DE69734958D1 - Fluorierte ionische Sulfonylimide und Sulfonylmethylide, Verfahren zu deren Herstellung sowie deren Anwednung als Photoinitiatoren - Google Patents
Fluorierte ionische Sulfonylimide und Sulfonylmethylide, Verfahren zu deren Herstellung sowie deren Anwednung als PhotoinitiatorenInfo
- Publication number
- DE69734958D1 DE69734958D1 DE69734958T DE69734958T DE69734958D1 DE 69734958 D1 DE69734958 D1 DE 69734958D1 DE 69734958 T DE69734958 T DE 69734958T DE 69734958 T DE69734958 T DE 69734958T DE 69734958 D1 DE69734958 D1 DE 69734958D1
- Authority
- DE
- Germany
- Prior art keywords
- sulfonylmethylidene
- sulfonylimides
- photoinitiators
- preparation
- fluorinated ionic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 125000005463 sulfonylimide group Chemical group 0.000 title 1
- -1 sulfonylmethylidene Chemical group 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C307/00—Amides of sulfuric acids, i.e. compounds having singly-bound oxygen atoms of sulfate groups replaced by nitrogen atoms, not being part of nitro or nitroso groups
- C07C307/02—Monoamides of sulfuric acids or esters thereof, e.g. sulfamic acids
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
- C07C309/78—Halides of sulfonic acids
- C07C309/79—Halides of sulfonic acids having halosulfonyl groups bound to acyclic carbon atoms
- C07C309/80—Halides of sulfonic acids having halosulfonyl groups bound to acyclic carbon atoms of a saturated carbon skeleton
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C311/00—Amides of sulfonic acids, i.e. compounds having singly-bound oxygen atoms of sulfo groups replaced by nitrogen atoms, not being part of nitro or nitroso groups
- C07C311/48—Amides of sulfonic acids, i.e. compounds having singly-bound oxygen atoms of sulfo groups replaced by nitrogen atoms, not being part of nitro or nitroso groups having nitrogen atoms of sulfonamide groups further bound to another hetero atom
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C381/00—Compounds containing carbon and sulfur and having functional groups not covered by groups C07C301/00 - C07C337/00
- C07C381/12—Sulfonium compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F8/00—Chemical modification by after-treatment
- C08F8/44—Preparation of metal salts or ammonium salts
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/38—Polysiloxanes modified by chemical after-treatment
- C08G77/382—Polysiloxanes modified by chemical after-treatment containing atoms other than carbon, hydrogen, oxygen or silicon
- C08G77/392—Polysiloxanes modified by chemical after-treatment containing atoms other than carbon, hydrogen, oxygen or silicon containing sulfur
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/38—Polysiloxanes modified by chemical after-treatment
- C08G77/382—Polysiloxanes modified by chemical after-treatment containing atoms other than carbon, hydrogen, oxygen or silicon
- C08G77/398—Polysiloxanes modified by chemical after-treatment containing atoms other than carbon, hydrogen, oxygen or silicon containing boron or metal atoms
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA002187046A CA2187046A1 (fr) | 1996-10-03 | 1996-10-03 | Sulfonylimidures et sulfonylmethylures, leur utilisation comme photoinitiateur |
CA2187046 | 1996-10-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69734958D1 true DE69734958D1 (de) | 2006-02-02 |
DE69734958T2 DE69734958T2 (de) | 2006-08-10 |
Family
ID=4159016
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69734958T Expired - Lifetime DE69734958T2 (de) | 1996-10-03 | 1997-10-02 | Fluorierte ionische Sulfonylimide und Sulfonylmethylide, Verfahren zu deren Herstellung sowie deren Anwendung als Photoinitiatoren |
DE69734959T Expired - Lifetime DE69734959T2 (de) | 1996-10-03 | 1997-10-02 | Polymerische polyionische Verbindungen, Verfahren zu deren Herstellung sowie deren Anwendung als Photoinitiatoren |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69734959T Expired - Lifetime DE69734959T2 (de) | 1996-10-03 | 1997-10-02 | Polymerische polyionische Verbindungen, Verfahren zu deren Herstellung sowie deren Anwendung als Photoinitiatoren |
Country Status (5)
Country | Link |
---|---|
US (2) | US6008265A (de) |
EP (2) | EP0834502B1 (de) |
JP (2) | JP4226672B2 (de) |
CA (1) | CA2187046A1 (de) |
DE (2) | DE69734958T2 (de) |
Families Citing this family (67)
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---|---|---|---|---|
CA2187046A1 (fr) * | 1996-10-03 | 1998-04-03 | Alain Vallee | Sulfonylimidures et sulfonylmethylures, leur utilisation comme photoinitiateur |
JP4939679B2 (ja) | 1997-07-25 | 2012-05-30 | アセップ・インク | 非局在化アニオン電荷を有するイオン化合物、及びそれらのイオン伝導性成分又は触媒としての使用 |
JP4204113B2 (ja) * | 1997-12-04 | 2009-01-07 | 株式会社Adeka | 新規な芳香族スルホニウム化合物、これからなる光酸発生剤およびこれを含む光重合性組成物、光造形用樹脂組成物ならびに光学的立体造形法 |
JP2000119306A (ja) * | 1998-03-20 | 2000-04-25 | Nippon Soda Co Ltd | ヨ―ドニウム塩化合物を含有する光硬化性組成物 |
US6031014A (en) * | 1998-12-08 | 2000-02-29 | Crivello; James V. | Initiator compositions and methods for their synthesis and use |
CA2402113A1 (en) * | 2000-03-09 | 2001-09-13 | Jonathan D. Zook | Chemically resistant polythioethers and formation thereof |
US20020082357A1 (en) * | 2000-10-06 | 2002-06-27 | Corcoran Robert C. | Resin and its use in converting morphine to codeine |
ATE394707T1 (de) * | 2000-12-04 | 2008-05-15 | Ciba Holding Inc | Oniumsalze und ihre verwendung als latente säuren |
JP4102032B2 (ja) * | 2001-03-12 | 2008-06-18 | 富士フイルム株式会社 | ポジ型レジスト組成物 |
CN1328254C (zh) * | 2001-03-12 | 2007-07-25 | 贝尔法斯特皇后大学 | 金属二(三氟甲磺酰)亚胺化合物和金属二(三氟甲磺酰)亚胺化合物的合成方法 |
JP4067284B2 (ja) * | 2001-03-12 | 2008-03-26 | 富士フイルム株式会社 | ポジ型レジスト組成物 |
JP3969077B2 (ja) * | 2001-04-04 | 2007-08-29 | 住友化学株式会社 | 高分子電解質及びその製造方法 |
US6545109B2 (en) | 2001-06-29 | 2003-04-08 | 3M Innovative Properties Company | Imide salts as emulsifiers for the polymerization of fluoroolefins |
US6895156B2 (en) | 2001-10-09 | 2005-05-17 | 3M Innovative Properties Company | Small diameter, high strength optical fiber |
JP4193478B2 (ja) * | 2001-12-03 | 2008-12-10 | 住友化学株式会社 | スルホニウム塩及びその用途 |
US6818379B2 (en) * | 2001-12-03 | 2004-11-16 | Sumitomo Chemical Company, Limited | Sulfonium salt and use thereof |
JP2003215791A (ja) * | 2002-01-18 | 2003-07-30 | Central Glass Co Ltd | 超強酸オニウム塩化合物および感放射線性樹脂組成物 |
KR101003022B1 (ko) * | 2002-06-26 | 2010-12-22 | 아치 스페셜티 케미칼즈, 인코포레이티드 | 광감응성 조성물 |
JP4328570B2 (ja) * | 2002-06-28 | 2009-09-09 | 富士フイルム株式会社 | レジスト組成物及びそれを用いたパターン形成方法 |
JP2004085657A (ja) * | 2002-08-23 | 2004-03-18 | Toray Ind Inc | ポジ型感放射線性組成物およびこれを用いたレジストパターンの製造方法 |
US7285363B2 (en) * | 2002-11-08 | 2007-10-23 | The University Of Connecticut | Photoactivators, methods of use, and the articles derived therefrom |
JP4772288B2 (ja) * | 2003-06-05 | 2011-09-14 | 東京応化工業株式会社 | ホトレジスト組成物用樹脂、ホトレジスト組成物、およびレジストパターン形成方法 |
JP4188265B2 (ja) * | 2003-10-23 | 2008-11-26 | 東京応化工業株式会社 | レジスト組成物およびレジストパターン形成方法 |
US7230122B2 (en) * | 2003-11-04 | 2007-06-12 | National Starch And Chemical Investment Holding Corporation | Sulfonium salt photinitiators and use thereof |
US20050287441A1 (en) * | 2004-06-23 | 2005-12-29 | Stefano Passerini | Lithium polymer electrolyte batteries and methods of making |
JP4362093B2 (ja) * | 2004-08-06 | 2009-11-11 | 大日本印刷株式会社 | 帯電防止膜形成用の電離放射線硬化性組成物と帯電防止膜および帯電防止膜を備えた構造体 |
