DE68925563D1 - Methode und Vorrichtung zur Positionsreglung - Google Patents

Methode und Vorrichtung zur Positionsreglung

Info

Publication number
DE68925563D1
DE68925563D1 DE68925563T DE68925563T DE68925563D1 DE 68925563 D1 DE68925563 D1 DE 68925563D1 DE 68925563 T DE68925563 T DE 68925563T DE 68925563 T DE68925563 T DE 68925563T DE 68925563 D1 DE68925563 D1 DE 68925563D1
Authority
DE
Germany
Prior art keywords
position control
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68925563T
Other languages
English (en)
Other versions
DE68925563T2 (de
Inventor
Shigeru Futami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Research Development Corp of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp, Research Development Corp of Japan filed Critical Yaskawa Electric Corp
Application granted granted Critical
Publication of DE68925563D1 publication Critical patent/DE68925563D1/de
Publication of DE68925563T2 publication Critical patent/DE68925563T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/21—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device
    • G05B19/23—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control
    • G05B19/231—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control the positional error is used to control continuously the servomotor according to its magnitude
    • G05B19/237—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control the positional error is used to control continuously the servomotor according to its magnitude with a combination of feedback covered by G05B19/232 - G05B19/235
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37154—Encoder and absolute position counter
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37275—Laser, interferometer
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41122—Mechanical vibrations in servo, antihunt also safety, stray pulses, jitter
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41251—Servo with spring, resilient, elastic element, twist
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41425—Feedforward of acceleration

Landscapes

  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position Or Direction (AREA)
DE68925563T 1988-10-21 1989-10-20 Methode und Vorrichtung zur Positionsreglung Expired - Fee Related DE68925563T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63266627A JPH07120216B2 (ja) 1988-10-21 1988-10-21 位置制御方法

Publications (2)

Publication Number Publication Date
DE68925563D1 true DE68925563D1 (de) 1996-03-14
DE68925563T2 DE68925563T2 (de) 1996-06-05

Family

ID=17433449

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68925563T Expired - Fee Related DE68925563T2 (de) 1988-10-21 1989-10-20 Methode und Vorrichtung zur Positionsreglung

Country Status (4)

Country Link
US (1) US5030901A (de)
EP (1) EP0369190B1 (de)
JP (1) JPH07120216B2 (de)
DE (1) DE68925563T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07122830B2 (ja) * 1989-05-31 1995-12-25 新技術事業団 超精密位置決め装置
US5367237A (en) * 1992-06-15 1994-11-22 Honeywell Inc. Electromechanical actuator controller
JPH07111215B2 (ja) * 1992-08-26 1995-11-29 鹿島建設株式会社 除振装置
JP3265670B2 (ja) * 1993-01-21 2002-03-11 株式会社ニコン ステージ装置、ステージ駆動方法、及び露光装置
US5635808A (en) * 1995-08-30 1997-06-03 Utica Enterprises, Inc. Method and system for controlling the motion of a rotary drive of a rotary index table assembly
US6016039A (en) * 1997-12-05 2000-01-18 Systems, Machines, Automation Components Corporation Control processes for linear voice coil actuator
AT500362B1 (de) * 2002-06-27 2007-01-15 Blum Gmbh Julius Anordnung mit einem bewegbaren möbelteil und mit einer antriebseinheit
JP2006155180A (ja) * 2004-11-29 2006-06-15 Fanuc Ltd 駆動制御装置
AT502203B1 (de) * 2005-07-20 2010-07-15 Blum Gmbh Julius Antrieb für ein bewegbares möbelteil
AT503248B1 (de) * 2006-03-03 2011-07-15 Blum Gmbh Julius Anordnung mit elektrischen antriebseinheiten für schubladen
US8610332B2 (en) * 2008-10-09 2013-12-17 Newcastle Innovation Limited Positioning system and method
JP6017595B2 (ja) * 2015-01-16 2016-11-02 ファナック株式会社 振動を抑制するモータ制御装置
CN104932554B (zh) * 2015-06-04 2017-12-05 北京理工大学 一种可变负刚度的半主动控制型联轴器
JP2017072219A (ja) * 2015-10-08 2017-04-13 キヤノン株式会社 振動制御装置、リソグラフィ装置、および物品の製造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4139811A (en) * 1976-10-26 1979-02-13 Xerox Corporation Method and means for increasing the stiffness of limited frequency servo systems
US4200827A (en) * 1977-06-29 1980-04-29 International Business Machines Corporation Positioning system employing feedforward and feedback control
US4221995A (en) * 1978-07-24 1980-09-09 The United States Of America As Represented By The United States Department Of Energy Linear motor drive system for continuous-path closed-loop position control of an object
US4338659A (en) * 1978-12-15 1982-07-06 Fujitsu Fanuc Ltd. Position control system for a closed loop type numerical-controlled machine tool
JPS5847043B2 (ja) * 1979-02-07 1983-10-20 株式会社日立製作所 位置制御方式
US4331910A (en) * 1980-02-04 1982-05-25 Fujitsu Fanuc Limited Positioning control system
US4345194A (en) * 1980-12-01 1982-08-17 The United States Of America As Represented By The United States Department Of Energy Control system to reduce the effects of friction in drive trains of continuous-path-positioning systems
US4510428A (en) * 1983-03-25 1985-04-09 Unimation, Inc. Control system for manipulator apparatus with initializing stabilization and inertia scaling
JPS6159509A (ja) * 1984-08-31 1986-03-27 Hitachi Ltd 位置決め制御方式
JPS61273610A (ja) * 1985-05-30 1986-12-03 Matsushita Electric Ind Co Ltd 産業用ロボツト
JPS6257008A (ja) * 1985-09-05 1987-03-12 Fanuc Ltd 位置決め制御方式
DE3532931C3 (de) * 1985-09-14 1993-09-30 Rexroth Mannesmann Gmbh Hydraulische Antriebsvorrichtung
JPS62126883A (ja) * 1985-11-27 1987-06-09 Fanuc Ltd 速度制御方式
JP2535334B2 (ja) * 1986-10-29 1996-09-18 フアナツク株式会社 デイジタル負帰還制御システム
US4843293A (en) * 1987-02-02 1989-06-27 Research Development Corporation Apparatus for controlling servo system employing piezo-electric actuator

Also Published As

Publication number Publication date
EP0369190B1 (de) 1996-01-31
JPH02113310A (ja) 1990-04-25
DE68925563T2 (de) 1996-06-05
EP0369190A1 (de) 1990-05-23
US5030901A (en) 1991-07-09
JPH07120216B2 (ja) 1995-12-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee