DE69531926T2 - Mikrospiegel-Vorrichtung mit Herstellungsfehlern sowie Verfahren zu ihrem Betrieb - Google Patents

Mikrospiegel-Vorrichtung mit Herstellungsfehlern sowie Verfahren zu ihrem Betrieb Download PDF

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Publication number
DE69531926T2
DE69531926T2 DE69531926T DE69531926T DE69531926T2 DE 69531926 T2 DE69531926 T2 DE 69531926T2 DE 69531926 T DE69531926 T DE 69531926T DE 69531926 T DE69531926 T DE 69531926T DE 69531926 T2 DE69531926 T2 DE 69531926T2
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Germany
Prior art keywords
pair
memory cell
pixel
electrical connections
assigned
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Expired - Lifetime
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DE69531926T
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English (en)
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DE69531926D1 (de
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Rohit L. Bhuva
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Texas Instruments Inc
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Texas Instruments Inc
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Expired - Lifetime legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Video Image Reproduction Devices For Color Tv Systems (AREA)
  • Liquid Crystal (AREA)
DE69531926T 1994-11-30 1995-11-30 Mikrospiegel-Vorrichtung mit Herstellungsfehlern sowie Verfahren zu ihrem Betrieb Expired - Lifetime DE69531926T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US346812 1982-02-08
US08/346,812 US5610624A (en) 1994-11-30 1994-11-30 Spatial light modulator with reduced possibility of an on state defect

Publications (2)

Publication Number Publication Date
DE69531926D1 DE69531926D1 (de) 2003-11-20
DE69531926T2 true DE69531926T2 (de) 2004-05-19

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Family Applications (1)

Application Number Title Priority Date Filing Date
DE69531926T Expired - Lifetime DE69531926T2 (de) 1994-11-30 1995-11-30 Mikrospiegel-Vorrichtung mit Herstellungsfehlern sowie Verfahren zu ihrem Betrieb

Country Status (6)

Country Link
US (1) US5610624A (https=)
EP (1) EP0715199B1 (https=)
JP (1) JPH08227044A (https=)
KR (1) KR960018639A (https=)
DE (1) DE69531926T2 (https=)
TW (1) TW303447B (https=)

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US5610624A (en) 1997-03-11
KR960018639A (ko) 1996-06-17
EP0715199A3 (en) 1998-06-17
DE69531926D1 (de) 2003-11-20
EP0715199A2 (en) 1996-06-05
EP0715199B1 (en) 2003-10-15

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