DE68927052D1 - Gekapselte elektronenquelle hoher helligkeit und dazugehörige vorrichtung - Google Patents
Gekapselte elektronenquelle hoher helligkeit und dazugehörige vorrichtungInfo
- Publication number
- DE68927052D1 DE68927052D1 DE68927052T DE68927052T DE68927052D1 DE 68927052 D1 DE68927052 D1 DE 68927052D1 DE 68927052 T DE68927052 T DE 68927052T DE 68927052 T DE68927052 T DE 68927052T DE 68927052 D1 DE68927052 D1 DE 68927052D1
- Authority
- DE
- Germany
- Prior art keywords
- high brightness
- electron source
- related device
- enclosed high
- brightness electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/183,643 US4833362A (en) | 1988-04-19 | 1988-04-19 | Encapsulated high brightness electron beam source and system |
PCT/US1989/001626 WO1989010628A1 (en) | 1988-04-19 | 1989-04-18 | Encapsulated high brightness electron beam source and system therefor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68927052D1 true DE68927052D1 (de) | 1996-10-02 |
DE68927052T2 DE68927052T2 (de) | 1997-03-20 |
Family
ID=22673704
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68927052T Expired - Fee Related DE68927052T2 (de) | 1988-04-19 | 1989-04-18 | Gekapselte elektronenquelle hoher helligkeit und dazugehörige vorrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US4833362A (de) |
EP (1) | EP0411043B1 (de) |
JP (1) | JP2779026B2 (de) |
CA (1) | CA1325855C (de) |
DE (1) | DE68927052T2 (de) |
WO (1) | WO1989010628A1 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL9000056A (nl) * | 1990-01-10 | 1991-08-01 | Philips Nv | Afsluitinrichting voor deeltjesbundel apparaat. |
NL9000057A (nl) * | 1990-01-10 | 1991-08-01 | Philips Nv | Thermisch bedienbare vacuumklep voor deeltjesbundel apparaat. |
US5008549A (en) * | 1990-04-10 | 1991-04-16 | Orchid One Corporation | High performance, vacuum compatible electromagnetic lens coil |
US5150001A (en) * | 1990-04-10 | 1992-09-22 | Orchid One Corporation | Field emission electron gun and method having complementary passive and active vacuum pumping |
US5241182A (en) * | 1991-06-18 | 1993-08-31 | Fei Company | Precision electrostatic lens system and method of manufacture |
JP2732961B2 (ja) * | 1991-07-18 | 1998-03-30 | 株式会社日立製作所 | 荷電粒子線装置 |
US5304888A (en) * | 1992-01-24 | 1994-04-19 | Etec Systems, Inc. | Mechanically stable field emission gun |
JPH0719554B2 (ja) * | 1993-03-25 | 1995-03-06 | 工業技術院長 | 荷電ビーム装置 |
US5909032A (en) * | 1995-01-05 | 1999-06-01 | American International Technologies, Inc. | Apparatus and method for a modular electron beam system for the treatment of surfaces |
US6252339B1 (en) * | 1998-09-17 | 2001-06-26 | Nikon Corporation | Removable bombardment filament-module for electron beam projection systems |
DE60134718D1 (de) * | 2001-04-09 | 2008-08-21 | Integrated Circuit Testing | Vorrichtung und Verfahren zur Kontrolle von fokussierten Elektronenstrahlen |
JP4538441B2 (ja) * | 2003-09-10 | 2010-09-08 | 株式会社日立ハイテクノロジーズ | 電子線応用装置 |
JP4349964B2 (ja) * | 2003-09-10 | 2009-10-21 | 株式会社日立ハイテクノロジーズ | 小型電子銃 |
JP4751635B2 (ja) * | 2005-04-13 | 2011-08-17 | 株式会社日立ハイテクノロジーズ | 磁界重畳型電子銃 |
JP4977399B2 (ja) * | 2005-11-10 | 2012-07-18 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
JP5016988B2 (ja) * | 2007-06-19 | 2012-09-05 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置およびその真空立上げ方法 |
JP5514472B2 (ja) * | 2008-05-28 | 2014-06-04 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
WO2009153939A1 (ja) | 2008-06-20 | 2009-12-23 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、及びその制御方法 |
EP2399270B1 (de) * | 2009-02-22 | 2013-06-12 | Mapper Lithography IP B.V. | Lithografievorrichtung mit geladenem teilchen |
US20150221487A9 (en) * | 2013-05-09 | 2015-08-06 | Arash Akhavan Fomani | Surface adsorption vacuum pumps and methods for producing adsorbate-free surfaces |
DE112015006910B4 (de) | 2015-09-16 | 2023-03-30 | Hitachi High-Tech Corporation | Vakuumvorrichtung |
IT201800007349A1 (it) * | 2018-07-19 | 2020-01-19 | Apparecchio multistadio per vuoto con separazione degli stadi controllata da un attuatore in lega a memoria di forma |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3678333A (en) * | 1970-06-15 | 1972-07-18 | American Optical Corp | Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges |
US3881125A (en) * | 1972-08-17 | 1975-04-29 | Tektronix Inc | Separable-chamber electron-beam tube including means for puncturing a pressure seal therein |
JPS49107949U (de) * | 1972-12-29 | 1974-09-14 | ||
JPS5034461A (de) * | 1973-07-31 | 1975-04-02 | ||
JPS5518014B2 (de) * | 1974-12-20 | 1980-05-15 | ||
JPS5249761A (en) * | 1975-10-20 | 1977-04-21 | Hitachi Ltd | Field emission electronic gun |
US4074313A (en) * | 1976-06-14 | 1978-02-14 | Rca Corporation | Electron beam disc recorder |
JPS53137660A (en) * | 1977-05-09 | 1978-12-01 | Hitachi Ltd | Electron gun |
JPS54124966A (en) * | 1978-03-23 | 1979-09-28 | Jeol Ltd | Exhasut system of particle-beam equipment |
IT1198325B (it) * | 1980-06-04 | 1988-12-21 | Getters Spa | Struttura e composizione getteranti,particolarmente adatti per basse temperature |
JPS58146344U (ja) * | 1982-03-26 | 1983-10-01 | 日本電子株式会社 | 荷電粒子源 |
JPS5971561U (ja) * | 1982-11-04 | 1984-05-15 | 株式会社日立製作所 | 粒子線装置の真空保護装置 |
JPS5979969U (ja) * | 1982-11-18 | 1984-05-30 | 日本電子株式会社 | カ−トリツジ式電子銃の接続構造 |
JPS62140333A (ja) * | 1985-12-16 | 1987-06-23 | Hitachi Ltd | 電界放射陰極 |
JPS632180U (de) * | 1986-06-24 | 1988-01-08 | ||
US4725736A (en) * | 1986-08-11 | 1988-02-16 | Electron Beam Memories | Electrostatic electron gun with integrated electron beam deflection and/or stigmating system |
JPS6351037A (ja) * | 1986-08-20 | 1988-03-04 | Toshiba Corp | 電子ビ−ム装置の陽極室 |
WO1988002180A1 (en) * | 1986-09-18 | 1988-03-24 | Crewe Albert V | Differential pressure electron beam system, method and gun |
-
1988
- 1988-04-19 US US07/183,643 patent/US4833362A/en not_active Expired - Lifetime
-
1989
- 1989-04-18 EP EP89905572A patent/EP0411043B1/de not_active Expired - Lifetime
- 1989-04-18 WO PCT/US1989/001626 patent/WO1989010628A1/en active IP Right Grant
- 1989-04-18 DE DE68927052T patent/DE68927052T2/de not_active Expired - Fee Related
- 1989-04-18 JP JP1505244A patent/JP2779026B2/ja not_active Expired - Lifetime
- 1989-04-19 CA CA000597168A patent/CA1325855C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE68927052T2 (de) | 1997-03-20 |
CA1325855C (en) | 1994-01-04 |
EP0411043A1 (de) | 1991-02-06 |
WO1989010628A1 (en) | 1989-11-02 |
US4833362A (en) | 1989-05-23 |
JPH03505386A (ja) | 1991-11-21 |
JP2779026B2 (ja) | 1998-07-23 |
EP0411043B1 (de) | 1996-08-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |