DE69618326D1 - Feldemissionsvorrichtungen mit Emittern auf Metallfolie und Verfahren zur Herstellung dieser Vorrichtungen - Google Patents

Feldemissionsvorrichtungen mit Emittern auf Metallfolie und Verfahren zur Herstellung dieser Vorrichtungen

Info

Publication number
DE69618326D1
DE69618326D1 DE69618326T DE69618326T DE69618326D1 DE 69618326 D1 DE69618326 D1 DE 69618326D1 DE 69618326 T DE69618326 T DE 69618326T DE 69618326 T DE69618326 T DE 69618326T DE 69618326 D1 DE69618326 D1 DE 69618326D1
Authority
DE
Germany
Prior art keywords
devices
emitters
producing
metal foil
field emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69618326T
Other languages
English (en)
Other versions
DE69618326T2 (de
Inventor
Sungho Jin
Wei Zhu
Gregory Peter Kochanski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Publication of DE69618326D1 publication Critical patent/DE69618326D1/de
Application granted granted Critical
Publication of DE69618326T2 publication Critical patent/DE69618326T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30457—Diamond

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
DE69618326T 1995-11-09 1996-10-29 Feldemissionsvorrichtungen mit Emittern auf Metallfolie und Verfahren zur Herstellung dieser Vorrichtungen Expired - Fee Related DE69618326T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/555,594 US5648699A (en) 1995-11-09 1995-11-09 Field emission devices employing improved emitters on metal foil and methods for making such devices

Publications (2)

Publication Number Publication Date
DE69618326D1 true DE69618326D1 (de) 2002-02-07
DE69618326T2 DE69618326T2 (de) 2002-08-08

Family

ID=24217871

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69618326T Expired - Fee Related DE69618326T2 (de) 1995-11-09 1996-10-29 Feldemissionsvorrichtungen mit Emittern auf Metallfolie und Verfahren zur Herstellung dieser Vorrichtungen

Country Status (4)

