP (1) JP4667544B2 (de)
AU (1) AU7063298A (de)
DE (1) DE69802791T2 (de)
GB (1) GB2339554B (de)
WO (1) WO1998046813A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6670280B2 (en) 2001-06-15 2003-12-30 University Of Southampton Methods of microstructuring ferroelectric materials
EP1266983A1 (de) * 2001-06-15 2002-12-18 University Of Southampton Verfahren zur Mikrostrukturierung von ferroelektrischen Materialien
DE10132850A1 (de) * 2001-07-06 2003-01-23 Fraunhofer Ges Forschung Ablenkeinrichtung und Verfahren zur Ablenkung elektromagnetischer Wellen und optisches Element hierfür, sowie Verfahren zur Herstellung photonischer Strukturen
US20060219655A1 (en) * 2003-08-21 2006-10-05 Yasuo Cho Ferroelectric thin-film production method, voltage-application etching apparatus, ferroelectric crystal thin-film substrate, and ferroelectric crystal wafer
JP4764964B2 (ja) * 2004-02-18 2011-09-07 皆方 誠 微小周期分極反転構造形成方法及び微小周期分極反転構造
JP2008170931A (ja) * 2006-12-15 2008-07-24 Seiko Epson Corp 波長変換素子の製造装置及び波長変換素子の製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02125209A (ja) * 1988-11-02 1990-05-14 Sumitomo Electric Ind Ltd 光導波路・光ファイバ結合構造
JPH0337194A (ja) * 1989-07-05 1991-02-18 Sumitomo Metal Mining Co Ltd リン酸チタン・カリウム結晶の強誘電分域の判定方法
JPH04371913A (ja) * 1991-06-20 1992-12-24 Matsushita Electric Ind Co Ltd 光変調器および光スイッチ
JPH0517295A (ja) * 1991-07-05 1993-01-26 Ibiden Co Ltd ドメイン反転処理が施されたニオブ酸リチウム単結晶薄膜
JPH0579813A (ja) * 1991-09-18 1993-03-30 Canon Inc カンチレバー状変位素子、カンチレバー型プローブ及びそれを用いた情報処理装置と走査型トンネル顕微鏡
JP3303346B2 (ja) * 1991-11-19 2002-07-22 ソニー株式会社 ニオブ酸リチウム及びタンタル酸リチウムの分極制御方法とこれによる光導波路デバイスの製造方法及び光導波路デバイス
JP3158203B2 (ja) * 1992-02-03 2001-04-23 イビデン株式会社 リッジ型三次元導波路の製造方法
JPH05273418A (ja) * 1992-03-25 1993-10-22 Ibiden Co Ltd リッジ型三次元光導波路とその製造方法
JPH076600A (ja) 1993-06-21 1995-01-10 Hitachi Ltd 半導体記憶装置の電気的特性検査方法および装置
US5589083A (en) * 1993-12-11 1996-12-31 Electronics And Telecommunications Research Institute Method of manufacturing microstructure by the anisotropic etching and bonding of substrates
JP3264074B2 (ja) * 1994-01-24 2002-03-11 松下電器産業株式会社 積層強誘電体及びその接合方法
JPH07261218A (ja) * 1994-03-25 1995-10-13 Fuji Photo Film Co Ltd 強誘電体のドメイン反転構造形成方法
US5519802A (en) * 1994-05-09 1996-05-21 Deacon Research Method for making devices having a pattern poled structure and pattern poled structure devices
JPH086080A (ja) * 1994-06-16 1996-01-12 Eastman Kodak Co 反転された強誘電性ドメイン領域の形成方法
JPH08304863A (ja) * 1995-04-28 1996-11-22 Kyocera Corp 光デバイスの製造方法
US5756263A (en) * 1995-05-30 1998-05-26 Eastman Kodak Company Method of inverting ferroelectric domains by application of controlled electric field
JPH10246900A (ja) * 1997-03-04 1998-09-14 Ngk Insulators Ltd 強誘電体単結晶基板の微小構造の製造方法

Also Published As

Publication number Publication date
AU7063298A (en) 1998-11-11
GB2339554B (en) 2001-11-28
EP0975828A1 (de) 2000-02-02
GB9924103D0 (en) 1999-12-15
WO1998046813A1 (en) 1998-10-22
EP0975828B1 (de) 2001-12-05
JP4667544B2 (ja) 2011-04-13
GB2339554A (en) 2000-02-02
JP2002501468A (ja) 2002-01-15
DE69802791T2 (de) 2002-06-20
US6344150B1 (en) 2002-02-05

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