JPH08227044A - オン状態における欠陥の可能性を減少させた空間光変調器 - Google Patents

オン状態における欠陥の可能性を減少させた空間光変調器

Info

Publication number
JPH08227044A
JPH08227044A JP7311114A JP31111495A JPH08227044A JP H08227044 A JPH08227044 A JP H08227044A JP 7311114 A JP7311114 A JP 7311114A JP 31111495 A JP31111495 A JP 31111495A JP H08227044 A JPH08227044 A JP H08227044A
Authority
JP
Japan
Prior art keywords
memory cell
etches
address electrode
etch
state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7311114A
Other languages
English (en)
Japanese (ja)
Inventor
Rohit L Bhuva
エル．ブーバ ロヒット
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of JPH08227044A publication Critical patent/JPH08227044A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Video Image Reproduction Devices For Color Tv Systems (AREA)
  • Liquid Crystal (AREA)
JP7311114A 1994-11-30 1995-11-29 オン状態における欠陥の可能性を減少させた空間光変調器 Pending JPH08227044A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US346812 1982-02-08
US08/346,812 US5610624A (en) 1994-11-30 1994-11-30 Spatial light modulator with reduced possibility of an on state defect

Publications (1)

Publication Number Publication Date
JPH08227044A true JPH08227044A (ja) 1996-09-03

Family

ID=23361146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7311114A Pending JPH08227044A (ja) 1994-11-30 1995-11-29 オン状態における欠陥の可能性を減少させた空間光変調器

Country Status (6)

Country Link
US (1) US5610624A (https=)
EP (1) EP0715199B1 (https=)
JP (1) JPH08227044A (https=)
KR (1) KR960018639A (https=)
DE (1) DE69531926T2 (https=)
TW (1) TW303447B (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6781742B2 (en) 2000-07-11 2004-08-24 Semiconductor Energy Laboratory Co., Ltd. Digital micromirror device and method of driving digital micromirror device
JP2006119361A (ja) * 2004-10-21 2006-05-11 Ricoh Co Ltd 光偏向装置、光偏向アレー、光学システムおよび画像投影表示装置
JP2006133394A (ja) * 2004-11-04 2006-05-25 Ricoh Co Ltd 光偏向装置アレイの駆動方法、光偏向装置アレイ、光偏向装置および画像投影表示装置

Families Citing this family (184)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US7123216B1 (en) * 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US7297471B1 (en) 2003-04-15 2007-11-20 Idc, Llc Method for manufacturing an array of interferometric modulators
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US7550794B2 (en) * 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US7460291B2 (en) 1994-05-05 2008-12-02 Idc, Llc Separable modulator
US8014059B2 (en) * 1994-05-05 2011-09-06 Qualcomm Mems Technologies, Inc. System and method for charge control in a MEMS device
US7138984B1 (en) 2001-06-05 2006-11-21 Idc, Llc Directly laminated touch sensitive screen
US5808800A (en) * 1994-12-22 1998-09-15 Displaytech, Inc. Optics arrangements including light source arrangements for an active matrix liquid crystal image generator
US5748164A (en) * 1994-12-22 1998-05-05 Displaytech, Inc. Active matrix liquid crystal image generator
JP3519853B2 (ja) * 1996-02-28 2004-04-19 富士写真フイルム株式会社 マイクロミラー式画像形成装置及びその管理方法
US7471444B2 (en) * 1996-12-19 2008-12-30 Idc, Llc Interferometric modulation of radiation
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US7532377B2 (en) 1998-04-08 2009-05-12 Idc, Llc Movable micro-electromechanical device
KR100703140B1 (ko) * 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
GB2341965A (en) * 1998-09-24 2000-03-29 Secr Defence Pattern recognition
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6962771B1 (en) * 2000-10-13 2005-11-08 Taiwan Semiconductor Manufacturing Company, Ltd. Dual damascene process
US6906850B2 (en) * 2000-12-28 2005-06-14 Texas Instruments Incorporated Capacitively coupled micromirror
US6589625B1 (en) 2001-08-01 2003-07-08 Iridigm Display Corporation Hermetic seal and method to create the same
US6794119B2 (en) * 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
US7956857B2 (en) * 2002-02-27 2011-06-07 Intel Corporation Light modulator having pixel memory decoupled from pixel display
US7781850B2 (en) * 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
TW200413810A (en) 2003-01-29 2004-08-01 Prime View Int Co Ltd Light interference display panel and its manufacturing method
TW594360B (en) * 2003-04-21 2004-06-21 Prime View Int Corp Ltd A method for fabricating an interference display cell
US6741384B1 (en) 2003-04-30 2004-05-25 Hewlett-Packard Development Company, L.P. Control of MEMS and light modulator arrays
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
US7221495B2 (en) * 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
TW200506479A (en) * 2003-08-15 2005-02-16 Prime View Int Co Ltd Color changeable pixel for an interference display
TWI231865B (en) * 2003-08-26 2005-05-01 Prime View Int Co Ltd An interference display cell and fabrication method thereof
TWI232333B (en) * 2003-09-03 2005-05-11 Prime View Int Co Ltd Display unit using interferometric modulation and manufacturing method thereof
TW593126B (en) 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
US7307777B2 (en) * 2003-10-23 2007-12-11 Spatial Photonics, Inc. High-resolution spatial light modulation
US6888521B1 (en) 2003-10-30 2005-05-03 Reflectivity, Inc Integrated driver for use in display systems having micromirrors
US7012726B1 (en) 2003-11-03 2006-03-14 Idc, Llc MEMS devices with unreleased thin film components
US7161728B2 (en) 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
US7142346B2 (en) * 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7532194B2 (en) * 2004-02-03 2009-05-12 Idc, Llc Driver voltage adjuster
US7119945B2 (en) 2004-03-03 2006-10-10 Idc, Llc Altering temporal response of microelectromechanical elements
US7706050B2 (en) * 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7720148B2 (en) * 2004-03-26 2010-05-18 The Hong Kong University Of Science And Technology Efficient multi-frame motion estimation for video compression
US7476327B2 (en) * 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7060895B2 (en) * 2004-05-04 2006-06-13 Idc, Llc Modifying the electro-mechanical behavior of devices
US7164520B2 (en) * 2004-05-12 2007-01-16 Idc, Llc Packaging for an interferometric modulator
US7256922B2 (en) * 2004-07-02 2007-08-14 Idc, Llc Interferometric modulators with thin film transistors
TWI233916B (en) * 2004-07-09 2005-06-11 Prime View Int Co Ltd A structure of a micro electro mechanical system
KR101255691B1 (ko) * 2004-07-29 2013-04-17 퀄컴 엠이엠에스 테크놀로지스, 인크. 간섭 변조기의 미소기전 동작을 위한 시스템 및 방법
US7889163B2 (en) * 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7560299B2 (en) * 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7499208B2 (en) 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7551159B2 (en) 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7515147B2 (en) * 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
US7602375B2 (en) * 2004-09-27 2009-10-13 Idc, Llc Method and system for writing data to MEMS display elements
US20060176487A1 (en) * 2004-09-27 2006-08-10 William Cummings Process control monitors for interferometric modulators
US7724993B2 (en) * 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US7920135B2 (en) * 2004-09-27 2011-04-05 Qualcomm Mems Technologies, Inc. Method and system for driving a bi-stable display
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7289256B2 (en) * 2004-09-27 2007-10-30 Idc, Llc Electrical characterization of interferometric modulators
US20060065366A1 (en) * 2004-09-27 2006-03-30 Cummings William J Portable etch chamber
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US8008736B2 (en) * 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7259449B2 (en) * 2004-09-27 2007-08-21 Idc, Llc Method and system for sealing a substrate
US7916103B2 (en) 2004-09-27 2011-03-29 Qualcomm Mems Technologies, Inc. System and method for display device with end-of-life phenomena
US7343080B2 (en) 2004-09-27 2008-03-11 Idc, Llc System and method of testing humidity in a sealed MEMS device
US7368803B2 (en) * 2004-09-27 2008-05-06 Idc, Llc System and method for protecting microelectromechanical systems array using back-plate with non-flat portion
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US20060076634A1 (en) * 2004-09-27 2006-04-13 Lauren Palmateer Method and system for packaging MEMS devices with incorporated getter
US7535466B2 (en) * 2004-09-27 2009-05-19 Idc, Llc System with server based control of client device display features
US7424198B2 (en) * 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US7349136B2 (en) * 2004-09-27 2008-03-25 Idc, Llc Method and device for a display having transparent components integrated therein
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7299681B2 (en) * 2004-09-27 2007-11-27 Idc, Llc Method and system for detecting leak in electronic devices
US8878825B2 (en) * 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7653371B2 (en) * 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7692839B2 (en) * 2004-09-27 2010-04-06 Qualcomm Mems Technologies, Inc. System and method of providing MEMS device with anti-stiction coating
US20060066596A1 (en) * 2004-09-27 2006-03-30 Sampsell Jeffrey B System and method of transmitting video data
US20060066594A1 (en) * 2004-09-27 2006-03-30 Karen Tyger Systems and methods for driving a bi-stable display element
US20060067650A1 (en) * 2004-09-27 2006-03-30 Clarence Chui Method of making a reflective display device using thin film transistor production techniques
US7710629B2 (en) * 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. System and method for display device with reinforcing substance
US20060103643A1 (en) * 2004-09-27 2006-05-18 Mithran Mathew Measuring and modeling power consumption in displays
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7136213B2 (en) * 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7373026B2 (en) * 2004-09-27 2008-05-13 Idc, Llc MEMS device fabricated on a pre-patterned substrate
US20060077126A1 (en) * 2004-09-27 2006-04-13 Manish Kothari Apparatus and method for arranging devices into an interconnected array
US7564612B2 (en) * 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US7453579B2 (en) 2004-09-27 2008-11-18 Idc, Llc Measurement of the dynamic characteristics of interferometric modulators
US7684104B2 (en) * 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7586484B2 (en) * 2004-09-27 2009-09-08 Idc, Llc Controller and driver features for bi-stable display
US7317568B2 (en) * 2004-09-27 2008-01-08 Idc, Llc System and method of implementation of interferometric modulators for display mirrors
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7369296B2 (en) * 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7417783B2 (en) * 2004-09-27 2008-08-26 Idc, Llc Mirror and mirror layer for optical modulator and method
US7492502B2 (en) * 2004-09-27 2009-02-17 Idc, Llc Method of fabricating a free-standing microstructure
US7936497B2 (en) * 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
BRPI0509575A (pt) * 2004-09-27 2007-10-09 Idc Llc método e dispositivo para modulação de luz interferométrica de multi-estados
US7415186B2 (en) * 2004-09-27 2008-08-19 Idc, Llc Methods for visually inspecting interferometric modulators for defects
US7668415B2 (en) * 2004-09-27 2010-02-23 Qualcomm Mems Technologies, Inc. Method and device for providing electronic circuitry on a backplate
US7626581B2 (en) * 2004-09-27 2009-12-01 Idc, Llc Device and method for display memory using manipulation of mechanical response
US7417735B2 (en) * 2004-09-27 2008-08-26 Idc, Llc Systems and methods for measuring color and contrast in specular reflective devices
US7808703B2 (en) * 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. System and method for implementation of interferometric modulator displays
US7446927B2 (en) * 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US7345805B2 (en) * 2004-09-27 2008-03-18 Idc, Llc Interferometric modulator array with integrated MEMS electrical switches
US7553684B2 (en) * 2004-09-27 2009-06-30 Idc, Llc Method of fabricating interferometric devices using lift-off processing techniques
US7304784B2 (en) * 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US7420725B2 (en) * 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US8124434B2 (en) * 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. Method and system for packaging a display
US7843410B2 (en) * 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US7630119B2 (en) * 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing slippage between structures in an interferometric modulator
US7813026B2 (en) * 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US7545550B2 (en) * 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US7460246B2 (en) * 2004-09-27 2008-12-02 Idc, Llc Method and system for sensing light using interferometric elements
US20060065622A1 (en) * 2004-09-27 2006-03-30 Floyd Philip D Method and system for xenon fluoride etching with enhanced efficiency
US7675669B2 (en) 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7893919B2 (en) 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7719500B2 (en) * 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7405861B2 (en) * 2004-09-27 2008-07-29 Idc, Llc Method and device for protecting interferometric modulators from electrostatic discharge
US7405924B2 (en) 2004-09-27 2008-07-29 Idc, Llc System and method for protecting microelectromechanical systems array using structurally reinforced back-plate
US7679627B2 (en) 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7130104B2 (en) * 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
US7420728B2 (en) * 2004-09-27 2008-09-02 Idc, Llc Methods of fabricating interferometric modulators by selectively removing a material
US7359066B2 (en) * 2004-09-27 2008-04-15 Idc, Llc Electro-optical measurement of hysteresis in interferometric modulators
US7527995B2 (en) * 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7161730B2 (en) 2004-09-27 2007-01-09 Idc, Llc System and method for providing thermal compensation for an interferometric modulator display
US7554714B2 (en) * 2004-09-27 2009-06-30 Idc, Llc Device and method for manipulation of thermal response in a modulator
US7327510B2 (en) 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US7369294B2 (en) * 2004-09-27 2008-05-06 Idc, Llc Ornamental display device
US7321456B2 (en) * 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7302157B2 (en) * 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
US7701631B2 (en) * 2004-09-27 2010-04-20 Qualcomm Mems Technologies, Inc. Device having patterned spacers for backplates and method of making the same
US7106492B2 (en) * 2004-12-21 2006-09-12 Texas Instruments Incorporated Bias voltage routing scheme for a digital micro-mirror device
TW200628877A (en) * 2005-02-04 2006-08-16 Prime View Int Co Ltd Method of manufacturing optical interference type color display
US7920136B2 (en) * 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
US7948457B2 (en) * 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
CA2607807A1 (en) 2005-05-05 2006-11-16 Qualcomm Incorporated Dynamic driver ic and display panel configuration
US20060277486A1 (en) * 2005-06-02 2006-12-07 Skinner David N File or user interface element marking system
EP2495212A3 (en) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
JP2009503564A (ja) * 2005-07-22 2009-01-29 クアルコム，インコーポレイテッド Ｍｅｍｓデバイスのための支持構造、およびその方法
US7355779B2 (en) * 2005-09-02 2008-04-08 Idc, Llc Method and system for driving MEMS display elements
US7630114B2 (en) * 2005-10-28 2009-12-08 Idc, Llc Diffusion barrier layer for MEMS devices
US20070132681A1 (en) * 2005-12-09 2007-06-14 Chih-Liang Chen Passive micro-mirror-array spatial light modulation
US8391630B2 (en) * 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7636151B2 (en) * 2006-01-06 2009-12-22 Qualcomm Mems Technologies, Inc. System and method for providing residual stress test structures
US7916980B2 (en) * 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) * 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US8194056B2 (en) * 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US7582952B2 (en) * 2006-02-21 2009-09-01 Qualcomm Mems Technologies, Inc. Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof
US7547568B2 (en) * 2006-02-22 2009-06-16 Qualcomm Mems Technologies, Inc. Electrical conditioning of MEMS device and insulating layer thereof
US7550810B2 (en) * 2006-02-23 2009-06-23 Qualcomm Mems Technologies, Inc. MEMS device having a layer movable at asymmetric rates
US7450295B2 (en) * 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7643203B2 (en) 2006-04-10 2010-01-05 Qualcomm Mems Technologies, Inc. Interferometric optical display system with broadband characteristics
US7903047B2 (en) * 2006-04-17 2011-03-08 Qualcomm Mems Technologies, Inc. Mode indicator for interferometric modulator displays
US7623287B2 (en) 2006-04-19 2009-11-24 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US7527996B2 (en) * 2006-04-19 2009-05-05 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US7417784B2 (en) * 2006-04-19 2008-08-26 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing a porous surface
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US20070249078A1 (en) * 2006-04-19 2007-10-25 Ming-Hau Tung Non-planar surface structures and process for microelectromechanical systems
US8049713B2 (en) * 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7369292B2 (en) * 2006-05-03 2008-05-06 Qualcomm Mems Technologies, Inc. Electrode and interconnect materials for MEMS devices
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
US7649671B2 (en) * 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7405863B2 (en) * 2006-06-01 2008-07-29 Qualcomm Mems Technologies, Inc. Patterning of mechanical layer in MEMS to reduce stresses at supports
US7471442B2 (en) * 2006-06-15 2008-12-30 Qualcomm Mems Technologies, Inc. Method and apparatus for low range bit depth enhancements for MEMS display architectures
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7835061B2 (en) * 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7385744B2 (en) * 2006-06-28 2008-06-10 Qualcomm Mems Technologies, Inc. Support structure for free-standing MEMS device and methods for forming the same
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7388704B2 (en) * 2006-06-30 2008-06-17 Qualcomm Mems Technologies, Inc. Determination of interferometric modulator mirror curvature and airgap variation using digital photographs
US7566664B2 (en) * 2006-08-02 2009-07-28 Qualcomm Mems Technologies, Inc. Selective etching of MEMS using gaseous halides and reactive co-etchants
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
US20080043315A1 (en) * 2006-08-15 2008-02-21 Cummings William J High profile contacts for microelectromechanical systems
US7706042B2 (en) * 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7548365B2 (en) * 2007-06-06 2009-06-16 Texas Instruments Incorporated Semiconductor device and method comprising a high voltage reset driver and an isolated memory array
KR20100121498A (ko) * 2008-02-11 2010-11-17 퀄컴 엠이엠스 테크놀로지스, 인크. 디스플레이 구동 체계가 통합된 표시소자의 감지, 측정 혹은 평가 방법 및 장치, 그리고 이를 이용한 시스템 및 용도
US8736590B2 (en) * 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
EP2556403A1 (en) 2010-04-09 2013-02-13 Qualcomm Mems Technologies, Inc. Mechanical layer of an electromechanical device and methods of forming the same
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
TWI823609B (zh) * 2022-10-12 2023-11-21 友達光電股份有限公司 顯示裝置及其操作方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3862360A (en) * 1973-04-18 1975-01-21 Hughes Aircraft Co Liquid crystal display system with integrated signal storage circuitry
US4229732A (en) * 1978-12-11 1980-10-21 International Business Machines Corporation Micromechanical display logic and array
US5061049A (en) * 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
DE68909075T2 (de) 1988-03-16 1994-04-07 Texas Instruments Inc Spatialer Lichtmodulator mit Anwendungsverfahren.
US5079544A (en) * 1989-02-27 1992-01-07 Texas Instruments Incorporated Standard independent digitized video system
US5105369A (en) 1989-12-21 1992-04-14 Texas Instruments Incorporated Printing system exposure module alignment method and apparatus of manufacture
WO1992009065A1 (en) * 1990-11-16 1992-05-29 Rank Brimar Limited Deformable mirror device driving circuit and method
GB9024978D0 (en) * 1990-11-16 1991-01-02 Rank Cintel Ltd Digital mirror spatial light modulator
CA2063744C (en) * 1991-04-01 2002-10-08 Paul M. Urbanus Digital micromirror device architecture and timing for use in a pulse-width modulated display system
JP2795074B2 (ja) * 1992-07-16 1998-09-10 日本電気株式会社 ダイナミックｒａｍ
DE69405420T2 (de) * 1993-01-11 1998-03-12 Texas Instruments Inc Pixelkontrollschaltung für räumlichen Lichtmodulator
US5499062A (en) * 1994-06-23 1996-03-12 Texas Instruments Incorporated Multiplexed memory timing with block reset and secondary memory

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6781742B2 (en) 2000-07-11 2004-08-24 Semiconductor Energy Laboratory Co., Ltd. Digital micromirror device and method of driving digital micromirror device
US6937384B2 (en) 2000-07-11 2005-08-30 Semiconductor Energy Laboratory Co., Ltd. Digital micromirror device and method of driving digital micromirror device
US7110161B2 (en) 2000-07-11 2006-09-19 Semiconductor Energy Laboratory Co., Ltd. Digital micromirror device and method of driving digital micromirror device
US7248393B2 (en) 2000-07-11 2007-07-24 Semiconductor Energy Laboratory Co., Ltd. Digital micromirror device and method of driving digital micromirror device
JP2006119361A (ja) * 2004-10-21 2006-05-11 Ricoh Co Ltd 光偏向装置、光偏向アレー、光学システムおよび画像投影表示装置
JP2006133394A (ja) * 2004-11-04 2006-05-25 Ricoh Co Ltd 光偏向装置アレイの駆動方法、光偏向装置アレイ、光偏向装置および画像投影表示装置
US8014058B2 (en) 2004-11-04 2011-09-06 Ricoh Company, Ltd. Method for driving optical deflecting device array, optical deflecting device array, optical deflecting device, and image projection displaying apparatus

Also Published As

Publication number Publication date
DE69531926T2 (de) 2004-05-19
TW303447B (https=) 1997-04-21
US5610624A (en) 1997-03-11
KR960018639A (ko) 1996-06-17
EP0715199A3 (en) 1998-06-17
DE69531926D1 (de) 2003-11-20
EP0715199A2 (en) 1996-06-05
EP0715199B1 (en) 2003-10-15

Similar Documents

Publication Publication Date Title
JPH08227044A (ja) オン状態における欠陥の可能性を減少させた空間光変調器
US5771116A (en) Multiple bias level reset waveform for enhanced DMD control
KR100416679B1 (ko) 공간광변조기
Hornbeck et al. Bistable deformable mirror device
US5612713A (en) Digital micro-mirror device with block data loading
US5387924A (en) Method of mitigating the effects of a defective electromechanical pixel
EP0658868B1 (en) Signal generator and method for controlling a spatial light modulator
US5285407A (en) Memory circuit for spatial light modulator
US5583688A (en) Multi-level digital micromirror device
US5671083A (en) Spatial light modulator with buried passive charge storage cell array
US5706123A (en) Switched control signals for digital micro-mirror device with split reset
US5682174A (en) Memory cell array for digital spatial light modulator
KR20010070383A (ko) 디지털 마이크로 기계 장치의 아날로그 펄스 폭 변조 셀
EP0769713B1 (en) Improvements in or relating to spatial light modulators
US5670977A (en) Spatial light modulator having single bit-line dual-latch memory cells
US6191883B1 (en) Five transistor SRAM cell for small micromirror elements
US5953153A (en) Spatial light modulator with improved light shield
US7113322B2 (en) Micromirror having offset addressing electrode
US5670976A (en) Spatial light modulator having redundant memory cells
US7480090B2 (en) Optical deflecting device, optical deflecting device array, method for driving the optical deflecting device and image projection display apparatus using the device
US20080218842A1 (en) Method of Repairing Micromirrors in Spatial Light Modulators
US6195301B1 (en) Feedback driver for memory array bitline
US7751114B2 (en) System and apparatus for repairing micromirrors in spatial light modulators
WO1997005597A1 (en) Flat panel pixel array incorporating photoconductive switches