DE69401243D1 - Feldemissionsvorrichtung mit Kleinradiuskathode und Herstellungsverfahren dieser Vorrichtung - Google Patents

Feldemissionsvorrichtung mit Kleinradiuskathode und Herstellungsverfahren dieser Vorrichtung

Info

Publication number
DE69401243D1
DE69401243D1 DE69401243T DE69401243T DE69401243D1 DE 69401243 D1 DE69401243 D1 DE 69401243D1 DE 69401243 T DE69401243 T DE 69401243T DE 69401243 T DE69401243 T DE 69401243T DE 69401243 D1 DE69401243 D1 DE 69401243D1
Authority
DE
Germany
Prior art keywords
manufacturing
field emission
small radius
cathode
emission device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69401243T
Other languages
English (en)
Other versions
DE69401243T2 (de
Inventor
Yoshikazu Hori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69401243D1 publication Critical patent/DE69401243D1/de
Publication of DE69401243T2 publication Critical patent/DE69401243T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
DE69401243T 1993-07-05 1994-07-05 Feldemissionsvorrichtung mit Kleinradiuskathode und Herstellungsverfahren dieser Vorrichtung Expired - Fee Related DE69401243T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16531093 1993-07-05
JP9139894 1994-04-28

Publications (2)

Publication Number Publication Date
DE69401243D1 true DE69401243D1 (de) 1997-02-06
DE69401243T2 DE69401243T2 (de) 1997-05-22

Family

ID=26432829

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69401243T Expired - Fee Related DE69401243T2 (de) 1993-07-05 1994-07-05 Feldemissionsvorrichtung mit Kleinradiuskathode und Herstellungsverfahren dieser Vorrichtung

Country Status (3)

Country Link
US (1) US5502314A (de)
EP (1) EP0633594B1 (de)
DE (1) DE69401243T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5841219A (en) * 1993-09-22 1998-11-24 University Of Utah Research Foundation Microminiature thermionic vacuum tube
JPH0850850A (ja) * 1994-08-09 1996-02-20 Agency Of Ind Science & Technol 電界放出型電子放出素子およびその製造方法
US5859493A (en) * 1995-06-29 1999-01-12 Samsung Display Devices Co., Ltd. Lateral field emission display with pointed micro tips
US5955828A (en) * 1996-10-16 1999-09-21 University Of Utah Research Foundation Thermionic optical emission device
US5872421A (en) * 1996-12-30 1999-02-16 Advanced Vision Technologies, Inc. Surface electron display device with electron sink
EP0948800A2 (de) * 1996-12-30 1999-10-13 Advanced Vision Technologies, Inc. Elektronenemittierende anzeigevorrichtung des oberflachen-typs und verfahren zur herstellung
US7005783B2 (en) 2002-02-04 2006-02-28 Innosys, Inc. Solid state vacuum devices and method for making the same
US6995502B2 (en) 2002-02-04 2006-02-07 Innosys, Inc. Solid state vacuum devices and method for making the same
US20050179024A1 (en) * 2003-12-25 2005-08-18 Matsushita Electric Industrial Co., Ltd. Electron emission material and electron emission element using the same
JP3907667B2 (ja) * 2004-05-18 2007-04-18 キヤノン株式会社 電子放出素子、電子放出装置およびそれを用いた電子源並びに画像表示装置および情報表示再生装置
EP2109132A3 (de) * 2008-04-10 2010-06-30 Canon Kabushiki Kaisha Elektronenstrahlvorrichtung und Bildanzeigevorrichtung damit
KR101239395B1 (ko) * 2011-07-11 2013-03-05 고려대학교 산학협력단 전계 방출원 및 이를 적용하는 소자 및 그 제조방법
US9323010B2 (en) * 2012-01-10 2016-04-26 Invensas Corporation Structures formed using monocrystalline silicon and/or other materials for optical and other applications
US10900928B2 (en) * 2016-01-28 2021-01-26 Alcotek, Inc. Gas sensor
CN110875165A (zh) * 2018-08-30 2020-03-10 中国科学院微电子研究所 一种场发射阴极电子源及其阵列

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2968014B2 (ja) * 1990-01-29 1999-10-25 三菱電機株式会社 微小真空管及びその製造方法
US5192240A (en) * 1990-02-22 1993-03-09 Seiko Epson Corporation Method of manufacturing a microelectronic vacuum device
US5214346A (en) * 1990-02-22 1993-05-25 Seiko Epson Corporation Microelectronic vacuum field emission device
JP2574500B2 (ja) * 1990-03-01 1997-01-22 松下電器産業株式会社 プレーナ型冷陰極の製造方法
JP2634295B2 (ja) * 1990-05-17 1997-07-23 双葉電子工業株式会社 電子放出素子
US5148078A (en) * 1990-08-29 1992-09-15 Motorola, Inc. Field emission device employing a concentric post
US5289077A (en) * 1991-01-28 1994-02-22 Sony Corporation Microelectronic ballistic transistor
JP3235172B2 (ja) * 1991-05-13 2001-12-04 セイコーエプソン株式会社 電界電子放出装置
US5289086A (en) * 1992-05-04 1994-02-22 Motorola, Inc. Electron device employing a diamond film electron source
DE4224519A1 (de) * 1992-07-24 1994-01-27 Siemens Ag Feldemissionsvorrichtung

Also Published As

Publication number Publication date
US5502314A (en) 1996-03-26
DE69401243T2 (de) 1997-05-22
EP0633594A1 (de) 1995-01-11
EP0633594B1 (de) 1996-12-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee