DE69734504T2 - Verfahren und vorrichtung zum messen der streifenphase in der abbildung eines objekts - Google Patents

Verfahren und vorrichtung zum messen der streifenphase in der abbildung eines objekts Download PDF

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Publication number
DE69734504T2
DE69734504T2 DE69734504T DE69734504T DE69734504T2 DE 69734504 T2 DE69734504 T2 DE 69734504T2 DE 69734504 T DE69734504 T DE 69734504T DE 69734504 T DE69734504 T DE 69734504T DE 69734504 T2 DE69734504 T2 DE 69734504T2
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DE
Germany
Prior art keywords
detector
phase
light pattern
projected light
detector element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69734504T
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German (de)
English (en)
Other versions
DE69734504D1 (de
Inventor
H. Leonard BIEMAN
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Ismeca Semiconductor Holding SA
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Ismeca Europe Semiconductor SA
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Application filed by Ismeca Europe Semiconductor SA filed Critical Ismeca Europe Semiconductor SA
Publication of DE69734504D1 publication Critical patent/DE69734504D1/de
Application granted granted Critical
Publication of DE69734504T2 publication Critical patent/DE69734504T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2522—Projection by scanning of the object the position of the object changing and being recorded

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Radar Systems Or Details Thereof (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
DE69734504T 1996-01-29 1997-01-15 Verfahren und vorrichtung zum messen der streifenphase in der abbildung eines objekts Expired - Lifetime DE69734504T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US593095 1996-01-29
US08/593,095 US5646733A (en) 1996-01-29 1996-01-29 Scanning phase measuring method and system for an object at a vision station
PCT/US1997/000853 WO1997028421A1 (en) 1996-01-29 1997-01-15 Scanning phase measuring method and system for an object at a vision station

Publications (2)

Publication Number Publication Date
DE69734504D1 DE69734504D1 (de) 2005-12-08
DE69734504T2 true DE69734504T2 (de) 2006-08-03

Family

ID=24373361

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69734504T Expired - Lifetime DE69734504T2 (de) 1996-01-29 1997-01-15 Verfahren und vorrichtung zum messen der streifenphase in der abbildung eines objekts

Country Status (6)

Country Link
US (2) US5646733A (enExample)
EP (1) EP0877914B1 (enExample)
JP (1) JP3842298B2 (enExample)
AT (1) ATE308735T1 (enExample)
DE (1) DE69734504T2 (enExample)
WO (1) WO1997028421A1 (enExample)

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Also Published As

Publication number Publication date
EP0877914A1 (en) 1998-11-18
USRE39978E1 (en) 2008-01-01
DE69734504D1 (de) 2005-12-08
EP0877914A4 (en) 2000-05-31
JP3842298B2 (ja) 2006-11-08
US5646733A (en) 1997-07-08
ATE308735T1 (de) 2005-11-15
JP2001503506A (ja) 2001-03-13
EP0877914B1 (en) 2005-11-02
WO1997028421A1 (en) 1997-08-07

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Owner name: ISMECA SEMICONDUCTOR HOLDING SA, LA CHAUX-DE-F, CH