DE69616162T2 - Verfahren und Vorrichtung für kolorimetrische Dickenmessung - Google Patents

Verfahren und Vorrichtung für kolorimetrische Dickenmessung

Info

Publication number
DE69616162T2
DE69616162T2 DE69616162T DE69616162T DE69616162T2 DE 69616162 T2 DE69616162 T2 DE 69616162T2 DE 69616162 T DE69616162 T DE 69616162T DE 69616162 T DE69616162 T DE 69616162T DE 69616162 T2 DE69616162 T2 DE 69616162T2
Authority
DE
Germany
Prior art keywords
colorimetric
thickness measurement
measurement
thickness
colorimetric thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69616162T
Other languages
English (en)
Other versions
DE69616162D1 (de
Inventor
Hiroki Nakano
Takeshi Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69616162D1 publication Critical patent/DE69616162D1/de
Publication of DE69616162T2 publication Critical patent/DE69616162T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N17/00—Diagnosis, testing or measuring for television systems or their details
    • H04N17/02—Diagnosis, testing or measuring for television systems or their details for colour television signals

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Liquid Crystal (AREA)
DE69616162T 1995-06-16 1996-06-10 Verfahren und Vorrichtung für kolorimetrische Dickenmessung Expired - Fee Related DE69616162T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15021495A JP2986072B2 (ja) 1995-06-16 1995-06-16 膜厚の検査方法

Publications (2)

Publication Number Publication Date
DE69616162D1 DE69616162D1 (de) 2001-11-29
DE69616162T2 true DE69616162T2 (de) 2002-06-20

Family

ID=15492036

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69616162T Expired - Fee Related DE69616162T2 (de) 1995-06-16 1996-06-10 Verfahren und Vorrichtung für kolorimetrische Dickenmessung

Country Status (5)

Country Link
US (1) US5773173A (de)
EP (1) EP0749000B1 (de)
JP (1) JP2986072B2 (de)
DE (1) DE69616162T2 (de)
TW (1) TW294777B (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000193814A (ja) * 1998-12-28 2000-07-14 Canon Inc カラ―フィルタの検査方法、検査装置、カラ―フィルタの製造方法
JP2003294578A (ja) * 2002-03-29 2003-10-15 Dainippon Screen Mfg Co Ltd カラーフィルタ検査装置
JP4484531B2 (ja) * 2004-01-21 2010-06-16 大日本印刷株式会社 膜厚良否検査方法及び装置
US7643141B2 (en) * 2004-07-30 2010-01-05 Sharp Kabushiki Kaisha Method and apparatus for inspecting color filter
JP2007003364A (ja) * 2005-06-24 2007-01-11 Internatl Business Mach Corp <Ibm> カラーフィルタの検査装置、および検査方法
JP2007059250A (ja) * 2005-08-25 2007-03-08 Rohm Co Ltd 有機ｅｌ素子
CN103727888B (zh) * 2013-12-27 2016-06-15 深圳市华星光电技术有限公司 彩色滤色片膜厚测量方法及装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56129845A (en) * 1980-03-14 1981-10-12 Matsushita Electronics Corp Inspecting method for color filter
JPS56129844A (en) * 1980-03-14 1981-10-12 Matsushita Electronics Corp Method and apparatus for inspecting color filter
JPS57179607A (en) * 1981-04-30 1982-11-05 Fuji Electric Co Ltd Thickness gage for infrared ray film
FI69370C (fi) * 1981-08-18 1986-01-10 Topwave Instr Oy Foerfarande foer maetning av egenskaperna hos ett plastskikt med hjaelp av infraroed straolning
FR2531775A1 (fr) * 1982-08-12 1984-02-17 Cit Alcatel Dispositif de mesure de l'epaisseur d'une couche deposee sur un substrat transparent
JPS6222006A (ja) * 1985-07-23 1987-01-30 Mitsubishi Electric Corp 膜厚測定装置
JP2718510B2 (ja) * 1988-06-13 1998-02-25 大日本印刷株式会社 着色周期性パターンの検査方法
JPH05181125A (ja) * 1991-12-27 1993-07-23 Sony Corp 画像検査装置
JP2937004B2 (ja) * 1994-04-11 1999-08-23 東レ株式会社 薄膜の膜厚測定方法および測定装置ならびに光学フィルターの製造方法ならびに高分子フィルムの製造方法
US5619330A (en) * 1995-12-22 1997-04-08 Thomson Consumer Electronics, Inc. Method and apparatus for determining thickness of an OPC layer on a CRT faceplate panel

Also Published As

Publication number Publication date
DE69616162D1 (de) 2001-11-29
EP0749000A3 (de) 1998-06-17
EP0749000B1 (de) 2001-10-24
JP2986072B2 (ja) 1999-12-06
TW294777B (de) 1997-01-01
US5773173A (en) 1998-06-30
JPH095037A (ja) 1997-01-10
EP0749000A2 (de) 1996-12-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee