GB9803164D0 - Etching method - Google Patents

Etching method

Info

Publication number
GB9803164D0
GB9803164D0 GBGB9803164.4A GB9803164A GB9803164D0 GB 9803164 D0 GB9803164 D0 GB 9803164D0 GB 9803164 A GB9803164 A GB 9803164A GB 9803164 D0 GB9803164 D0 GB 9803164D0
Authority
GB
United Kingdom
Prior art keywords
etching method
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9803164.4A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Southampton
Original Assignee
University of Southampton
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9707769.7A external-priority patent/GB9707769D0/en
Application filed by University of Southampton filed Critical University of Southampton
Publication of GB9803164D0 publication Critical patent/GB9803164D0/en
Priority to EP98917392A priority Critical patent/EP0975828B1/en
Priority to GB9924103A priority patent/GB2339554B/en
Priority to JP54364598A priority patent/JP4667544B2/en
Priority to US09/403,084 priority patent/US6344150B1/en
Priority to AU70632/98A priority patent/AU7063298A/en
Priority to DE69802791T priority patent/DE69802791T2/en
Priority to PCT/GB1998/001123 priority patent/WO1998046813A1/en
Pending legal-status Critical Current

Links

GBGB9803164.4A 1997-04-17 1998-02-13 Etching method Pending GB9803164D0 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
EP98917392A EP0975828B1 (en) 1997-04-17 1998-04-17 Etching method
GB9924103A GB2339554B (en) 1997-04-17 1998-04-17 Etching method
JP54364598A JP4667544B2 (en) 1997-04-17 1998-04-17 Etching method
US09/403,084 US6344150B1 (en) 1997-04-17 1998-04-17 Etching method
AU70632/98A AU7063298A (en) 1997-04-17 1998-04-17 Etching method
DE69802791T DE69802791T2 (en) 1997-04-17 1998-04-17 etching
PCT/GB1998/001123 WO1998046813A1 (en) 1997-04-17 1998-04-17 Etching method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9707769.7A GB9707769D0 (en) 1997-04-17 1997-04-17 Etching method
GBGB9713362.3A GB9713362D0 (en) 1997-04-17 1997-06-24 Etching method

Publications (1)

Publication Number Publication Date
GB9803164D0 true GB9803164D0 (en) 1998-04-08

Family

ID=26311396

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9803164.4A Pending GB9803164D0 (en) 1997-04-17 1998-02-13 Etching method

Country Status (1)

Country Link
GB (1) GB9803164D0 (en)

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