DE69700043D1 - Verfahren zur Wiederverwendung von wasserlöslichem Schlammabwasser - Google Patents

Verfahren zur Wiederverwendung von wasserlöslichem Schlammabwasser

Info

Publication number
DE69700043D1
DE69700043D1 DE69700043T DE69700043T DE69700043D1 DE 69700043 D1 DE69700043 D1 DE 69700043D1 DE 69700043 T DE69700043 T DE 69700043T DE 69700043 T DE69700043 T DE 69700043T DE 69700043 D1 DE69700043 D1 DE 69700043D1
Authority
DE
Germany
Prior art keywords
water
reuse
sludge waste
waste water
soluble sludge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69700043T
Other languages
English (en)
Other versions
DE69700043T2 (de
Inventor
Kohei Toyama
Etsuo Kiuchi
Kazuo Hayakawa
Shingo Kaburagi
Akio Ashida
Takara Ito
Kuniaki Noami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Zosen Corp
Mimasu Semiconductor Industry Co Ltd
Shin Etsu Handotai Co Ltd
Ohtomo Chemical Ins Corp
Original Assignee
Hitachi Zosen Corp
Mimasu Semiconductor Industry Co Ltd
Shin Etsu Handotai Co Ltd
Ohtomo Chemical Ins Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Zosen Corp, Mimasu Semiconductor Industry Co Ltd, Shin Etsu Handotai Co Ltd, Ohtomo Chemical Ins Corp filed Critical Hitachi Zosen Corp
Application granted granted Critical
Publication of DE69700043D1 publication Critical patent/DE69700043D1/de
Publication of DE69700043T2 publication Critical patent/DE69700043T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F11/00—Treatment of sludge; Devices therefor
    • C02F11/12—Treatment of sludge; Devices therefor by de-watering, drying or thickening
    • C02F11/16—Treatment of sludge; Devices therefor by de-watering, drying or thickening using drying or composting beds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D21/00—Separation of suspended solid particles from liquids by sedimentation
    • B01D21/01—Separation of suspended solid particles from liquids by sedimentation using flocculating agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
    • B28D1/025—Use, recovery or regeneration of abrasive mediums
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mining & Mineral Resources (AREA)
  • Hydrology & Water Resources (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Organic Chemistry (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Treatment Of Sludge (AREA)
DE69700043T 1996-02-21 1997-02-18 Verfahren zur Wiederverwendung von wasserlöslichem Schlammabwasser Expired - Fee Related DE69700043T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03356796A JP3249373B2 (ja) 1996-02-21 1996-02-21 水溶性スラリー廃液の再利用システム

Publications (2)

Publication Number Publication Date
DE69700043D1 true DE69700043D1 (de) 1998-12-10
DE69700043T2 DE69700043T2 (de) 1999-04-01

Family

ID=12390133

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69700043T Expired - Fee Related DE69700043T2 (de) 1996-02-21 1997-02-18 Verfahren zur Wiederverwendung von wasserlöslichem Schlammabwasser

Country Status (7)

Country Link
US (1) US6001265A (de)
EP (1) EP0791385B1 (de)
JP (1) JP3249373B2 (de)
KR (1) KR100441648B1 (de)
DE (1) DE69700043T2 (de)
MY (1) MY115067A (de)
TW (1) TW363914B (de)

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JP3408979B2 (ja) 1997-12-26 2003-05-19 株式会社日平トヤマ スラリ管理システム
US6231628B1 (en) * 1998-01-07 2001-05-15 Memc Electronic Materials, Inc. Method for the separation, regeneration and reuse of an exhausted glycol-based slurry
JP3426149B2 (ja) * 1998-12-25 2003-07-14 富士通株式会社 半導体製造における研磨廃液再利用方法及び再利用装置
JP3389141B2 (ja) * 1999-04-26 2003-03-24 株式会社スーパーシリコン研究所 スライシング用スラリーの評価方法及びスラリー
DE19960380C2 (de) * 1999-12-14 2002-05-29 Fraunhofer Ges Forschung Verfahren zum Fraktionieren einer Zerspanungssuspension
DE10011513A1 (de) * 2000-03-09 2001-09-20 Fraunhofer Ges Forschung Verfahren zum Aufbereiten einer gebrauchten Schneidsuspension
US6607670B2 (en) * 2000-04-14 2003-08-19 Framatome Anp. Inc. Process for rapid colloidal suspension removal
JP2001334452A (ja) * 2000-05-30 2001-12-04 Memc Japan Ltd 円柱状ワークの切断方法
WO2002096611A1 (en) 2001-05-29 2002-12-05 Memc Electronic Materials, S.P.A. Method for treating an exhausted glycol-based slurry
US6622745B1 (en) 2002-01-07 2003-09-23 Projex Ims, Inc. Fluid waster diversion system
ATE528054T1 (de) * 2004-01-30 2011-10-15 P M P O S R L Anlage und verfahren zur behandlung eines kühlfluids in mechanischen bearbeitungsanlagen
JP4160930B2 (ja) * 2004-05-19 2008-10-08 シャープ株式会社 ハロシランの製造方法、固形分の精製方法
DE102005007368A1 (de) * 2004-06-16 2006-01-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Schmierend wirkende Polymer-Wasser-Mischung
AU2012203361B2 (en) * 2005-06-24 2015-11-26 Sic Processing Ag Process and apparatus for treating exhausted abrasive slurries for the recovery of their reusable components
ITRM20050329A1 (it) * 2005-06-24 2006-12-25 Guido Fragiacomo Procedimento per il trattamento di sospensioni abrasive esauste per il recupero delle loro componenti riciclabili e relativo impianto.
CN101426723B (zh) * 2006-02-24 2011-12-14 Ihi压缩和机器株式会社 硅粒的处理方法和装置
DE102007033258A1 (de) 2007-07-17 2009-01-22 Schott Ag Verfahren zum Regenerieren verbrauchter Trennmedien zur erneuten Verwendung
DE102007048879A1 (de) 2007-10-11 2009-04-16 Schott Ag Wiederaufbereitung von fluiden Sägeslurries sowie deren Verwendung zur Herstellung von Wafern mit verbesserten Oberflächen
JP2011502054A (ja) * 2007-10-30 2011-01-20 ポール・コーポレーション 使用済み研磨スラリーを処理するための方法
US8056551B2 (en) * 2007-10-30 2011-11-15 Pall Corporation Method and system for manufacturing wafer-like slices from a substrate material
ITRM20070677A1 (it) * 2007-12-27 2009-06-28 Garbo S R L Procedimento per la separazione e il recupero dei sospendenti contenuti nelle sospensioni esauste provenienti dalle lavorazioni meccaniche del silicio.
JP5090191B2 (ja) * 2008-01-24 2012-12-05 三和油化工業株式会社 遊離砥粒スラリー廃液からの分散媒の回収方法
US8425639B2 (en) * 2008-05-30 2013-04-23 Cabot Microelectronics Corporation Wire saw slurry recycling process
KR100985861B1 (ko) * 2008-09-24 2010-10-08 씨앤지하이테크 주식회사 반도체용 슬러리 공급장치 및 슬러리 공급방법
US8277768B2 (en) 2008-11-14 2012-10-02 Texas Instruments Incorporated System and method for production of high purity silicon solids and solids therefrom
KR101428152B1 (ko) * 2008-12-20 2014-08-08 캐보트 마이크로일렉트로닉스 코포레이션 와이어쏘 절단 방법
JP2010253621A (ja) * 2009-04-27 2010-11-11 Ihi Compressor & Machinery Co Ltd ワイヤソーのクーラント管理方法及び装置
JP5332914B2 (ja) * 2009-05-29 2013-11-06 信越半導体株式会社 シリコンインゴットの切断方法
DE102009034949A1 (de) * 2009-07-09 2011-01-13 Akw Apparate + Verfahren Gmbh Verfahren zur Aufbereitung einer Suspension
KR101188313B1 (ko) 2010-04-06 2012-10-09 오씨아이 주식회사 태양전지용 웨이퍼 제조시 발생되는 폐슬러지 재생방법 및 재생시스템
JP5640260B2 (ja) * 2010-06-25 2014-12-17 日本碍子株式会社 クーラント回収方法
DE102010025606A1 (de) 2010-06-30 2012-01-05 Schott Solar Ag Verfahren zur Wiederaufbereitung von verbrauchten Sägeflüssigkeiten aus der Herstellung von Siliziumwafern
JP5795728B2 (ja) * 2011-09-26 2015-10-14 信越化学工業株式会社 固体微粒子回収方法
CN104010770B (zh) * 2011-12-22 2017-07-21 柯尼卡美能达株式会社 研磨材料再生方法及再生研磨材料
SG11201403175PA (en) * 2011-12-27 2014-08-28 Konica Minolta Inc Method for separating polishing material and regenerated polishing material
US10112136B2 (en) * 2012-02-03 2018-10-30 Enviro-Fab Llc Fluid lubricant and material shavings recapture system for a cutting operation
JP2013248707A (ja) * 2012-05-31 2013-12-12 Panasonic Corp クーラント廃液の再生方法、クーラント廃液の処理方法、クーラント廃液の処理システム、及び再生クーラント液の製造方法
US9586306B2 (en) 2012-08-13 2017-03-07 Omax Corporation Method and apparatus for monitoring particle laden pneumatic abrasive flow in an abrasive fluid jet cutting system
US20140144846A1 (en) * 2012-11-26 2014-05-29 Memc Singapore, Pte. Ltd (Uen200614797D) Methods For The Recycling of Wire-Saw Cutting Fluid
US20140145309A1 (en) * 2012-11-26 2014-05-29 Memc Singapore, Pte. Ltd (Uen200614797D) Systems For The Recycling of Wire-Saw Cutting Fluid
US9649744B2 (en) 2013-07-30 2017-05-16 Omax Corporation Reducing small colloidal particle concentrations in feed and/or byproduct fluids in the context of waterjet processing
US9011204B2 (en) * 2013-07-30 2015-04-21 Omax Corporation Reducing small colloidal particle concentrations in feed and/or byproduct fluids in the context of waterjet processing
US11577366B2 (en) 2016-12-12 2023-02-14 Omax Corporation Recirculation of wet abrasive material in abrasive waterjet systems and related technology
US11224987B1 (en) 2018-03-09 2022-01-18 Omax Corporation Abrasive-collecting container of a waterjet system and related technology
JP7003897B2 (ja) * 2018-11-16 2022-02-04 株式会社Sumco ウェーハの製造方法、ワイヤーソー用再利用スラリーの品質評価方法、及びワイヤーソー用使用済みスラリーの品質評価方法
CN113427647B (zh) * 2021-07-12 2022-07-22 山东省地质矿产勘查开发局第八地质大队(山东省第八地质矿产勘查院) 一种绿色矿山石料切割废水回收装置及其使用方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3997359A (en) * 1972-11-07 1976-12-14 Joseph Daniel Dankoff Reclamation of components from grinding swarf
US3948784A (en) * 1975-03-24 1976-04-06 Nalco Chemical Company Treatment of industrial grinding and cutting lubricants
US4122008A (en) * 1977-02-10 1978-10-24 Eddy Allen Filtration process for separating particles from liquid coolants in lens grinding devices
GB2017517B (en) * 1978-03-10 1982-06-23 Fiat Ricerche Recovery of the components of grinding sludge
US4409020A (en) * 1983-01-24 1983-10-11 The United States Of America As Represented By The Secretary Of The Interior Recovery of metals from grinding sludges
DE3344404A1 (de) * 1983-12-08 1985-07-18 Mannesmann AG, 4000 Düsseldorf Verfahren und vorrichtung zur reinigung von kreislauf-fluessigkeiten
US4751006A (en) * 1987-07-16 1988-06-14 Monlan, Incorporated Coolant reclamation unit
US4872975A (en) * 1989-01-31 1989-10-10 Ingersoll-Rand Company System for separating abrasive material from a fluid used in fluid jet cutting
US5127199A (en) * 1991-01-08 1992-07-07 Progressive Blasting Systems, Inc. Abrasive water jet catch tank media transporting means
JPH0741535B2 (ja) 1991-04-10 1995-05-10 中小企業事業団 ラップ加工装置の砥粒液再生・循環装置
JP2606156B2 (ja) * 1994-10-14 1997-04-30 栗田工業株式会社 研磨剤粒子の回収方法
US5578222A (en) * 1995-12-20 1996-11-26 Saint-Gobain/Norton Industrial Ceramics Corp. Reclamation of abrasive grain

Also Published As

Publication number Publication date
JPH09225937A (ja) 1997-09-02
DE69700043T2 (de) 1999-04-01
US6001265A (en) 1999-12-14
TW363914B (en) 1999-07-11
KR100441648B1 (ko) 2004-10-06
EP0791385B1 (de) 1998-11-04
JP3249373B2 (ja) 2002-01-21
MY115067A (en) 2003-03-31
KR970061798A (ko) 1997-09-12
EP0791385A1 (de) 1997-08-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee