DE69626299T2 - Halbleiteranordnung und verfahren zur herstellung - Google Patents
Halbleiteranordnung und verfahren zur herstellungInfo
- Publication number
- DE69626299T2 DE69626299T2 DE69626299T DE69626299T DE69626299T2 DE 69626299 T2 DE69626299 T2 DE 69626299T2 DE 69626299 T DE69626299 T DE 69626299T DE 69626299 T DE69626299 T DE 69626299T DE 69626299 T2 DE69626299 T2 DE 69626299T2
- Authority
- DE
- Germany
- Prior art keywords
- production method
- semiconductor arrangement
- semiconductor
- arrangement
- production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
- H01L29/744—Gate-turn-off devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
- H01L29/0661—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body specially adapted for altering the breakdown voltage by removing semiconductor material at, or in the neighbourhood of, a reverse biased junction, e.g. by bevelling, moat etching, depletion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP1996/002741 WO1998013881A1 (fr) | 1996-09-24 | 1996-09-24 | Dispositif a semi-conducteur et son procede de production |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69626299D1 DE69626299D1 (de) | 2003-03-27 |
DE69626299T2 true DE69626299T2 (de) | 2003-12-11 |
Family
ID=14153871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69626299T Expired - Lifetime DE69626299T2 (de) | 1996-09-24 | 1996-09-24 | Halbleiteranordnung und verfahren zur herstellung |
Country Status (5)
Country | Link |
---|---|
US (1) | US6020603A (de) |
EP (1) | EP0863553B1 (de) |
JP (1) | JP3058456B2 (de) |
DE (1) | DE69626299T2 (de) |
WO (1) | WO1998013881A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6797992B2 (en) * | 2001-08-07 | 2004-09-28 | Fabtech, Inc. | Apparatus and method for fabricating a high reverse voltage semiconductor device |
JP3530158B2 (ja) * | 2001-08-21 | 2004-05-24 | 沖電気工業株式会社 | 半導体装置及びその製造方法 |
JP3872319B2 (ja) | 2001-08-21 | 2007-01-24 | 沖電気工業株式会社 | 半導体装置及びその製造方法 |
WO2007084501A2 (en) * | 2006-01-13 | 2007-07-26 | Group4 Labs, Llc | Method for manufacturing smooth diamond heat sinks |
CZ301460B6 (cs) * | 2007-10-22 | 2010-03-10 | Polovodice, A. S. | Výkonová polovodicová soucástka pro obvody s rychlými spínacími soucástkami |
US8513703B2 (en) * | 2010-10-20 | 2013-08-20 | National Semiconductor Corporation | Group III-nitride HEMT with multi-layered substrate having a second layer of one conductivity type touching a top surface of a first layers of different conductivity type and a method for forming the same |
JP6130995B2 (ja) * | 2012-02-20 | 2017-05-17 | サンケン電気株式会社 | エピタキシャル基板及び半導体装置 |
EP4006990B1 (de) | 2020-11-27 | 2023-04-05 | Hitachi Energy Switzerland AG | Halbleiterbauelement mit einer seitenfläche mit unterschiedlichen teilbereichen |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54127686A (en) * | 1978-03-28 | 1979-10-03 | Mitsubishi Electric Corp | Semiconductor device and its manufacture |
DE3024939C3 (de) * | 1979-07-02 | 1994-08-11 | Hitachi Ltd | Halbleiteranordnung |
JPS5744562A (en) * | 1980-08-27 | 1982-03-13 | Tomisaburou Mikami | Coupling hood for car |
JPS5784175A (en) * | 1980-11-13 | 1982-05-26 | Mitsubishi Electric Corp | Semiconductor device |
JPS58141563A (ja) * | 1982-02-17 | 1983-08-22 | Toshiba Corp | 半導体装置 |
JPS5944869A (ja) * | 1982-09-07 | 1984-03-13 | Toshiba Corp | 半導体装置 |
JPH01318263A (ja) * | 1988-06-20 | 1989-12-22 | Meidensha Corp | 半導体素子 |
JPH02202061A (ja) * | 1989-01-31 | 1990-08-10 | Mitsubishi Electric Corp | 逆導通ゲートターンオフサイリスタ |
JPH0624200B2 (ja) * | 1989-04-28 | 1994-03-30 | 信越半導体株式会社 | 半導体デバイス用基板の加工方法 |
JPH0744191B2 (ja) * | 1989-12-15 | 1995-05-15 | 三菱電機株式会社 | 半導体装置およびそのための電極ブロック |
US5281847A (en) * | 1990-06-12 | 1994-01-25 | Mitsubishi Denki Kabushik Kaisha | Groove structure for isolating elements comprising a GTO structure |
JPH0488677A (ja) * | 1990-07-31 | 1992-03-23 | Meidensha Corp | 半導体素子 |
JP3241526B2 (ja) * | 1994-04-04 | 2001-12-25 | 三菱電機株式会社 | ゲートターンオフサイリスタおよびその製造方法 |
JP3211604B2 (ja) * | 1995-02-03 | 2001-09-25 | 株式会社日立製作所 | 半導体装置 |
JP3319227B2 (ja) * | 1995-06-29 | 2002-08-26 | 三菱電機株式会社 | 電力用圧接型半導体装置 |
-
1996
- 1996-09-24 WO PCT/JP1996/002741 patent/WO1998013881A1/ja active IP Right Grant
- 1996-09-24 JP JP10515472A patent/JP3058456B2/ja not_active Expired - Lifetime
- 1996-09-24 US US09/068,974 patent/US6020603A/en not_active Expired - Lifetime
- 1996-09-24 DE DE69626299T patent/DE69626299T2/de not_active Expired - Lifetime
- 1996-09-24 EP EP96931292A patent/EP0863553B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0863553A1 (de) | 1998-09-09 |
EP0863553B1 (de) | 2003-02-19 |
DE69626299D1 (de) | 2003-03-27 |
WO1998013881A1 (fr) | 1998-04-02 |
US6020603A (en) | 2000-02-01 |
JP3058456B2 (ja) | 2000-07-04 |
EP0863553A4 (de) | 1999-05-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) |