GB9713362D0 - Etching method - Google Patents

Etching method

Info

Publication number
GB9713362D0
GB9713362D0 GBGB9713362.3A GB9713362A GB9713362D0 GB 9713362 D0 GB9713362 D0 GB 9713362D0 GB 9713362 A GB9713362 A GB 9713362A GB 9713362 D0 GB9713362 D0 GB 9713362D0
Authority
GB
United Kingdom
Prior art keywords
etching method
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9713362.3A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Southampton
Original Assignee
University of Southampton
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Southampton filed Critical University of Southampton
Publication of GB9713362D0 publication Critical patent/GB9713362D0/en
Priority to GBGB9803164.4A priority Critical patent/GB9803164D0/en
Priority to DE69802791T priority patent/DE69802791T2/en
Priority to JP54364598A priority patent/JP4667544B2/en
Priority to EP98917392A priority patent/EP0975828B1/en
Priority to AU70632/98A priority patent/AU7063298A/en
Priority to PCT/GB1998/001123 priority patent/WO1998046813A1/en
Priority to GB9924103A priority patent/GB2339554B/en
Priority to US09/403,084 priority patent/US6344150B1/en
Pending legal-status Critical Current

Links

GBGB9713362.3A 1997-04-17 1997-06-24 Etching method Pending GB9713362D0 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GBGB9803164.4A GB9803164D0 (en) 1997-04-17 1998-02-13 Etching method
DE69802791T DE69802791T2 (en) 1997-04-17 1998-04-17 etching
JP54364598A JP4667544B2 (en) 1997-04-17 1998-04-17 Etching method
EP98917392A EP0975828B1 (en) 1997-04-17 1998-04-17 Etching method
AU70632/98A AU7063298A (en) 1997-04-17 1998-04-17 Etching method
PCT/GB1998/001123 WO1998046813A1 (en) 1997-04-17 1998-04-17 Etching method
GB9924103A GB2339554B (en) 1997-04-17 1998-04-17 Etching method
US09/403,084 US6344150B1 (en) 1997-04-17 1998-04-17 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9707769.7A GB9707769D0 (en) 1997-04-17 1997-04-17 Etching method

Publications (1)

Publication Number Publication Date
GB9713362D0 true GB9713362D0 (en) 1997-08-27

Family

ID=10810925

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB9707769.7A Pending GB9707769D0 (en) 1997-04-17 1997-04-17 Etching method
GBGB9713362.3A Pending GB9713362D0 (en) 1997-04-17 1997-06-24 Etching method

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GBGB9707769.7A Pending GB9707769D0 (en) 1997-04-17 1997-04-17 Etching method

Country Status (1)

Country Link
GB (2) GB9707769D0 (en)

Also Published As

Publication number Publication date
GB9707769D0 (en) 1997-06-04

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