DE69604623D1 - Positiv arbeitende Photoresistzusammensetzung - Google Patents
Positiv arbeitende PhotoresistzusammensetzungInfo
- Publication number
- DE69604623D1 DE69604623D1 DE69604623T DE69604623T DE69604623D1 DE 69604623 D1 DE69604623 D1 DE 69604623D1 DE 69604623 T DE69604623 T DE 69604623T DE 69604623 T DE69604623 T DE 69604623T DE 69604623 D1 DE69604623 D1 DE 69604623D1
- Authority
- DE
- Germany
- Prior art keywords
- photoresist composition
- positive working
- working photoresist
- positive
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
- G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17765595 | 1995-07-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69604623D1 true DE69604623D1 (de) | 1999-11-18 |
DE69604623T2 DE69604623T2 (de) | 2000-01-27 |
Family
ID=16034791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69604623T Expired - Lifetime DE69604623T2 (de) | 1995-07-13 | 1996-07-12 | Positiv arbeitende Photoresistzusammensetzung |
Country Status (3)
Country | Link |
---|---|
US (1) | US5709977A (de) |
EP (1) | EP0753795B1 (de) |
DE (1) | DE69604623T2 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100234532B1 (ko) * | 1996-09-21 | 1999-12-15 | 윤종용 | 반도체 제조공정의 포토레지스트 세정용 시너 조성물 및 그를 이용한 반도체장치의 제조방법 |
JP3594788B2 (ja) * | 1997-06-16 | 2004-12-02 | 日東電工株式会社 | 印刷シート |
US6127087A (en) * | 1997-06-18 | 2000-10-03 | Tokyo Ohka Kogyo Co., Ltd. | Positive photoresist compositions and multilayer resist materials using same |
KR100265766B1 (ko) * | 1997-09-04 | 2000-09-15 | 윤종용 | 반도체장치 제조용 웨이퍼의 리워크방법 및 반도체장치의 제조방법 |
US6506831B2 (en) | 1998-12-20 | 2003-01-14 | Honeywell International Inc. | Novolac polymer planarization films with high temperature stability |
JP2001033957A (ja) * | 1999-07-19 | 2001-02-09 | Tokyo Ohka Kogyo Co Ltd | ポジ型ホトレジスト組成物 |
FR2813886B1 (fr) * | 2000-09-08 | 2005-04-15 | Ceca Sa | Resines novolaques, leur procede de preparation et leurs utilisations |
US20050014093A1 (en) * | 2003-07-17 | 2005-01-20 | Fuji Photo Film Co., Ltd. | Planographic printing plate precursor |
KR20060090519A (ko) * | 2005-02-07 | 2006-08-11 | 삼성전자주식회사 | 포토레지스트 조성물, 상기 포토레지스트 조성물을 이용한층상 부재 형성 방법 및 박막 트랜지스터 표시판의 제조방법 |
KR101324645B1 (ko) * | 2006-05-08 | 2013-11-01 | 주식회사 동진쎄미켐 | 포토레지스트 조성물 |
KR20080070573A (ko) * | 2007-01-26 | 2008-07-30 | 롬 앤드 하스 일렉트로닉 머트어리얼즈, 엘.엘.씨. | 노볼락 수지 블렌드를 포함하는 포토레지스트 |
KR101392291B1 (ko) * | 2007-04-13 | 2014-05-07 | 주식회사 동진쎄미켐 | 포토레지스트 조성물 및 이를 이용한 박막트랜지스터기판의 제조방법 |
JP5035492B2 (ja) * | 2010-11-10 | 2012-09-26 | Dic株式会社 | ポジ型フォトレジスト組成物 |
EP2653922B1 (de) * | 2011-04-12 | 2017-05-24 | DIC Corporation | Positive fotolackzusammensetzung, beschichtungsfilm daraus und novolac-phenolharz |
CN107001550B (zh) * | 2014-11-25 | 2019-04-02 | Dic株式会社 | 酚醛清漆型酚醛树脂、其制造方法、感光性组合物、抗蚀材料、及涂膜 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61223735A (ja) * | 1985-03-28 | 1986-10-04 | Japan Synthetic Rubber Co Ltd | ポジ型感放射線樹脂組成物 |
US5266440A (en) * | 1986-12-23 | 1993-11-30 | Shipley Company Inc. | Photoresist composition with aromatic novolak binder having a weight-average molecular weight in excess of 1500 Daltons |
NO891063L (no) * | 1988-03-31 | 1989-10-02 | Thiokol Morton Inc | Novolakharpikser av blandede aldehyder og positive fotoresistmaterialer fremstilt fra slike harpikser. |
JPH02300751A (ja) * | 1989-05-16 | 1990-12-12 | Mitsubishi Petrochem Co Ltd | ポジ型フォトレジスト組成物 |
US5208138A (en) * | 1990-02-05 | 1993-05-04 | Morton International, Inc. | High contrast high thermal stability positive photoresists having novolak resins of lowered hydroxyl content |
US5302490A (en) * | 1991-10-21 | 1994-04-12 | Shipley Company Inc. | Radiation sensitive compositions comprising blends of an aliphatic novolak resin and an aromatic novolak resin |
JP3182823B2 (ja) * | 1991-12-27 | 2001-07-03 | 住友化学工業株式会社 | ポジ型レジスト組成物 |
JP3424341B2 (ja) * | 1994-04-11 | 2003-07-07 | 住友化学工業株式会社 | 感光性樹脂組成物 |
-
1996
- 1996-07-09 US US08/677,143 patent/US5709977A/en not_active Expired - Fee Related
- 1996-07-12 EP EP96111286A patent/EP0753795B1/de not_active Expired - Lifetime
- 1996-07-12 DE DE69604623T patent/DE69604623T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69604623T2 (de) | 2000-01-27 |
EP0753795A1 (de) | 1997-01-15 |
EP0753795B1 (de) | 1999-10-13 |
US5709977A (en) | 1998-01-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: FUJIFILM CORP., TOKIO/TOKYO, JP |