DE69618441T2 - Optoelektronischer drehkodierer - Google Patents

Optoelektronischer drehkodierer

Info

Publication number
DE69618441T2
DE69618441T2 DE69618441T DE69618441T DE69618441T2 DE 69618441 T2 DE69618441 T2 DE 69618441T2 DE 69618441 T DE69618441 T DE 69618441T DE 69618441 T DE69618441 T DE 69618441T DE 69618441 T2 DE69618441 T2 DE 69618441T2
Authority
DE
Germany
Prior art keywords
fringes
scale
resultant
rotary encoder
interference fringes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69618441T
Other languages
English (en)
Other versions
DE69618441D1 (de
DE69618441T3 (de
Inventor
Allan Wright
Geoff Mcfarland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=10783312&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69618441(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Renishaw PLC filed Critical Renishaw PLC
Publication of DE69618441D1 publication Critical patent/DE69618441D1/de
Publication of DE69618441T2 publication Critical patent/DE69618441T2/de
Application granted granted Critical
Publication of DE69618441T3 publication Critical patent/DE69618441T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Analogue/Digital Conversion (AREA)
DE69618441T 1995-11-02 1996-11-04 Optoelektronischer drehkodierer Expired - Lifetime DE69618441T3 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB9522491 1995-11-02
GBGB9522491.1A GB9522491D0 (en) 1995-11-02 1995-11-02 Opto-electronic rotary encoder
PCT/GB1996/002699 WO1997016704A1 (en) 1995-11-02 1996-11-04 Opto-electronic rotary encoder
EP96935168A EP0801724B2 (de) 1995-11-02 1996-11-04 Optoelektronischer drehkodierer

Publications (3)

Publication Number Publication Date
DE69618441D1 DE69618441D1 (de) 2002-02-14
DE69618441T2 true DE69618441T2 (de) 2002-06-06
DE69618441T3 DE69618441T3 (de) 2013-06-27

Family

ID=10783312

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69618441T Expired - Lifetime DE69618441T3 (de) 1995-11-02 1996-11-04 Optoelektronischer drehkodierer

Country Status (7)

Country Link
US (1) US5886352A (de)
EP (2) EP0801724B2 (de)
JP (1) JPH10512374A (de)
AT (1) ATE211816T1 (de)
DE (1) DE69618441T3 (de)
GB (1) GB9522491D0 (de)
WO (1) WO1997016704A1 (de)

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US6759648B2 (en) * 1997-08-15 2004-07-06 Bishop Innovation Limited Sensor for sensing absolute angular position of a rotatable body
IL141536A (en) 1998-08-21 2005-07-25 Olivier M Parriaux Device for measuring translation, rotation or velocity via light beam interference
EP1028309B1 (de) 1999-02-04 2003-04-16 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
DE19918101A1 (de) * 1999-04-22 2000-10-26 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
US6635863B1 (en) 1999-08-06 2003-10-21 Mitutoyo Corporation Optical encoder
DE19941318A1 (de) * 1999-08-31 2001-03-15 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
DE19944004A1 (de) * 1999-09-14 2001-03-15 Kostal Leopold Gmbh & Co Kg Optoelektronischer Drehwinkelsensor
GB9928483D0 (en) * 1999-12-03 2000-02-02 Renishaw Plc Opto-electronic scale reading apparatus
US6512222B2 (en) * 2000-02-03 2003-01-28 Mitutoyo Corporation Displacement measuring apparatus
US7881896B2 (en) 2002-02-14 2011-02-01 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
DE10323088A1 (de) * 2003-05-16 2004-12-02 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
TW593970B (en) * 2003-06-18 2004-06-21 Opto Tech Corp Position detection device
EP1519158B1 (de) * 2003-09-23 2010-08-11 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung
JP4754230B2 (ja) * 2005-02-02 2011-08-24 株式会社ミツトヨ 光電式エンコーダ
JP2008241243A (ja) * 2005-06-30 2008-10-09 Mitsubishi Electric Corp 光学式エンコーダ
GB0608812D0 (en) * 2006-05-04 2006-06-14 Renishaw Plc Rotary encoder apparatus
GB0621487D0 (en) * 2006-10-28 2006-12-06 Renishaw Plc Opto-electronic read head
DE102008046793A1 (de) 2008-09-11 2010-03-18 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
CN103906997B (zh) * 2011-10-31 2016-12-07 日本精工株式会社 光学传感器、光学传感器的制造方法、光学式编码器、扭矩检测装置以及电动动力转向装置
GB201204066D0 (en) 2012-03-08 2012-04-18 Renishaw Plc Magnetic encoder apparatus
WO2014030177A1 (en) * 2012-08-22 2014-02-27 Inrim Istituto Nazionale Di Ricerca Metrologica Apparatus and method for the stabilization of linear encoders
US9871595B2 (en) 2016-04-27 2018-01-16 Industrial Technology Research Institute Decoding device and method for absolute positioning code
CN108592961B (zh) * 2018-05-21 2021-02-12 深圳市英科达光电技术有限公司 一种游标多读数头全代码相加的高精度绝对式光电编码器

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US3578979A (en) * 1968-04-23 1971-05-18 Tajima Seisakusho Kk Electrical signal generating apparatus having a scale grid
GB1231029A (de) * 1968-12-13 1971-05-05
GB1311275A (en) * 1969-06-04 1973-03-28 Ferranti Ltd Measuring apparatus employing optical gratings
GB1504691A (en) † 1974-03-15 1978-03-22 Nat Res Dev Measurement apparatus
GB1504854A (en) * 1974-03-21 1978-03-22 Int Research & Dev Co Ltd Photodetectors and thin film photovoltaic arrays
US3951548A (en) * 1974-07-22 1976-04-20 Baird-Atomic, Inc. Electro-optical fourier vernier device
DE2451994A1 (de) * 1974-11-02 1976-11-04 Fromund Prof Dipl Phys Hock Verfahren und anordnung zur erzeugung photoelektrischer signale
US3961318A (en) * 1975-01-17 1976-06-01 Inductosyn Corporation Electrostatic position-measuring transducer
GB1516536A (en) * 1975-08-22 1978-07-05 Ferranti Ltd Measuring apparatus
DE3209043C2 (de) * 1981-03-12 1986-09-25 Mitutoyo Mfg. Co., Ltd., Tokio/Tokyo Fotoelektrische Bewegungs-Meßeinrichtung
US4430566A (en) * 1981-04-21 1984-02-07 Vibrac Corporation Electro-optical angular displacement
DD206424A1 (de) * 1982-04-15 1984-01-25 Franz Klapper Einrichtung zur messung von verschiebungen und verdrehungen eines koerpers
NL8202300A (nl) † 1982-06-08 1984-01-02 Philips Nv Inrichting voor het bepalen van hoekverplaatsingen van een voorwerp.
JPH06100479B2 (ja) † 1982-09-01 1994-12-12 ローズマウント エンジニアリング コムパニー リミテッド 位置測定装置
EP0157034B1 (de) * 1983-07-27 1994-09-21 Sony Magnescale Incorporation Detektorkopf
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DE3616144A1 (de) * 1986-05-14 1987-11-19 Heidenhain Gmbh Dr Johannes Fotoelektrische messeinrichtung
JPS63174563A (ja) * 1987-01-13 1988-07-19 Mitsubishi Electric Corp 直流電源装置
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US5017776A (en) * 1989-03-10 1991-05-21 Hewlett-Packard Company Apparatus for and methods of optical encoding having spiral shaped light modulator
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US5155355A (en) * 1991-04-25 1992-10-13 Mitutoyo Corporation Photoelectric encoder having a grating substrate with integral light emitting elements
EP0843159A3 (de) * 1991-11-06 1999-06-02 Renishaw Transducer Systems Limited Opto-elektronischer Skalenableseapparat
DE4302313C2 (de) * 1993-01-28 1996-12-05 Heidenhain Gmbh Dr Johannes Mehrkoordinaten-Meßeinrichtung
DE59306689D1 (de) * 1993-08-07 1997-07-10 Heidenhain Gmbh Dr Johannes Vorrichtung zur Erzeugung oberwellenfreier periodischer Signale
JP3196459B2 (ja) * 1993-10-29 2001-08-06 キヤノン株式会社 ロータリーエンコーダ
GB2288015B (en) * 1994-03-31 1997-11-19 Mitutoyo Corp Optical encoder having a photodiode array that serves both for a light detector and an index scale
EP0693672B1 (de) * 1994-07-01 1996-12-18 Dr. Johannes Heidenhain GmbH Längen- oder Winkelmesseinrichtung

Also Published As

Publication number Publication date
EP0801724B1 (de) 2002-01-09
WO1997016704A1 (en) 1997-05-09
US5886352A (en) 1999-03-23
EP0801724A1 (de) 1997-10-22
EP0801724B2 (de) 2013-03-06
GB9522491D0 (en) 1996-01-03
DE69618441D1 (de) 2002-02-14
JPH10512374A (ja) 1998-11-24
DE69618441T3 (de) 2013-06-27
EP1114983A1 (de) 2001-07-11
ATE211816T1 (de) 2002-01-15

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Legal Events

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8363 Opposition against the patent