Country Link
US (1) US5648699A (de)
EP (1) EP0773574B1 (de)
JP (1) JP3455380B2 (de)
DE (1) DE69618326T2 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW289864B (de) 1994-09-16 1996-11-01 Micron Display Tech Inc
US6417605B1 (en) * 1994-09-16 2002-07-09 Micron Technology, Inc. Method of preventing junction leakage in field emission devices
US5975975A (en) * 1994-09-16 1999-11-02 Micron Technology, Inc. Apparatus and method for stabilization of threshold voltage in field emission displays
US5637950A (en) * 1994-10-31 1997-06-10 Lucent Technologies Inc. Field emission devices employing enhanced diamond field emitters
US5796211A (en) * 1994-12-22 1998-08-18 Lucent Technologies, Inc. Microwave vacuum tube devices employing electron sources comprising activated ultrafine diamonds
AU4750297A (en) * 1996-10-17 1998-05-11 E.I. Du Pont De Nemours And Company Connection method for fiber field emitters and field emitter cathodes made therefrom
GB9626221D0 (en) * 1996-12-18 1997-02-05 Smiths Industries Plc Diamond surfaces
US6525461B1 (en) * 1997-10-30 2003-02-25 Canon Kabushiki Kaisha Narrow titanium-containing wire, process for producing narrow titanium-containing wire, structure, and electron-emitting device
US6040939A (en) * 1998-06-16 2000-03-21 Turkiye Sise Ve Cam Fabrikalari A.S. Anti-solar and low emissivity functioning multi-layer coatings on transparent substrates
US6218293B1 (en) 1998-11-13 2001-04-17 Micron Technology, Inc. Batch processing for semiconductor wafers to form aluminum nitride and titanium aluminum nitride
US6290564B1 (en) 1999-09-30 2001-09-18 Motorola, Inc. Method for fabricating an electron-emissive film
US6469436B1 (en) * 2000-01-14 2002-10-22 Micron Technology, Inc. Radiation shielding for field emitters
KR100436297B1 (ko) * 2000-03-14 2004-06-18 주성엔지니어링(주) 반도체 소자 제조용 플라즈마 스프레이 장치 및 이를이용한 반도체 소자 제조방법
JP2001266737A (ja) * 2000-03-24 2001-09-28 Toshiba Corp 電子源装置、その製造方法、および電子源装置を備えた平面表示装置
US6387717B1 (en) * 2000-04-26 2002-05-14 Micron Technology, Inc. Field emission tips and methods for fabricating the same
US7227924B2 (en) * 2000-10-06 2007-06-05 The University Of North Carolina At Chapel Hill Computed tomography scanning system and method using a field emission x-ray source
US6553096B1 (en) 2000-10-06 2003-04-22 The University Of North Carolina Chapel Hill X-ray generating mechanism using electron field emission cathode
US6876724B2 (en) * 2000-10-06 2005-04-05 The University Of North Carolina - Chapel Hill Large-area individually addressable multi-beam x-ray system and method of forming same
US7085351B2 (en) * 2000-10-06 2006-08-01 University Of North Carolina At Chapel Hill Method and apparatus for controlling electron beam current
US7082182B2 (en) * 2000-10-06 2006-07-25 The University Of North Carolina At Chapel Hill Computed tomography system for imaging of human and small animal
US6885022B2 (en) * 2000-12-08 2005-04-26 Si Diamond Technology, Inc. Low work function material
US20050200261A1 (en) * 2000-12-08 2005-09-15 Nano-Proprietary, Inc. Low work function cathode
KR100571805B1 (ko) * 2003-01-29 2006-04-17 삼성에스디아이 주식회사 전계방출소자와 이를 적용한 표시소자 및 그 제조방법
JP4170172B2 (ja) * 2003-08-21 2008-10-22 ダイヤライトジャパン株式会社 照明装置
JP2005174856A (ja) * 2003-12-15 2005-06-30 Toshiba Corp シール材、およびシール材を用いた画像表示装置
US8155262B2 (en) * 2005-04-25 2012-04-10 The University Of North Carolina At Chapel Hill Methods, systems, and computer program products for multiplexing computed tomography
US8189893B2 (en) * 2006-05-19 2012-05-29 The University Of North Carolina At Chapel Hill Methods, systems, and computer program products for binary multiplexing x-ray radiography
WO2009012453A1 (en) * 2007-07-19 2009-01-22 The University Of North Carolina At Chapel Hill Stationary x-ray digital breast tomosynthesis systems and related methods
US8600003B2 (en) * 2009-01-16 2013-12-03 The University Of North Carolina At Chapel Hill Compact microbeam radiation therapy systems and methods for cancer treatment and research
PL2501888T3 (pl) * 2009-11-18 2017-10-31 Agc Glass Europe Sposób wytwarzania oszklenia termoizolacyjnego
US8358739B2 (en) 2010-09-03 2013-01-22 The University Of North Carolina At Chapel Hill Systems and methods for temporal multiplexing X-ray imaging
US9782136B2 (en) 2014-06-17 2017-10-10 The University Of North Carolina At Chapel Hill Intraoral tomosynthesis systems, methods, and computer readable media for dental imaging
US10980494B2 (en) 2014-10-20 2021-04-20 The University Of North Carolina At Chapel Hill Systems and related methods for stationary digital chest tomosynthesis (s-DCT) imaging
US10835199B2 (en) 2016-02-01 2020-11-17 The University Of North Carolina At Chapel Hill Optical geometry calibration devices, systems, and related methods for three dimensional x-ray imaging

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4307507A (en) * 1980-09-10 1981-12-29 The United States Of America As Represented By The Secretary Of The Navy Method of manufacturing a field-emission cathode structure
FR2623013A1 (fr) * 1987-11-06 1989-05-12 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source
US5114770A (en) * 1989-06-28 1992-05-19 Canon Kabushiki Kaisha Method for continuously forming functional deposited films with a large area by a microwave plasma cvd method
US5214347A (en) * 1990-06-08 1993-05-25 The United States Of America As Represented By The Secretary Of The Navy Layered thin-edged field-emitter device
US5129850A (en) * 1991-08-20 1992-07-14 Motorola, Inc. Method of making a molded field emission electron emitter employing a diamond coating
US5138237A (en) * 1991-08-20 1992-08-11 Motorola, Inc. Field emission electron device employing a modulatable diamond semiconductor emitter
US5290610A (en) * 1992-02-13 1994-03-01 Motorola, Inc. Forming a diamond material layer on an electron emitter using hydrocarbon reactant gases ionized by emitted electrons
US5283500A (en) * 1992-05-28 1994-02-01 At&T Bell Laboratories Flat panel field emission display apparatus
US5396150A (en) * 1993-07-01 1995-03-07 Industrial Technology Research Institute Single tip redundancy method and resulting flat panel display
EP0675519A1 (de) * 1994-03-30 1995-10-04 AT&T Corp. Vorrichtung mit Feldeffekt-Emittern
US5439753A (en) * 1994-10-03 1995-08-08 Motorola, Inc. Electron emissive film

Also Published As

Publication number Publication date
JP3455380B2 (ja) 2003-10-14
US5648699A (en) 1997-07-15
EP0773574A1 (de) 1997-05-14
JPH09311644A (ja) 1997-12-02
DE69618326T2 (de) 2002-08-08
EP0773574B1 (de) 2002-01-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee