DE69734504D1 - Verfahren und vorrichtung zum messen der streifenphase in der abbildung eines objekts - Google Patents
Verfahren und vorrichtung zum messen der streifenphase in der abbildung eines objektsInfo
- Publication number
- DE69734504D1 DE69734504D1 DE69734504T DE69734504T DE69734504D1 DE 69734504 D1 DE69734504 D1 DE 69734504D1 DE 69734504 T DE69734504 T DE 69734504T DE 69734504 T DE69734504 T DE 69734504T DE 69734504 D1 DE69734504 D1 DE 69734504D1
- Authority
- DE
- Germany
- Prior art keywords
- electromagnetic radiation
- optical head
- detector elements
- grid
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000005286 illumination Methods 0.000 title 1
- 230000005670 electromagnetic radiation Effects 0.000 abstract 4
- 230000003287 optical effect Effects 0.000 abstract 4
- 230000010287 polarization Effects 0.000 abstract 2
- 238000003384 imaging method Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2522—Projection by scanning of the object the position of the object changing and being recorded
Landscapes
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Radar Systems Or Details Thereof (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/593,095 US5646733A (en) | 1996-01-29 | 1996-01-29 | Scanning phase measuring method and system for an object at a vision station |
US593095 | 1996-01-29 | ||
PCT/US1997/000853 WO1997028421A1 (en) | 1996-01-29 | 1997-01-15 | Scanning phase measuring method and system for an object at a vision station |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69734504D1 true DE69734504D1 (de) | 2005-12-08 |
DE69734504T2 DE69734504T2 (de) | 2006-08-03 |
Family
ID=24373361
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69734504T Expired - Lifetime DE69734504T2 (de) | 1996-01-29 | 1997-01-15 | Verfahren und vorrichtung zum messen der streifenphase in der abbildung eines objekts |
Country Status (6)
Country | Link |
---|---|
US (2) | US5646733A (de) |
EP (1) | EP0877914B1 (de) |
JP (1) | JP3842298B2 (de) |
AT (1) | ATE308735T1 (de) |
DE (1) | DE69734504T2 (de) |
WO (1) | WO1997028421A1 (de) |
Families Citing this family (78)
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---|---|---|---|---|
US5646733A (en) | 1996-01-29 | 1997-07-08 | Medar, Inc. | Scanning phase measuring method and system for an object at a vision station |
US6049384A (en) * | 1996-02-27 | 2000-04-11 | Cyberoptics Corporation | Method and apparatus for three dimensional imaging using multi-phased structured light |
JP4060365B2 (ja) | 1996-09-05 | 2008-03-12 | ルドルフ シュヴァルト | 電磁波の位相情報および/または振幅情報を調べるための方法と装置 |
GB2326228B (en) * | 1997-06-10 | 2000-05-24 | British Aerospace | Non-contact deformation measurement |
US6094269A (en) * | 1997-12-31 | 2000-07-25 | Metroptic Technologies, Ltd. | Apparatus and method for optically measuring an object surface contour |
US7006132B2 (en) * | 1998-02-25 | 2006-02-28 | California Institute Of Technology | Aperture coded camera for three dimensional imaging |
US7612870B2 (en) * | 1998-02-25 | 2009-11-03 | California Institute Of Technology | Single-lens aperture-coded camera for three dimensional imaging in small volumes |
US6095661A (en) * | 1998-03-19 | 2000-08-01 | Ppt Vision, Inc. | Method and apparatus for an L.E.D. flashlight |
US7740371B1 (en) | 1998-03-19 | 2010-06-22 | Charles A. Lemaire | Method and apparatus for pulsed L.E.D. illumination for a camera |
DE19817824A1 (de) * | 1998-04-21 | 1999-10-28 | Focke & Co | Vorrichtung zum Prüfen von Einheiten aus mehreren Einzelgegenständen, Materiallagen oder dergleichen |
US6252623B1 (en) | 1998-05-15 | 2001-06-26 | 3Dmetrics, Incorporated | Three dimensional imaging system |
US6292261B1 (en) | 1998-05-22 | 2001-09-18 | Cyberoptics Corporation | Rotary sensor system with at least two detectors |
US6538750B1 (en) | 1998-05-22 | 2003-03-25 | Cyberoptics Corporation | Rotary sensor system with a single detector |
US7353954B1 (en) | 1998-07-08 | 2008-04-08 | Charles A. Lemaire | Tray flipper and method for parts inspection |
AU4975499A (en) * | 1998-07-08 | 2000-02-01 | Bryan Maret | Identifying and handling device tilt in a three-dimensional machine-vision image |
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US6262803B1 (en) * | 1998-09-10 | 2001-07-17 | Acuity Imaging, Llc | System and method for three-dimensional inspection using patterned light projection |
EP1114294B1 (de) * | 1998-09-14 | 2007-02-28 | BETRIEBSFORSCHUNGSINSTITUT VDEh, INSTITUT FÜR ANGEWANDTE FORSCHUNG GmbH | Verfahren zum Messen der Geometrie und Planheit von bewegtem Metallband |
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US6100990A (en) * | 1999-06-14 | 2000-08-08 | Ford Motor Company | Method and apparatus for determining reflective optical quality using gray-scale patterns |
US6208412B1 (en) | 1999-06-14 | 2001-03-27 | Visteon Global Technologies, Inc. | Method and apparatus for determining optical quality |
US6788411B1 (en) | 1999-07-08 | 2004-09-07 | Ppt Vision, Inc. | Method and apparatus for adjusting illumination angle |
US6268923B1 (en) | 1999-10-07 | 2001-07-31 | Integral Vision, Inc. | Optical method and system for measuring three-dimensional surface topography of an object having a surface contour |
JP2001159510A (ja) * | 1999-12-01 | 2001-06-12 | Matsushita Electric Ind Co Ltd | 三次元形状計測方法及びその装置 |
WO2001051887A1 (en) * | 2000-01-07 | 2001-07-19 | Cyberoptics Corporation | Phase profilometry system with telecentric projector |
US6593705B1 (en) | 2000-01-07 | 2003-07-15 | Cyberoptics Corporation | Rapid-firing flashlamp discharge circuit |
US6549647B1 (en) * | 2000-01-07 | 2003-04-15 | Cyberoptics Corporation | Inspection system with vibration resistant video capture |
US6750899B1 (en) | 2000-01-07 | 2004-06-15 | Cyberoptics Corporation | Solder paste inspection system |
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US6501554B1 (en) | 2000-06-20 | 2002-12-31 | Ppt Vision, Inc. | 3D scanner and method for measuring heights and angles of manufactured parts |
US6509559B1 (en) * | 2000-06-20 | 2003-01-21 | Ppt Vision, Inc. | Binary optical grating and method for generating a moire pattern for 3D imaging |
US6486963B1 (en) | 2000-06-20 | 2002-11-26 | Ppt Vision, Inc. | Precision 3D scanner base and method for measuring manufactured parts |
FR2811761B1 (fr) * | 2000-07-17 | 2002-10-11 | Production Rech S Appliquees | Ellipsometre a haute resolution spatiale fonctionnant dans l'infrarouge |
US20020015103A1 (en) * | 2000-07-25 | 2002-02-07 | Zhimin Shi | System and method of capturing and processing digital images with depth channel |
CA2422242A1 (en) * | 2000-09-13 | 2002-03-21 | Nextengine, Inc. | Imaging system monitored or controlled to ensure fidelity of file captured |
US6639684B1 (en) * | 2000-09-13 | 2003-10-28 | Nextengine, Inc. | Digitizer using intensity gradient to image features of three-dimensional objects |
US6856407B2 (en) | 2000-09-13 | 2005-02-15 | Nextengine, Inc. | Method for depth detection in 3D imaging providing a depth measurement for each unitary group of pixels |
US7358986B1 (en) | 2000-09-13 | 2008-04-15 | Nextengine, Inc. | Digital imaging system having distribution controlled over a distributed network |
US6724489B2 (en) * | 2000-09-22 | 2004-04-20 | Daniel Freifeld | Three dimensional scanning camera |
US20020091441A1 (en) | 2001-01-05 | 2002-07-11 | Guzik Donald S. | Focused beam cutting of materials |
US7233351B1 (en) | 2001-02-23 | 2007-06-19 | Nextengine, Inc. | Method for high resolution incremental imaging |
US20020163573A1 (en) * | 2001-04-11 | 2002-11-07 | Bieman Leonard H. | Imaging system |
US20030111532A1 (en) * | 2001-12-14 | 2003-06-19 | General Electric Company | Self-referencing system for light gauge images |
TW580556B (en) * | 2002-11-22 | 2004-03-21 | Ind Tech Res Inst | Method and system for measuring the three-dimensional appearance of an object surface |
WO2005031252A1 (ja) * | 2003-09-25 | 2005-04-07 | Brother Kogyo Kabushiki Kaisha | 3次元形状検出装置、3次元形状検出システム、及び、3次元形状検出プログラム |
JP2005293075A (ja) * | 2004-03-31 | 2005-10-20 | Brother Ind Ltd | 3次元形状検出装置、3次元形状検出方法、3次元形状検出プログラム |
US7711179B2 (en) | 2004-04-21 | 2010-05-04 | Nextengine, Inc. | Hand held portable three dimensional scanner |
US7525669B1 (en) | 2004-07-09 | 2009-04-28 | Mohsen Abdollahi | High-speed, scanning phase-shifting profilometry using 2D CMOS sensor |
US20060045174A1 (en) * | 2004-08-31 | 2006-03-02 | Ittiam Systems (P) Ltd. | Method and apparatus for synchronizing a transmitter clock of an analog modem to a remote clock |
US7417736B2 (en) * | 2005-03-31 | 2008-08-26 | Infineon Technologies Ag | Method for determining a radiation power and an exposure apparatus |
CA2622433A1 (en) * | 2005-09-21 | 2007-04-05 | Medtronic, Inc. | Composite heart valve apparatus manufactured using techniques involving laser machining of tissue |
JP2007114071A (ja) * | 2005-10-20 | 2007-05-10 | Omron Corp | 三次元形状計測装置、プログラム、コンピュータ読み取り可能な記録媒体、及び三次元形状計測方法 |
US7995834B1 (en) | 2006-01-20 | 2011-08-09 | Nextengine, Inc. | Multiple laser scanner |
JP4801457B2 (ja) * | 2006-02-02 | 2011-10-26 | 株式会社リコー | 表面欠陥検査装置、表面欠陥検査方法及び表面欠陥検査プログラム |
US20080199068A1 (en) * | 2007-01-10 | 2008-08-21 | Duquette David W | Inspection System |
US7894134B1 (en) | 2007-05-02 | 2011-02-22 | David Hauser | Sinusoidal polarization |
EP2977719A1 (de) | 2007-08-17 | 2016-01-27 | Renishaw plc | Berührungslose messvorrichtung und -methode |
US8059280B2 (en) | 2008-01-31 | 2011-11-15 | Cyberoptics Corporation | Method for three-dimensional imaging using multi-phase structured light |
JP2010107250A (ja) * | 2008-10-28 | 2010-05-13 | Saki Corp:Kk | 被検査体の検査装置 |
US8570530B2 (en) * | 2009-06-03 | 2013-10-29 | Carestream Health, Inc. | Apparatus for dental surface shape and shade imaging |
WO2010143108A2 (en) * | 2009-06-11 | 2010-12-16 | Koninklijke Philips Electronics N.V. | Optical scanner |
US8992722B2 (en) * | 2009-09-01 | 2015-03-31 | Lam Research Corporation | Direct drive arrangement to control confinement rings positioning and methods thereof |
GB0915904D0 (en) | 2009-09-11 | 2009-10-14 | Renishaw Plc | Non-contact object inspection |
TWI407075B (zh) * | 2010-03-16 | 2013-09-01 | Test Research Inc | 量測立體物件之系統 |
US8755043B2 (en) * | 2010-11-19 | 2014-06-17 | Koh Young Technology Inc. | Method of inspecting a substrate |
US10088431B2 (en) | 2011-05-17 | 2018-10-02 | Gii Acquisition, Llc | Method and system for optically inspecting headed manufactured parts |
US10094785B2 (en) | 2011-05-17 | 2018-10-09 | Gii Acquisition, Llc | Method and system for optically inspecting headed manufactured parts |
US9228957B2 (en) * | 2013-05-24 | 2016-01-05 | Gii Acquisition, Llc | High speed method and system for inspecting a stream of parts |
US9402036B2 (en) | 2011-10-17 | 2016-07-26 | Rudolph Technologies, Inc. | Scanning operation with concurrent focus and inspection |
DE102012104282A1 (de) * | 2012-05-16 | 2013-11-21 | Isra Vision Ag | Verfahren und Vorrichtung zur Inspektion von Oberflächen eines untersuchten Objekts |
US10126252B2 (en) | 2013-04-29 | 2018-11-13 | Cyberoptics Corporation | Enhanced illumination control for three-dimensional imaging |
US10207297B2 (en) | 2013-05-24 | 2019-02-19 | GII Inspection, LLC | Method and system for inspecting a manufactured part at an inspection station |
WO2015175702A1 (en) * | 2014-05-14 | 2015-11-19 | Kla-Tencor Corporation | Image acquisition system, image acquisition method, and inspection system |
US10300510B2 (en) | 2014-08-01 | 2019-05-28 | General Inspection Llc | High speed method and system for inspecting a stream of parts |
CN109186493B (zh) * | 2018-04-17 | 2021-02-19 | 苏州佳世达光电有限公司 | 三维扫描系统 |
EP3708948B1 (de) | 2019-03-12 | 2021-09-22 | Sick Ag | Lichtlinientriangulationsvorrichtung |
TWI735953B (zh) | 2019-09-18 | 2021-08-11 | 財團法人工業技術研究院 | 三維量測裝置與其操作方法 |
CN113029040B (zh) * | 2021-02-26 | 2022-09-27 | 中国科学院深圳先进技术研究院 | 一种偏振相位偏折测量方法和装置 |
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-
1996
- 1996-01-29 US US08/593,095 patent/US5646733A/en not_active Ceased
-
1997
- 1997-01-15 DE DE69734504T patent/DE69734504T2/de not_active Expired - Lifetime
- 1997-01-15 EP EP97904812A patent/EP0877914B1/de not_active Expired - Lifetime
- 1997-01-15 JP JP52768697A patent/JP3842298B2/ja not_active Expired - Fee Related
- 1997-01-15 AT AT97904812T patent/ATE308735T1/de not_active IP Right Cessation
- 1997-01-15 WO PCT/US1997/000853 patent/WO1997028421A1/en active IP Right Grant
-
1998
- 1998-07-08 US US09/111,978 patent/USRE39978E1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2001503506A (ja) | 2001-03-13 |
EP0877914A1 (de) | 1998-11-18 |
DE69734504T2 (de) | 2006-08-03 |
USRE39978E1 (en) | 2008-01-01 |
ATE308735T1 (de) | 2005-11-15 |
EP0877914B1 (de) | 2005-11-02 |
JP3842298B2 (ja) | 2006-11-08 |
EP0877914A4 (de) | 2000-05-31 |
US5646733A (en) | 1997-07-08 |
WO1997028421A1 (en) | 1997-08-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: ISMECA SEMICONDUCTOR HOLDING SA, LA CHAUX-DE-F, CH |