JP4484681B2 (ja) * | 2004-12-03 | 2010-06-16 | 富士フイルム株式会社 | 感光性組成物及び該感光性組成物を用いたパターン形成方法 |
JP4740631B2 (ja) * | 2005-04-18 | 2011-08-03 | 日本カーリット株式会社 | ジイモニウム塩化合物並びにこれを利用する近赤外線吸収色素および近赤外線遮断フィルター |
JP4580841B2 (ja) | 2005-08-16 | 2010-11-17 | 富士フイルム株式会社 | ポジ型レジスト組成物及びそれを用いたパターン形成方法 |
JP2009504790A (ja) * | 2005-08-22 | 2009-02-05 | トランスファート プラス エスイーシー | スルホニルイミド及びその誘導体を調製するための方法 |
JP2007148208A (ja) * | 2005-11-30 | 2007-06-14 | Sumitomo Chemical Co Ltd | 感放射線性樹脂組成物 |
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JP5819810B2 (ja) * | 2012-12-18 | 2015-11-24 | 信越化学工業株式会社 | ネガ型レジスト材料及びこれを用いたパターン形成方法 |
US9017934B2 (en) | 2013-03-08 | 2015-04-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photoresist defect reduction system and method |
US9110376B2 (en) | 2013-03-12 | 2015-08-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photoresist system and method |
US9502231B2 (en) | 2013-03-12 | 2016-11-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photoresist layer and method |
US8932799B2 (en) | 2013-03-12 | 2015-01-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photoresist system and method |
US9543147B2 (en) | 2013-03-12 | 2017-01-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photoresist and method of manufacture |
US9256128B2 (en) | 2013-03-12 | 2016-02-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for manufacturing semiconductor device |
US9245751B2 (en) | 2013-03-12 | 2016-01-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Anti-reflective layer and method |
US9175173B2 (en) | 2013-03-12 | 2015-11-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Unlocking layer and method |
US9354521B2 (en) | 2013-03-12 | 2016-05-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photoresist system and method |
US9117881B2 (en) | 2013-03-15 | 2015-08-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Conductive line system and process |
US9341945B2 (en) | 2013-08-22 | 2016-05-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photoresist and method of formation and use |
US10036953B2 (en) | 2013-11-08 | 2018-07-31 | Taiwan Semiconductor Manufacturing Company | Photoresist system and method |
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CA2187046A1 (fr) * | 1996-10-03 | 1998-04-03 | Alain Vallee | Sulfonylimidures et sulfonylmethylures, leur utilisation comme photoinitiateur |
-
1996
- 1996-10-03 CA CA002187046A patent/CA2187046A1/fr not_active Abandoned
-
1997
- 1997-10-02 DE DE69734958T patent/DE69734958T2/de not_active Expired - Lifetime
- 1997-10-02 EP EP97402311A patent/EP0834502B1/de not_active Expired - Lifetime
- 1997-10-02 EP EP97402312A patent/EP0834492B1/de not_active Expired - Lifetime
- 1997-10-02 DE DE69734959T patent/DE69734959T2/de not_active Expired - Lifetime
- 1997-10-03 JP JP27162497A patent/JP4226672B2/ja not_active Expired - Lifetime
- 1997-10-03 US US08/943,820 patent/US6008265A/en not_active Expired - Lifetime
- 1997-10-03 US US08/943,590 patent/US6008267A/en not_active Expired - Lifetime
- 1997-10-03 JP JP27121297A patent/JP3988963B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0834492A3 (de) | 2003-10-08 |
US6008265A (en) | 1999-12-28 |
US6008267A (en) | 1999-12-28 |
JP4226672B2 (ja) | 2009-02-18 |
JPH10226658A (ja) | 1998-08-25 |
EP0834502B1 (de) | 2005-12-28 |
JPH10226707A (ja) | 1998-08-25 |
EP0834502A2 (de) | 1998-04-08 |
EP0834492B1 (de) | 2005-12-28 |
JP3988963B2 (ja) | 2007-10-10 |
EP0834502A3 (de) | 2003-10-08 |
EP0834492A2 (de) | 1998-04-08 |
CA2187046A1 (fr) | 1998-04-03 |
DE69734959T2 (de) | 2006-08-10 |
DE69734958T2 (de) | 2006-08-10 |
DE69734959D1 (de) | 2006-02-02 |
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