DE69738341D1 - Aluminiumoxid-beschichtetes Werkzeug und Verfahren zu seiner Herstellung - Google Patents

Aluminiumoxid-beschichtetes Werkzeug und Verfahren zu seiner Herstellung

Info

Publication number
DE69738341D1
DE69738341D1 DE69738341T DE69738341T DE69738341D1 DE 69738341 D1 DE69738341 D1 DE 69738341D1 DE 69738341 T DE69738341 T DE 69738341T DE 69738341 T DE69738341 T DE 69738341T DE 69738341 D1 DE69738341 D1 DE 69738341D1
Authority
DE
Germany
Prior art keywords
alumina
production
coated tool
coated
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69738341T
Other languages
English (en)
Other versions
DE69738341T2 (de
Inventor
Toshio Ishii
Masayuki Gonda
Hiroshi Ueda
Tsunehiro Kawata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moldino Tool Engineering Ltd
Original Assignee
Hitachi Tool Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=16297125&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69738341(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hitachi Tool Engineering Ltd filed Critical Hitachi Tool Engineering Ltd
Publication of DE69738341D1 publication Critical patent/DE69738341D1/de
Application granted granted Critical
Publication of DE69738341T2 publication Critical patent/DE69738341T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/403—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
DE69738341T 1996-07-03 1997-07-01 Aluminiumoxid-beschichtetes Werkzeug und Verfahren zu seiner Herstellung Expired - Lifetime DE69738341T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19279596 1996-07-03
JP19279596A JP3418066B2 (ja) 1996-07-03 1996-07-03 アルミナ被覆工具とその製造方法

Publications (2)

Publication Number Publication Date
DE69738341D1 true DE69738341D1 (de) 2008-01-17
DE69738341T2 DE69738341T2 (de) 2008-03-13

Family

ID=16297125

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69738341T Expired - Lifetime DE69738341T2 (de) 1996-07-03 1997-07-01 Aluminiumoxid-beschichtetes Werkzeug und Verfahren zu seiner Herstellung

Country Status (4)

Country Link
US (2) US5972495A (de)
EP (1) EP0816531B1 (de)
JP (1) JP3418066B2 (de)
DE (1) DE69738341T2 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69802035T2 (de) * 1997-05-12 2002-03-21 Mitsubishi Materials Corp Beschichtetes Schneidwerkzeug
JP3678924B2 (ja) * 1998-11-05 2005-08-03 日立ツール株式会社 酸化アルミニウム被覆工具
US6472060B1 (en) 2000-01-19 2002-10-29 Seco Tools Ab Coated body with nanocrystalline CVD coating for enhanced edge toughness and reduced friction
US7264668B2 (en) 2001-10-16 2007-09-04 The Chinese University Of Hong Kong Decorative hard coating and method for manufacture
KR100564605B1 (ko) * 2004-01-14 2006-03-28 삼성전자주식회사 반도체 소자의 금속 배선 형성 방법
KR100446300B1 (ko) * 2002-05-30 2004-08-30 삼성전자주식회사 반도체 소자의 금속 배선 형성 방법
US20080070405A1 (en) * 2002-05-30 2008-03-20 Park Jae-Hwa Methods of forming metal wiring layers for semiconductor devices
AU2003254888A1 (en) * 2002-08-08 2004-02-25 Kabushiki Kaisha Kobe Seiko Sho PROCESS FOR PRODUCING ALUMINA COATING COMPOSED MAINLY OF Alpha-TYPE CRYSTAL STRUCTURE, ALUMINA COATING COMPOSED MAINLY OF Alpha-TYPE CRYSTAL STRUCTURE, LAMINATE COATING INCLUDING THE ALUMINA COATING, MEMBER CLAD WITH THE ALUMINA COATING OR LAMINATE COATING, PROCESS FOR PRODUCING THE MEMBER, AND PHYSICAL EVAPORATION APPARATU
JP4173762B2 (ja) * 2003-04-04 2008-10-29 株式会社神戸製鋼所 α型結晶構造主体のアルミナ皮膜の製造方法および積層皮膜被覆部材の製造方法
JP4205546B2 (ja) * 2003-09-16 2009-01-07 株式会社神戸製鋼所 耐摩耗性、耐熱性および基材との密着性に優れた積層皮膜の製造方法
JP4446469B2 (ja) * 2004-03-12 2010-04-07 住友電工ハードメタル株式会社 被覆切削工具
US7455918B2 (en) * 2004-03-12 2008-11-25 Kennametal Inc. Alumina coating, coated product and method of making the same
JP4466841B2 (ja) * 2004-06-30 2010-05-26 三菱マテリアル株式会社 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具
JP2006028600A (ja) * 2004-07-16 2006-02-02 Kobe Steel Ltd 耐摩耗性と耐熱性に優れた積層皮膜
JP4518258B2 (ja) * 2004-08-11 2010-08-04 三菱マテリアル株式会社 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具
JP2007283478A (ja) * 2006-03-24 2007-11-01 Sumitomo Electric Ind Ltd 表面被覆切削工具
SE530634C2 (sv) * 2006-06-15 2008-07-22 Sandvik Intellectual Property Belagt hårdmetallskär, metod att tillverka detta samt dess användning vid torr fräsning av gjutjärn
JP5029825B2 (ja) * 2007-09-28 2012-09-19 三菱マテリアル株式会社 硬質被覆層が高速重切削加工ですぐれた耐チッピング性と耐摩耗性を発揮する表面被覆切削工具
US20100129626A1 (en) 2008-11-24 2010-05-27 Langhorn Jason B Multilayer Coatings
US20110066253A1 (en) 2008-11-24 2011-03-17 Depuy Products, Inc. Ceramic coated orthopaedic implants and method of making such implants
US20100255337A1 (en) * 2008-11-24 2010-10-07 Langhorn Jason B Multilayer Coatings
US8409734B2 (en) 2011-03-04 2013-04-02 Kennametal Inc. Coated substrates and methods of making same
US9199311B2 (en) * 2011-04-20 2015-12-01 Tungaloy Corporation Coated cutting tool
JP2013220521A (ja) * 2012-04-19 2013-10-28 Sumitomo Electric Hardmetal Corp 切削工具用の基材および表面被覆切削工具
US9138864B2 (en) 2013-01-25 2015-09-22 Kennametal Inc. Green colored refractory coatings for cutting tools
US9017809B2 (en) 2013-01-25 2015-04-28 Kennametal Inc. Coatings for cutting tools
DE112014001562B4 (de) 2013-03-21 2019-08-08 Kennametal Inc. Beschichtungen für Schneidwerkzeuge
DE112014001520B4 (de) 2013-03-21 2023-06-15 Kennametal Inc. Beschichtungen für Schneidwerkzeuge
US9371580B2 (en) 2013-03-21 2016-06-21 Kennametal Inc. Coated body wherein the coating scheme includes a coating layer of TiAl2O3 and method of making the same
US9427808B2 (en) 2013-08-30 2016-08-30 Kennametal Inc. Refractory coatings for cutting tools
WO2016052479A1 (ja) * 2014-09-30 2016-04-07 三菱マテリアル株式会社 耐チッピング性にすぐれた表面被覆切削工具
US9719175B2 (en) 2014-09-30 2017-08-01 Kennametal Inc. Multilayer structured coatings for cutting tools
US9650712B2 (en) 2014-12-08 2017-05-16 Kennametal Inc. Inter-anchored multilayer refractory coatings
US9650714B2 (en) 2014-12-08 2017-05-16 Kennametal Inc. Nanocomposite refractory coatings and applications thereof

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2535866B2 (ja) * 1987-02-10 1996-09-18 三菱マテリアル株式会社 表面被覆硬質合金製切削工具
JP2556101B2 (ja) * 1988-07-15 1996-11-20 三菱マテリアル株式会社 表面被覆炭化タングステン基超硬合金製切削工具
SE464818B (sv) * 1989-06-16 1991-06-17 Sandvik Ab Belagt skaer foer skaerande bearbetning
JP3136778B2 (ja) * 1992-06-11 2001-02-19 三菱マテリアル株式会社 耐チッピング性にすぐれた表面被覆炭窒化チタン基サーメット製切削工具
US5372873A (en) * 1992-10-22 1994-12-13 Mitsubishi Materials Corporation Multilayer coated hard alloy cutting tool
SE501527C2 (sv) * 1992-12-18 1995-03-06 Sandvik Ab Sätt och alster vid beläggning av ett skärande verktyg med ett aluminiumoxidskikt
SE514737C2 (sv) * 1994-03-22 2001-04-09 Sandvik Ab Belagt skärverktyg av hårdmetall
US5920760A (en) * 1994-05-31 1999-07-06 Mitsubishi Materials Corporation Coated hard alloy blade member
US5652045A (en) * 1994-10-20 1997-07-29 Mitsubishi Materials Corporation Coated tungsten carbide-based cemented carbide blade member
US5635247A (en) * 1995-02-17 1997-06-03 Seco Tools Ab Alumina coated cemented carbide body
SE514181C2 (sv) * 1995-04-05 2001-01-15 Sandvik Ab Belagt hårmetallskär för fräsning av gjutjärn
SE514177C2 (sv) * 1995-07-14 2001-01-15 Sandvik Ab Belagt hårdmetallskär för intermittent bearbetning i låglegerat stål

Also Published As

Publication number Publication date
EP0816531A1 (de) 1998-01-07
US6156383A (en) 2000-12-05
US5972495A (en) 1999-10-26
DE69738341T2 (de) 2008-03-13
EP0816531B1 (de) 2007-12-05
JPH1018039A (ja) 1998-01-20
JP3418066B2 (ja) 2003-06-16

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Legal Events

Date Code Title Description
8363 Opposition against the patent