DE69620891D1 - Verfahren zur herstellung von elektronenvervielfachern mit diskreten dynoden - Google Patents
Verfahren zur herstellung von elektronenvervielfachern mit diskreten dynodenInfo
- Publication number
- DE69620891D1 DE69620891D1 DE69620891T DE69620891T DE69620891D1 DE 69620891 D1 DE69620891 D1 DE 69620891D1 DE 69620891 T DE69620891 T DE 69620891T DE 69620891 T DE69620891 T DE 69620891T DE 69620891 D1 DE69620891 D1 DE 69620891D1
- Authority
- DE
- Germany
- Prior art keywords
- producing electronic
- electronic multiplier
- discrete dynodes
- dynodes
- discrete
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
- H01J9/125—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes of secondary emission electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/32—Secondary emission electrodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/506,611 US5618217A (en) | 1995-07-25 | 1995-07-25 | Method for fabrication of discrete dynode electron multipliers |
PCT/US1996/012208 WO1997005640A1 (en) | 1995-07-25 | 1996-07-25 | Method for fabrication of discrete dynode electron multipliers |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69620891D1 true DE69620891D1 (de) | 2002-05-29 |
DE69620891T2 DE69620891T2 (de) | 2002-12-12 |
Family
ID=24015306
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69620891T Expired - Lifetime DE69620891T2 (de) | 1995-07-25 | 1996-07-25 | Verfahren zur herstellung von elektronenvervielfachern mit diskreten dynoden |
Country Status (5)
Country | Link |
---|---|
US (1) | US5618217A (de) |
EP (1) | EP0846332B1 (de) |
CA (1) | CA2229731C (de) |
DE (1) | DE69620891T2 (de) |
WO (1) | WO1997005640A1 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9717210D0 (en) * | 1997-08-14 | 1997-10-22 | Central Lab Of The Research Co | Electron multiplier array |
JP4108905B2 (ja) * | 2000-06-19 | 2008-06-25 | 浜松ホトニクス株式会社 | ダイノードの製造方法及び構造 |
US6287962B1 (en) * | 2000-11-30 | 2001-09-11 | Taiwan Semiconductor Manufacturing Company | Method for making a novel graded silicon nitride/silicon oxide (SNO) hard mask for improved deep sub-micrometer semiconductor processing |
US20070007462A1 (en) * | 2003-04-01 | 2007-01-11 | Robert Stevens | Large area detectors and displays |
JP2007516634A (ja) * | 2003-07-09 | 2007-06-21 | カウンシル フォー ザ セントラル ラボラトリー オブ ザ リサーチ カウンシルズ | 大面積電子増倍管を用いた撮像機 |
GB2409927B (en) * | 2004-01-09 | 2006-09-27 | Microsaic Systems Ltd | Micro-engineered electron multipliers |
WO2007035434A2 (en) * | 2005-09-16 | 2007-03-29 | Arradiance, Inc. | Microchannel amplifier with tailored pore resistance |
US7697137B2 (en) * | 2006-04-28 | 2010-04-13 | Corning Incorporated | Monolithic Offner spectrometer |
US9275861B2 (en) * | 2013-06-26 | 2016-03-01 | Globalfoundries Inc. | Methods of forming group III-V semiconductor materials on group IV substrates and the resulting substrate structures |
US10026583B2 (en) * | 2016-06-03 | 2018-07-17 | Harris Corporation | Discrete dynode electron multiplier fabrication method |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1434053A (en) * | 1973-04-06 | 1976-04-28 | Mullard Ltd | Electron multipliers |
US4099079A (en) * | 1975-10-30 | 1978-07-04 | U.S. Philips Corporation | Secondary-emissive layers |
GB2080016A (en) * | 1980-07-09 | 1982-01-27 | Philips Electronic Associated | Channel plate electron multiplier |
FR2549288B1 (fr) * | 1983-07-11 | 1985-10-25 | Hyperelec | Element multiplicateur d'electrons, dispositif multiplicateur d'electrons comportant cet element multiplicateur et application a un tube photomultiplicateur |
GB2154053A (en) * | 1984-02-08 | 1985-08-29 | Philips Electronic Associated | High resolution channel multiplier dynodes |
US4825118A (en) * | 1985-09-06 | 1989-04-25 | Hamamatsu Photonics Kabushiki Kaisha | Electron multiplier device |
DE69030145T2 (de) * | 1989-08-18 | 1997-07-10 | Galileo Electro Optics Corp | Kontinuierliche Dünnschicht-Dynoden |
-
1995
- 1995-07-25 US US08/506,611 patent/US5618217A/en not_active Expired - Lifetime
-
1996
- 1996-07-25 DE DE69620891T patent/DE69620891T2/de not_active Expired - Lifetime
- 1996-07-25 WO PCT/US1996/012208 patent/WO1997005640A1/en active IP Right Grant
- 1996-07-25 CA CA002229731A patent/CA2229731C/en not_active Expired - Fee Related
- 1996-07-25 EP EP96925463A patent/EP0846332B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0846332A1 (de) | 1998-06-10 |
EP0846332B1 (de) | 2002-04-24 |
DE69620891T2 (de) | 2002-12-12 |
WO1997005640A1 (en) | 1997-02-13 |
CA2229731C (en) | 2002-09-17 |
CA2229731A1 (en) | 1997-02-13 |
US5618217A (en) | 1997-04-08 |
EP0846332A4 (de) | 1998-12-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |