DE69618326T2 - Feldemissionsvorrichtungen mit Emittern auf Metallfolie und Verfahren zur Herstellung dieser Vorrichtungen - Google Patents
Feldemissionsvorrichtungen mit Emittern auf Metallfolie und Verfahren zur Herstellung dieser VorrichtungenInfo
- Publication number
- DE69618326T2 DE69618326T2 DE69618326T DE69618326T DE69618326T2 DE 69618326 T2 DE69618326 T2 DE 69618326T2 DE 69618326 T DE69618326 T DE 69618326T DE 69618326 T DE69618326 T DE 69618326T DE 69618326 T2 DE69618326 T2 DE 69618326T2
- Authority
- DE
- Germany
- Prior art keywords
- devices
- emitters
- producing
- metal foil
- field emission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30403—Field emission cathodes characterised by the emitter shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30457—Diamond
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/555,594 US5648699A (en) | 1995-11-09 | 1995-11-09 | Field emission devices employing improved emitters on metal foil and methods for making such devices |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69618326D1 DE69618326D1 (de) | 2002-02-07 |
DE69618326T2 true DE69618326T2 (de) | 2002-08-08 |
Family
ID=24217871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69618326T Expired - Fee Related DE69618326T2 (de) | 1995-11-09 | 1996-10-29 | Feldemissionsvorrichtungen mit Emittern auf Metallfolie und Verfahren zur Herstellung dieser Vorrichtungen |
Country Status (4)
Country | Link |
---|---|
US (1) | US5648699A (de) |
EP (1) | EP0773574B1 (de) |
JP (1) | JP3455380B2 (de) |
DE (1) | DE69618326T2 (de) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5975975A (en) * | 1994-09-16 | 1999-11-02 | Micron Technology, Inc. | Apparatus and method for stabilization of threshold voltage in field emission displays |
US6417605B1 (en) * | 1994-09-16 | 2002-07-09 | Micron Technology, Inc. | Method of preventing junction leakage in field emission devices |
TW289864B (de) | 1994-09-16 | 1996-11-01 | Micron Display Tech Inc | |
US5637950A (en) * | 1994-10-31 | 1997-06-10 | Lucent Technologies Inc. | Field emission devices employing enhanced diamond field emitters |
US5796211A (en) * | 1994-12-22 | 1998-08-18 | Lucent Technologies, Inc. | Microwave vacuum tube devices employing electron sources comprising activated ultrafine diamonds |
KR100471334B1 (ko) * | 1996-10-17 | 2005-03-07 | 이 아이 듀폰 디 네모아 앤드 캄파니 | 섬유질 전계 방출기의 접속 방법 및 이에 의해 제조된 전계 방출 캐소드 |
GB9626221D0 (en) * | 1996-12-18 | 1997-02-05 | Smiths Industries Plc | Diamond surfaces |
US6525461B1 (en) * | 1997-10-30 | 2003-02-25 | Canon Kabushiki Kaisha | Narrow titanium-containing wire, process for producing narrow titanium-containing wire, structure, and electron-emitting device |
US6040939A (en) * | 1998-06-16 | 2000-03-21 | Turkiye Sise Ve Cam Fabrikalari A.S. | Anti-solar and low emissivity functioning multi-layer coatings on transparent substrates |
US6218293B1 (en) * | 1998-11-13 | 2001-04-17 | Micron Technology, Inc. | Batch processing for semiconductor wafers to form aluminum nitride and titanium aluminum nitride |
US6290564B1 (en) | 1999-09-30 | 2001-09-18 | Motorola, Inc. | Method for fabricating an electron-emissive film |
US6469436B1 (en) * | 2000-01-14 | 2002-10-22 | Micron Technology, Inc. | Radiation shielding for field emitters |
KR100436297B1 (ko) * | 2000-03-14 | 2004-06-18 | 주성엔지니어링(주) | 반도체 소자 제조용 플라즈마 스프레이 장치 및 이를이용한 반도체 소자 제조방법 |
JP2001266737A (ja) * | 2000-03-24 | 2001-09-28 | Toshiba Corp | 電子源装置、その製造方法、および電子源装置を備えた平面表示装置 |
US6387717B1 (en) * | 2000-04-26 | 2002-05-14 | Micron Technology, Inc. | Field emission tips and methods for fabricating the same |
US7227924B2 (en) * | 2000-10-06 | 2007-06-05 | The University Of North Carolina At Chapel Hill | Computed tomography scanning system and method using a field emission x-ray source |
US6876724B2 (en) * | 2000-10-06 | 2005-04-05 | The University Of North Carolina - Chapel Hill | Large-area individually addressable multi-beam x-ray system and method of forming same |
US7085351B2 (en) * | 2000-10-06 | 2006-08-01 | University Of North Carolina At Chapel Hill | Method and apparatus for controlling electron beam current |
US7082182B2 (en) * | 2000-10-06 | 2006-07-25 | The University Of North Carolina At Chapel Hill | Computed tomography system for imaging of human and small animal |
US6553096B1 (en) | 2000-10-06 | 2003-04-22 | The University Of North Carolina Chapel Hill | X-ray generating mechanism using electron field emission cathode |
US6885022B2 (en) * | 2000-12-08 | 2005-04-26 | Si Diamond Technology, Inc. | Low work function material |
US20050200261A1 (en) * | 2000-12-08 | 2005-09-15 | Nano-Proprietary, Inc. | Low work function cathode |
KR100571805B1 (ko) * | 2003-01-29 | 2006-04-17 | 삼성에스디아이 주식회사 | 전계방출소자와 이를 적용한 표시소자 및 그 제조방법 |
JP4170172B2 (ja) * | 2003-08-21 | 2008-10-22 | ダイヤライトジャパン株式会社 | 照明装置 |
JP2005174856A (ja) * | 2003-12-15 | 2005-06-30 | Toshiba Corp | シール材、およびシール材を用いた画像表示装置 |
US8155262B2 (en) * | 2005-04-25 | 2012-04-10 | The University Of North Carolina At Chapel Hill | Methods, systems, and computer program products for multiplexing computed tomography |
US8189893B2 (en) * | 2006-05-19 | 2012-05-29 | The University Of North Carolina At Chapel Hill | Methods, systems, and computer program products for binary multiplexing x-ray radiography |
CN103948395A (zh) * | 2007-07-19 | 2014-07-30 | 北卡罗来纳大学查珀尔希尔分校 | 固定 x 射线数字化断层合成或断层摄影系统和相关方法 |
US8600003B2 (en) * | 2009-01-16 | 2013-12-03 | The University Of North Carolina At Chapel Hill | Compact microbeam radiation therapy systems and methods for cancer treatment and research |
JP5647259B2 (ja) | 2009-11-18 | 2014-12-24 | エージーシー グラス ユーロップ | 断熱板ガラスの製造方法 |
US8358739B2 (en) | 2010-09-03 | 2013-01-22 | The University Of North Carolina At Chapel Hill | Systems and methods for temporal multiplexing X-ray imaging |
US9782136B2 (en) | 2014-06-17 | 2017-10-10 | The University Of North Carolina At Chapel Hill | Intraoral tomosynthesis systems, methods, and computer readable media for dental imaging |
US10980494B2 (en) | 2014-10-20 | 2021-04-20 | The University Of North Carolina At Chapel Hill | Systems and related methods for stationary digital chest tomosynthesis (s-DCT) imaging |
US10835199B2 (en) | 2016-02-01 | 2020-11-17 | The University Of North Carolina At Chapel Hill | Optical geometry calibration devices, systems, and related methods for three dimensional x-ray imaging |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4307507A (en) * | 1980-09-10 | 1981-12-29 | The United States Of America As Represented By The Secretary Of The Navy | Method of manufacturing a field-emission cathode structure |
FR2623013A1 (fr) * | 1987-11-06 | 1989-05-12 | Commissariat Energie Atomique | Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source |
US5114770A (en) * | 1989-06-28 | 1992-05-19 | Canon Kabushiki Kaisha | Method for continuously forming functional deposited films with a large area by a microwave plasma cvd method |
US5214347A (en) * | 1990-06-08 | 1993-05-25 | The United States Of America As Represented By The Secretary Of The Navy | Layered thin-edged field-emitter device |
US5129850A (en) * | 1991-08-20 | 1992-07-14 | Motorola, Inc. | Method of making a molded field emission electron emitter employing a diamond coating |
US5138237A (en) * | 1991-08-20 | 1992-08-11 | Motorola, Inc. | Field emission electron device employing a modulatable diamond semiconductor emitter |
US5290610A (en) * | 1992-02-13 | 1994-03-01 | Motorola, Inc. | Forming a diamond material layer on an electron emitter using hydrocarbon reactant gases ionized by emitted electrons |
US5283500A (en) * | 1992-05-28 | 1994-02-01 | At&T Bell Laboratories | Flat panel field emission display apparatus |
US5396150A (en) * | 1993-07-01 | 1995-03-07 | Industrial Technology Research Institute | Single tip redundancy method and resulting flat panel display |
EP0675519A1 (de) * | 1994-03-30 | 1995-10-04 | AT&T Corp. | Vorrichtung mit Feldeffekt-Emittern |
US5439753A (en) * | 1994-10-03 | 1995-08-08 | Motorola, Inc. | Electron emissive film |
-
1995
- 1995-11-09 US US08/555,594 patent/US5648699A/en not_active Expired - Lifetime
-
1996
- 1996-10-29 EP EP96307791A patent/EP0773574B1/de not_active Expired - Lifetime
- 1996-10-29 DE DE69618326T patent/DE69618326T2/de not_active Expired - Fee Related
- 1996-11-08 JP JP29558596A patent/JP3455380B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0773574A1 (de) | 1997-05-14 |
JP3455380B2 (ja) | 2003-10-14 |
US5648699A (en) | 1997-07-15 |
DE69618326D1 (de) | 2002-02-07 |
JPH09311644A (ja) | 1997-12-02 |
EP0773574B1 (de) | 2002-01-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |