JP3842298B2 - 映像ステーションでの物体の走査位相測定の方法と装置 - Google Patents

映像ステーションでの物体の走査位相測定の方法と装置 Download PDF

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Publication number
JP3842298B2
JP3842298B2 JP52768697A JP52768697A JP3842298B2 JP 3842298 B2 JP3842298 B2 JP 3842298B2 JP 52768697 A JP52768697 A JP 52768697A JP 52768697 A JP52768697 A JP 52768697A JP 3842298 B2 JP3842298 B2 JP 3842298B2
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detector
pattern
image
light
light pattern
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JP2001503506A5 (enExample
JP2001503506A (ja
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ビーマン，レナード・エイチ
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イスメカ・ヨーロッパ・セミコンダクター・ソシエテ・アノニム
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2522—Projection by scanning of the object the position of the object changing and being recorded

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  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Radar Systems Or Details Thereof (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
JP52768697A 1996-01-29 1997-01-15 映像ステーションでの物体の走査位相測定の方法と装置 Expired - Fee Related JP3842298B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/593,095 US5646733A (en) 1996-01-29 1996-01-29 Scanning phase measuring method and system for an object at a vision station
US593,095 1996-01-29
PCT/US1997/000853 WO1997028421A1 (en) 1996-01-29 1997-01-15 Scanning phase measuring method and system for an object at a vision station

Publications (3)

Publication Number Publication Date
JP2001503506A JP2001503506A (ja) 2001-03-13
JP2001503506A5 JP2001503506A5 (enExample) 2004-11-11
JP3842298B2 true JP3842298B2 (ja) 2006-11-08

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JP52768697A Expired - Fee Related JP3842298B2 (ja) 1996-01-29 1997-01-15 映像ステーションでの物体の走査位相測定の方法と装置

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US (2) US5646733A (enExample)
EP (1) EP0877914B1 (enExample)
JP (1) JP3842298B2 (enExample)
AT (1) ATE308735T1 (enExample)
DE (1) DE69734504T2 (enExample)
WO (1) WO1997028421A1 (enExample)

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Also Published As

Publication number Publication date
EP0877914A1 (en) 1998-11-18
USRE39978E1 (en) 2008-01-01
DE69734504D1 (de) 2005-12-08
EP0877914A4 (en) 2000-05-31
DE69734504T2 (de) 2006-08-03
US5646733A (en) 1997-07-08
ATE308735T1 (de) 2005-11-15
JP2001503506A (ja) 2001-03-13
EP0877914B1 (en) 2005-11-02
WO1997028421A1 (en) 1997-08-07

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