DE69432174T2 - Kaltkathoden-elektrodenquellenelement und verfahren zur herstellung desselben - Google Patents
Kaltkathoden-elektrodenquellenelement und verfahren zur herstellung desselbenInfo
- Publication number
- DE69432174T2 DE69432174T2 DE69432174T DE69432174T DE69432174T2 DE 69432174 T2 DE69432174 T2 DE 69432174T2 DE 69432174 T DE69432174 T DE 69432174T DE 69432174 T DE69432174 T DE 69432174T DE 69432174 T2 DE69432174 T2 DE 69432174T2
- Authority
- DE
- Germany
- Prior art keywords
- producing
- same
- cathode electrode
- cold cathode
- source element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
- H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30403—Field emission cathodes characterised by the emitter shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30457—Diamond
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29335793A JP3444943B2 (ja) | 1993-11-24 | 1993-11-24 | 冷陰極電子源素子 |
JP6353694 | 1994-03-31 | ||
JP14454594 | 1994-06-27 | ||
PCT/JP1994/001976 WO1995015002A1 (fr) | 1993-11-24 | 1994-11-22 | Element source d'electrons de cathode froide et son procede de production |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69432174D1 DE69432174D1 (de) | 2003-04-03 |
DE69432174T2 true DE69432174T2 (de) | 2003-12-11 |
Family
ID=27298204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69432174T Expired - Fee Related DE69432174T2 (de) | 1993-11-24 | 1994-11-22 | Kaltkathoden-elektrodenquellenelement und verfahren zur herstellung desselben |
Country Status (4)
Country | Link |
---|---|
US (2) | US5760536A (de) |
EP (1) | EP0681312B1 (de) |
DE (1) | DE69432174T2 (de) |
WO (1) | WO1995015002A1 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997006549A1 (en) * | 1995-08-04 | 1997-02-20 | Printable Field Emmitters Limited | Field electron emission materials and devices |
US6181308B1 (en) * | 1995-10-16 | 2001-01-30 | Micron Technology, Inc. | Light-insensitive resistor for current-limiting of field emission displays |
US5973451A (en) * | 1997-02-04 | 1999-10-26 | Massachusetts Institute Of Technology | Surface-emission cathodes |
CA2312910A1 (en) | 1997-12-04 | 1999-06-10 | Printable Field Emitters Limited | Field electron emission materials and devices |
US6268686B1 (en) * | 1998-01-29 | 2001-07-31 | Honda Giken Kogyo Kabushiki Kaisha | Cold cathode element |
JP2000123711A (ja) * | 1998-10-12 | 2000-04-28 | Toshiba Corp | 電界放出型冷陰極及びその製造方法 |
JP3595718B2 (ja) * | 1999-03-15 | 2004-12-02 | 株式会社東芝 | 表示素子およびその製造方法 |
US6935917B1 (en) * | 1999-07-16 | 2005-08-30 | Mitsubishi Denki Kabushiki Kaisha | Discharge surface treating electrode and production method thereof |
KR20010011136A (ko) * | 1999-07-26 | 2001-02-15 | 정선종 | 나노구조를 에미터로 사용한 삼극형 전계 방출 에미터의 구조및 그 제조방법 |
KR100490527B1 (ko) * | 2000-02-07 | 2005-05-17 | 삼성에스디아이 주식회사 | 카본나노튜브를 채용한 2차 전자 증폭 구조체 및 이를 이용한 플라즈마 표시 패널 및 백라이트 |
JP3737688B2 (ja) * | 2000-09-14 | 2006-01-18 | 株式会社東芝 | 電子放出素子及びその製造方法 |
US7030430B2 (en) * | 2003-08-15 | 2006-04-18 | Intel Corporation | Transition metal alloys for use as a gate electrode and devices incorporating these alloys |
TWI246355B (en) * | 2004-12-17 | 2005-12-21 | Hon Hai Prec Ind Co Ltd | Field emission type light source and backlight module using the same |
US10164059B2 (en) | 2015-09-04 | 2018-12-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | FinFET device and fabricating method thereof |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE297035C (de) * | ||||
GB1466534A (en) * | 1974-03-08 | 1977-03-09 | Burroughs Corp | Cold cathode diplay device and method of making such devices |
US4325000A (en) * | 1980-04-20 | 1982-04-13 | Burroughs Corporation | Low work function cathode |
DE3205746A1 (de) * | 1982-02-18 | 1983-08-25 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Thermionische kathode und verfahren zu ihrer herstellung |
US4498952A (en) * | 1982-09-17 | 1985-02-12 | Condesin, Inc. | Batch fabrication procedure for manufacture of arrays of field emitted electron beams with integral self-aligned optical lense in microguns |
US4663559A (en) * | 1982-09-17 | 1987-05-05 | Christensen Alton O | Field emission device |
JP2654012B2 (ja) * | 1987-05-06 | 1997-09-17 | キヤノン株式会社 | 電子放出素子およびその製造方法 |
US5872541A (en) * | 1987-07-15 | 1999-02-16 | Canon Kabushiki Kaisha | Method for displaying images with electron emitting device |
JPH07114104B2 (ja) * | 1987-10-09 | 1995-12-06 | キヤノン株式会社 | 電子放出素子及びその製造方法 |
US5066883A (en) * | 1987-07-15 | 1991-11-19 | Canon Kabushiki Kaisha | Electron-emitting device with electron-emitting region insulated from electrodes |
JP2718144B2 (ja) * | 1989-02-21 | 1998-02-25 | 松下電器産業株式会社 | 電界放出型冷陰極 |
JPH07114109B2 (ja) * | 1989-07-17 | 1995-12-06 | 松下電器産業株式会社 | プレーナ型冷陰極の製造方法 |
US5019003A (en) * | 1989-09-29 | 1991-05-28 | Motorola, Inc. | Field emission device having preformed emitters |
JP2574500B2 (ja) * | 1990-03-01 | 1997-01-22 | 松下電器産業株式会社 | プレーナ型冷陰極の製造方法 |
US5089742A (en) * | 1990-09-28 | 1992-02-18 | The United States Of America As Represented By The Secretary Of The Navy | Electron beam source formed with biologically derived tubule materials |
JP3017997B2 (ja) * | 1990-09-28 | 2000-03-13 | 新日本無線株式会社 | 電界放出陰極 |
US5141460A (en) * | 1991-08-20 | 1992-08-25 | Jaskie James E | Method of making a field emission electron source employing a diamond coating |
US5278475A (en) * | 1992-06-01 | 1994-01-11 | Motorola, Inc. | Cathodoluminescent display apparatus and method for realization using diamond crystallites |
JPH0689652A (ja) * | 1992-09-08 | 1994-03-29 | Casio Comput Co Ltd | 電子放出用電極及びその製造方法 |
JPH06196086A (ja) * | 1992-12-22 | 1994-07-15 | Mitsubishi Electric Corp | 電界放出陰極及びその形成方法 |
-
1994
- 1994-11-22 EP EP95900936A patent/EP0681312B1/de not_active Expired - Lifetime
- 1994-11-22 WO PCT/JP1994/001976 patent/WO1995015002A1/ja active IP Right Grant
- 1994-11-22 DE DE69432174T patent/DE69432174T2/de not_active Expired - Fee Related
- 1994-11-23 US US08/347,133 patent/US5760536A/en not_active Expired - Fee Related
-
1997
- 1997-11-03 US US08/962,735 patent/US5860844A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0681312B1 (de) | 2003-02-26 |
WO1995015002A1 (fr) | 1995-06-01 |
EP0681312A1 (de) | 1995-11-08 |
US5760536A (en) | 1998-06-02 |
US5860844A (en) | 1999-01-19 |
DE69432174D1 (de) | 2003-04-03 |
EP0681312A4 (de) | 1996-11-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69527054T2 (de) | Retroreflektierender gegenstand und verfahren zur herstellung | |
DE69316810D1 (de) | SiGe-SOI-MOSFET und Verfahren zur Herstellung | |
DE69528111D1 (de) | Biosensor und Verfahren zur Herstellung desselben | |
DE59404480D1 (de) | Fullerenderivate, verfahren zur herstellung und deren verwendung | |
DE69320059D1 (de) | Verfahren zur herstellung von 1,1,1,4,4,4-hexafluoro-2-buten und 1,1,1,4,4,4-hexafluorobutan | |
DE69431147D1 (de) | Elektrische Anschlussbuchse und Verfahren zur Herstellung derselben | |
DE69522324D1 (de) | Farblampe und verfahren zur herstellung derselben | |
DE69419005T2 (de) | Verfahren zur herstellung von 1,1,1,4,4,4-hexafluoro-2-butenen und 1,1,4,4,4,4-hexafluorobutan | |
DE69432174D1 (de) | Kaltkathoden-elektrodenquellenelement und verfahren zur herstellung desselben | |
DE69425748D1 (de) | Transistoren und verfahren zur herstellung | |
DE69123896T2 (de) | pH-Messelektrode und Verfahren zur Herstellung derselben | |
DE69429243D1 (de) | Elektrode zur herstellung von plasma und verfahren zur herstellung der elektrode | |
DE69426258T2 (de) | Druckplatten-material und verfahren zur herstellung desselben | |
DE69515697D1 (de) | Blockcopolymere und verfahren zur herstellung | |
DE69613964T2 (de) | Verfahren zur herstellung von pentafluoroethan und tetrafluorochloroethan | |
DE19681535T1 (de) | Kathodenelement und Verfahren für dessen Herstellung | |
DE69321848T2 (de) | Verfahren zur herstellung von 1,1,1,2,3,3-hexafluorpropan und von tetrafluorchlorpropen | |
DE69416862T2 (de) | Transparente, antistatische, thermoplastische zusammensetzung und verfahren zur herstellung derselben | |
DE69404348T2 (de) | Kathodenvorrichtung und Verfahren zur Herstellung derselben | |
DE69128406T2 (de) | Lateraler MOSFET und Verfahren zur Herstellung | |
DE69316187D1 (de) | Matratze und Verfahren zur deren Herstellung | |
DE69727071D1 (de) | Kurzkanal-flaheeprom-speicheranordnung mit doppel-diffundierter source und verfahren zur herstellung | |
DE69516408D1 (de) | Gesinterde quarzglasprodukte und verfahren zur herstellung | |
DE69419516D1 (de) | Verfahren zur herstellung von hexafluorocyclobuten und verfahren zur herstellung von hexafluorocyclobutan | |
DE69423910T2 (de) | Verfahren zur herstellung von difluormethan und 1,1,1,2-tetrafluorethan |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |