DE69202634T2 - Feldemissionsvorrichtung und Verfahren zur Herstellung. - Google Patents

Feldemissionsvorrichtung und Verfahren zur Herstellung.

Info

Publication number
DE69202634T2
DE69202634T2 DE69202634T DE69202634T DE69202634T2 DE 69202634 T2 DE69202634 T2 DE 69202634T2 DE 69202634 T DE69202634 T DE 69202634T DE 69202634 T DE69202634 T DE 69202634T DE 69202634 T2 DE69202634 T2 DE 69202634T2
Authority
DE
Germany
Prior art keywords
manufacture
field emission
emission device
field
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69202634T
Other languages
English (en)
Other versions
DE69202634D1 (de
Inventor
Robert C Kane
Kevin B Hilgers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of DE69202634D1 publication Critical patent/DE69202634D1/de
Application granted granted Critical
Publication of DE69202634T2 publication Critical patent/DE69202634T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
DE69202634T 1991-07-18 1992-07-15 Feldemissionsvorrichtung und Verfahren zur Herstellung. Expired - Fee Related DE69202634T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/732,297 US5384509A (en) 1991-07-18 1991-07-18 Field emission device with horizontal emitter

Publications (2)

Publication Number Publication Date
DE69202634D1 DE69202634D1 (de) 1995-06-29
DE69202634T2 true DE69202634T2 (de) 1996-01-11

Family

ID=24942989

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69202634T Expired - Fee Related DE69202634T2 (de) 1991-07-18 1992-07-15 Feldemissionsvorrichtung und Verfahren zur Herstellung.

Country Status (4)

Country Link
US (1) US5384509A (de)
EP (1) EP0523980B1 (de)
JP (1) JPH05198265A (de)
DE (1) DE69202634T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994020975A1 (en) * 1993-03-11 1994-09-15 Fed Corporation Emitter tip structure and field emission device comprising same, and method of making same
US5587628A (en) * 1995-04-21 1996-12-24 Kuo; Huei-Pei Field emitter with a tapered gate for flat panel display
US5844351A (en) * 1995-08-24 1998-12-01 Fed Corporation Field emitter device, and veil process for THR fabrication thereof
US5828288A (en) * 1995-08-24 1998-10-27 Fed Corporation Pedestal edge emitter and non-linear current limiters for field emitter displays and other electron source applications
US5688158A (en) * 1995-08-24 1997-11-18 Fed Corporation Planarizing process for field emitter displays and other electron source applications
JP3226765B2 (ja) * 1995-09-05 2001-11-05 株式会社東芝 電界放出型冷陰極装置及びその製造方法
US5872421A (en) * 1996-12-30 1999-02-16 Advanced Vision Technologies, Inc. Surface electron display device with electron sink
US5804909A (en) * 1997-04-04 1998-09-08 Motorola Inc. Edge emission field emission device
US5982082A (en) * 1997-05-06 1999-11-09 St. Clair Intellectual Property Consultants, Inc. Field emission display devices
US6215243B1 (en) 1997-05-06 2001-04-10 St. Clair Intellectual Property Consultants, Inc. Radioactive cathode emitter for use in field emission display devices
US6323594B1 (en) 1997-05-06 2001-11-27 St. Clair Intellectual Property Consultants, Inc. Electron amplification channel structure for use in field emission display devices
US5949185A (en) * 1997-10-22 1999-09-07 St. Clair Intellectual Property Consultants, Inc. Field emission display devices
KR100413815B1 (ko) * 2002-01-22 2004-01-03 삼성에스디아이 주식회사 삼극구조를 가지는 탄소나노튜브 전계방출소자 및 그제조방법
KR100601990B1 (ko) * 2005-02-07 2006-07-18 삼성에스디아이 주식회사 전계방출 표시장치 및 그 제조방법
EP2109132A3 (de) * 2008-04-10 2010-06-30 Canon Kabushiki Kaisha Elektronenstrahlvorrichtung und Bildanzeigevorrichtung damit

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8621600D0 (en) * 1986-09-08 1987-03-18 Gen Electric Co Plc Vacuum devices
US4956574A (en) * 1989-08-08 1990-09-11 Motorola, Inc. Switched anode field emission device
EP0500543A4 (en) * 1989-09-29 1992-11-19 Motorola, Inc. Flat panel display using field emission devices
US5055077A (en) * 1989-11-22 1991-10-08 Motorola, Inc. Cold cathode field emission device having an electrode in an encapsulating layer
GB2238651A (en) * 1989-11-29 1991-06-05 Gen Electric Co Plc Field emission devices.
US5148078A (en) * 1990-08-29 1992-09-15 Motorola, Inc. Field emission device employing a concentric post
US5144191A (en) * 1991-06-12 1992-09-01 Mcnc Horizontal microelectronic field emission devices

Also Published As

Publication number Publication date
EP0523980A1 (de) 1993-01-20
US5384509A (en) 1995-01-24
DE69202634D1 (de) 1995-06-29
EP0523980B1 (de) 1995-05-24
JPH05198265A (ja) 1993-08-06

Similar Documents

Publication Publication Date Title
DE69026353D1 (de) Feldemissionsvorrichtung und Verfahren zur Herstellung derselben
DE69316810T2 (de) SiGe-SOI-MOSFET und Verfahren zur Herstellung
DE69221188T2 (de) Feldeffekttransistorstruktur und Verfahren zur Herstellung
DE69327483T2 (de) Diode und Verfahren zur Herstellung
ATE111701T1 (de) Verfahren und vorrichtung zur herstellung von borstenwaren.
DE69203834T2 (de) Eigenschaden-Kontrollvorrichtung und Verfahren zur Herstellung und Anwendung.
DE59206463D1 (de) Kontaktorgan und Verfahren zur Herstellung des Kontaktorgans
DE68916875T2 (de) Bildanzeigegerät und Verfahren zur Herstellung desselben.
DE69300528D1 (de) Mikropumpe und Verfahren zur Herstellung.
DE69202634D1 (de) Feldemissionsvorrichtung und Verfahren zur Herstellung.
DE69027960D1 (de) Elektronen emittierendes Element und Verfahren zur Herstellung desselben
DE69229314D1 (de) Halbleiteranordnung und Verfahren zur Herstellung
DE69404348D1 (de) Kathodenvorrichtung und Verfahren zur Herstellung derselben
DE69227290T2 (de) Halbleiteranordnung und Verfahren zur Herstellung
DE69128406D1 (de) Lateraler MOSFET und Verfahren zur Herstellung
DE69113725T2 (de) Leistungstransistor und Verfahren zur Herstellung.
DE69128829T2 (de) Feldeffekttransistor und Verfahren zur Herstellung
DE69314394D1 (de) Anzeigegerät und Verfahren zur Herstellung
DE69314705D1 (de) Optoelektronische Einrichtung und Verfahren zur Herstellung dieser Einrichtung
DE69310031D1 (de) Quartzgerät und Verfahren zur Herstellung
DE69219688D1 (de) Halbleitervorrichtung und Verfahren zur Herstellung derselben
DE69303643D1 (de) Halbleiterlaservorrichtung und Verfahren zur Herstellung
ATA246791A (de) Verfahren und vorrichtung zur herstellung von sekundaerkeimen
DE69123282T2 (de) Halbleiteranordnung und Verfahren zur Herstellung
DE69017681T2 (de) Teilweise beschichteter Phosphor und Verfahren zur Herstellung desselben.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee