DE69228537T2 - Methode und vorrichtung zur oberflächenanalyse - Google Patents

Methode und vorrichtung zur oberflächenanalyse

Info

Publication number
DE69228537T2
DE69228537T2 DE1992628537 DE69228537T DE69228537T2 DE 69228537 T2 DE69228537 T2 DE 69228537T2 DE 1992628537 DE1992628537 DE 1992628537 DE 69228537 T DE69228537 T DE 69228537T DE 69228537 T2 DE69228537 T2 DE 69228537T2
Authority
DE
Germany
Prior art keywords
surface analysis
analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1992628537
Other languages
English (en)
Other versions
DE69228537D1 (de
Inventor
Kiyohide Imaeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai Rika Co Ltd
Original Assignee
Tokai Rika Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai Rika Co Ltd filed Critical Tokai Rika Co Ltd
Application granted granted Critical
Publication of DE69228537D1 publication Critical patent/DE69228537D1/de
Publication of DE69228537T2 publication Critical patent/DE69228537T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity
    • G01N21/5907—Densitometers
    • G01N21/5911—Densitometers of the scanning type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Spectrometry And Color Measurement (AREA)
DE1992628537 1991-03-19 1992-03-19 Methode und vorrichtung zur oberflächenanalyse Expired - Fee Related DE69228537T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5475791A JPH1096691A (ja) 1991-03-19 1991-03-19 面分析方法及び面分析装置
PCT/JP1992/000335 WO1992016827A1 (en) 1991-03-19 1992-03-19 Method and device for analyzing area

Publications (2)

Publication Number Publication Date
DE69228537D1 DE69228537D1 (de) 1999-04-08
DE69228537T2 true DE69228537T2 (de) 1999-07-08

Family

ID=12979646

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1992628537 Expired - Fee Related DE69228537T2 (de) 1991-03-19 1992-03-19 Methode und vorrichtung zur oberflächenanalyse

Country Status (5)

Country Link
US (1) US5418367A (de)
EP (1) EP0577835B1 (de)
JP (1) JPH1096691A (de)
DE (1) DE69228537T2 (de)
WO (1) WO1992016827A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5936233A (en) * 1998-02-26 1999-08-10 The Curators Of The University Of Missouri Buried object detection and neutralization system
US6389881B1 (en) 1999-05-27 2002-05-21 Acoustic Systems, Inc. Method and apparatus for pattern match filtering for real time acoustic pipeline leak detection and location
US6673554B1 (en) * 1999-06-14 2004-01-06 Trellie Bioinformatics, Inc. Protein localization assays for toxicity and antidotes thereto
US6734962B2 (en) * 2000-10-13 2004-05-11 Chemimage Corporation Near infrared chemical imaging microscope
IL158949A0 (en) * 2001-05-24 2004-05-12 M E S Medical Electronic Syste Semen analysis
JP2006119076A (ja) * 2004-10-25 2006-05-11 Jasco Corp マッピングデータ解析装置及び方法
JP4637643B2 (ja) * 2005-05-18 2011-02-23 日本分光株式会社 分光分析装置
JP4856436B2 (ja) * 2006-02-08 2012-01-18 日本分光株式会社 マッピングデータ表示方法、プログラム、および装置
JP4709129B2 (ja) * 2006-12-19 2011-06-22 株式会社堀場製作所 試料分析装置
JP5900644B2 (ja) * 2012-11-15 2016-04-06 株式会社島津製作所 分析対象領域設定装置
JP6324201B2 (ja) 2013-06-20 2018-05-16 キヤノン株式会社 分光データ処理装置、及び分光データ処理方法
CN109116391B (zh) * 2018-07-23 2020-06-23 武汉大学 一种基于改进正交分解的区域划分方法
US10775530B1 (en) * 2019-08-29 2020-09-15 Peter Wilk Apparatus and method of detecting a mineral in the ground
CN111445964B (zh) * 2020-03-27 2023-05-12 合肥金星智控科技股份有限公司 成分分析结果的可视化方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5352198A (en) * 1976-10-22 1978-05-12 Hitachi Ltd Picture input apparatus of netlike red corpuscle
JPS6147522A (ja) * 1984-08-14 1986-03-08 Tech Res & Dev Inst Of Japan Def Agency 映像装置
JPH087331B2 (ja) * 1988-03-12 1996-01-29 株式会社日立製作所 赤外吸収スペクトル測定顕微鏡装置

Also Published As

Publication number Publication date
EP0577835A4 (de) 1994-01-26
WO1992016827A1 (en) 1992-10-01
EP0577835B1 (de) 1999-03-03
DE69228537D1 (de) 1999-04-08
EP0577835A1 (de) 1994-01-12
JPH1096691A (ja) 1998-04-14
US5418367A (en) 1995-05-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee