DE69604135T2 - Quecksilberlampe vom Kurzbogentyp und Betriebsverfahren davon - Google Patents

Quecksilberlampe vom Kurzbogentyp und Betriebsverfahren davon

Info

Publication number
DE69604135T2
DE69604135T2 DE69604135T DE69604135T DE69604135T2 DE 69604135 T2 DE69604135 T2 DE 69604135T2 DE 69604135 T DE69604135 T DE 69604135T DE 69604135 T DE69604135 T DE 69604135T DE 69604135 T2 DE69604135 T2 DE 69604135T2
Authority
DE
Germany
Prior art keywords
mercury lamp
arc type
short arc
operating method
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69604135T
Other languages
English (en)
Other versions
DE69604135D1 (de
Inventor
Shinkichi Morimoto
Kiyotada Nakamura
Toshiyuki Shima
Osamu Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Application granted granted Critical
Publication of DE69604135D1 publication Critical patent/DE69604135D1/de
Publication of DE69604135T2 publication Critical patent/DE69604135T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Discharge Lamp (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
DE69604135T 1995-06-26 1996-06-21 Quecksilberlampe vom Kurzbogentyp und Betriebsverfahren davon Expired - Lifetime DE69604135T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18058195A JP3158972B2 (ja) 1995-06-26 1995-06-26 ショートアーク型水銀ランプ及びその点灯方法

Publications (2)

Publication Number Publication Date
DE69604135D1 DE69604135D1 (de) 1999-10-14
DE69604135T2 true DE69604135T2 (de) 2000-01-05

Family

ID=16085772

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69604135T Expired - Lifetime DE69604135T2 (de) 1995-06-26 1996-06-21 Quecksilberlampe vom Kurzbogentyp und Betriebsverfahren davon

Country Status (7)

Country Link
US (1) US5818169A (de)
EP (1) EP0751548B1 (de)
JP (1) JP3158972B2 (de)
KR (1) KR100389999B1 (de)
AT (1) ATE184423T1 (de)
DE (1) DE69604135T2 (de)
TW (1) TW444229B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3298453B2 (ja) * 1997-03-18 2002-07-02 ウシオ電機株式会社 ショートアーク型放電ランプ
JP3558597B2 (ja) * 1999-02-05 2004-08-25 松下電器産業株式会社 高圧水銀蒸気放電ランプおよびランプユニット
DE20005764U1 (de) 2000-03-30 2000-06-08 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Kurzbogenlampe
JP3669292B2 (ja) * 2001-06-14 2005-07-06 ウシオ電機株式会社 ショートアーク型放電ランプ
JP4042605B2 (ja) * 2003-03-31 2008-02-06 ウシオ電機株式会社 キセノンランプ
CN1985346A (zh) * 2004-07-09 2007-06-20 皇家飞利浦电子股份有限公司 高强度放电灯的电极
JP5322217B2 (ja) * 2008-12-27 2013-10-23 ウシオ電機株式会社 光源装置
JP5363174B2 (ja) * 2009-04-10 2013-12-11 株式会社ユメックス ショートアーク型放電灯
JP2016207482A (ja) * 2015-04-23 2016-12-08 岩崎電気株式会社 ショートアーク型放電ランプ
JP2017027765A (ja) 2015-07-22 2017-02-02 セイコーエプソン株式会社 放電灯、放電灯の製造方法、光源装置、およびプロジェクター
JP2019029272A (ja) * 2017-08-02 2019-02-21 ウシオ電機株式会社 レーザ駆動ランプ

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE475339A (de) * 1946-06-17
US3517248A (en) * 1967-10-23 1970-06-23 Us Navy Pressure control of electrode position in gas tube
US3621322A (en) * 1968-09-12 1971-11-16 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh High-pressure compact arc lamp with electrodes containing tantalum carbide
US3543076A (en) * 1968-10-31 1970-11-24 Boeing Co Aeorodynamic arc lamp electrodes
JPS592145B2 (ja) * 1979-10-01 1984-01-17 株式会社東芝 短弧光放電灯
JPH0773001B2 (ja) * 1985-10-18 1995-08-02 東芝ライテック株式会社 投光光源装置
JPH073784B2 (ja) * 1986-10-23 1995-01-18 東芝ライテック株式会社 シヨ−トア−ク放電灯
JP2765836B2 (ja) * 1987-04-13 1998-06-18 株式会社日立製作所 露光用光源
KR920000942B1 (ko) * 1988-06-23 1992-01-31 도오시바 라이텍크 가부시기가이샤 쇼트아크 방전등
JPH02304857A (ja) * 1989-05-19 1990-12-18 Ushio Inc ショートアーク型高圧水銀蒸気ランプ
JPH03274648A (ja) * 1990-03-23 1991-12-05 Ushio Inc ショートアーク型水銀蒸気放電灯
US5258691A (en) * 1990-11-14 1993-11-02 General Electric Company Metal halide lamp having improved operation acoustic frequencies
US5083059A (en) * 1990-12-31 1992-01-21 Welch Allyn, Inc. Electrode for metal halide discharge lamp
JP2732458B2 (ja) * 1991-05-31 1998-03-30 ウシオ電機株式会社 ショートアーク型高圧水銀蒸気放電灯
US5497049A (en) * 1992-06-23 1996-03-05 U.S. Philips Corporation High pressure mercury discharge lamp
US5539273A (en) * 1994-06-29 1996-07-23 Welch Allyn, Inc. Etched electrode for metal halide discharge lamps
JP3077538B2 (ja) * 1994-11-29 2000-08-14 ウシオ電機株式会社 ショートアーク型水銀ランプ

Also Published As

Publication number Publication date
KR100389999B1 (ko) 2003-10-04
KR970003386A (ko) 1997-01-28
TW444229B (en) 2001-07-01
US5818169A (en) 1998-10-06
JP3158972B2 (ja) 2001-04-23
EP0751548A1 (de) 1997-01-02
ATE184423T1 (de) 1999-09-15
EP0751548B1 (de) 1999-09-08
JPH0917387A (ja) 1997-01-17
DE69604135D1 (de) 1999-10-14

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