DE69527904D1 - Verlängerte Torsionshebel-Probe, Raster-Mikroskop, Informations-Aufnahme-Wiedergabe- Vorrichtung - Google Patents

Verlängerte Torsionshebel-Probe, Raster-Mikroskop, Informations-Aufnahme-Wiedergabe- Vorrichtung

Info

Publication number
DE69527904D1
DE69527904D1 DE69527904T DE69527904T DE69527904D1 DE 69527904 D1 DE69527904 D1 DE 69527904D1 DE 69527904 T DE69527904 T DE 69527904T DE 69527904 T DE69527904 T DE 69527904T DE 69527904 D1 DE69527904 D1 DE 69527904D1
Authority
DE
Germany
Prior art keywords
information recording
reproducing device
scanning microscope
torsion lever
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69527904T
Other languages
English (en)
Other versions
DE69527904T2 (de
Inventor
Tsutomu Ikeda
Takehiko Kawasaki
Yasuhiro Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69527904D1 publication Critical patent/DE69527904D1/de
Application granted granted Critical
Publication of DE69527904T2 publication Critical patent/DE69527904T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/873—Tip holder

Landscapes

  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE69527904T 1994-09-21 1995-09-20 Verlängerte Torsionshebel-Probe, Raster-Mikroskop, Informations-Aufnahme-Wiedergabe- Vorrichtung Expired - Lifetime DE69527904T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22618994A JP3192887B2 (ja) 1994-09-21 1994-09-21 プローブ、該プローブを用いた走査型プローブ顕微鏡、および前記プローブを用いた記録再生装置

Publications (2)

Publication Number Publication Date
DE69527904D1 true DE69527904D1 (de) 2002-10-02
DE69527904T2 DE69527904T2 (de) 2003-04-24

Family

ID=16841286

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69527904T Expired - Lifetime DE69527904T2 (de) 1994-09-21 1995-09-20 Verlängerte Torsionshebel-Probe, Raster-Mikroskop, Informations-Aufnahme-Wiedergabe- Vorrichtung

Country Status (4)

Country Link
US (1) US5574279A (de)
EP (1) EP0703429B1 (de)
JP (1) JP3192887B2 (de)
DE (1) DE69527904T2 (de)

Families Citing this family (32)

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US6000280A (en) * 1995-07-20 1999-12-14 Cornell Research Foundation, Inc. Drive electrodes for microfabricated torsional cantilevers
JPH11515092A (ja) * 1995-07-20 1999-12-21 コーネル・リサーチ・ファンデーション・インコーポレイテッド 高感度力検出のための超小型化ねじれキャンティレバー
JP3679519B2 (ja) * 1995-09-14 2005-08-03 キヤノン株式会社 トンネル電流または微小力または磁気力検出用の微小ティップの製造方法、並びにその微小ティップを有するプローブの製造方法とそのプローブ、該プローブを有するプローブユニットと走査型プローブ顕微鏡及び情報記録再生装置
JP3576677B2 (ja) * 1996-01-19 2004-10-13 キヤノン株式会社 静電アクチュエータ及び、該アクチュエータを用いたプローブ、走査型プローブ顕微鏡、加工装置、記録再生装置
FR2755224B1 (fr) * 1996-10-24 1998-12-04 Suisse Electronique Microtech Capteur a effet tunnel, notamment pour relever la topographie d'une surface
JPH10282130A (ja) * 1997-04-01 1998-10-23 Canon Inc プローブとそれを用いた走査型プローブ顕微鏡
JP3697034B2 (ja) * 1997-08-26 2005-09-21 キヤノン株式会社 微小開口を有する突起の製造方法、及びそれらによるプローブまたはマルチプローブ
GB9801286D0 (en) * 1998-01-21 1998-03-18 Univ Cambridge Tech Sensor
JP2000035396A (ja) 1998-07-16 2000-02-02 Canon Inc 微小突起を有するプローブ、及びその製造方法
US6497141B1 (en) 1999-06-07 2002-12-24 Cornell Research Foundation Inc. Parametric resonance in microelectromechanical structures
US6677225B1 (en) * 2000-07-14 2004-01-13 Zyvex Corporation System and method for constraining totally released microcomponents
JP4387623B2 (ja) * 2000-12-04 2009-12-16 キヤノン株式会社 圧電素子の製造方法
US6831765B2 (en) * 2001-02-22 2004-12-14 Canon Kabushiki Kaisha Tiltable-body apparatus, and method of fabricating the same
US6642129B2 (en) * 2001-07-26 2003-11-04 The Board Of Trustees Of The University Of Illinois Parallel, individually addressable probes for nanolithography
US7073938B2 (en) * 2001-10-31 2006-07-11 The Regents Of The University Of Michigan Micromachined arrayed thermal probe apparatus, system for thermal scanning a sample in a contact mode and cantilevered reference probe for use therein
US6813937B2 (en) * 2001-11-28 2004-11-09 General Nanotechnology Llc Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
JP2004058267A (ja) 2002-06-03 2004-02-26 Japan Science & Technology Corp シリコン微小細線からなる３次元構造体、その製造方法及びそれを利用した装置
JP5027984B2 (ja) * 2003-03-28 2012-09-19 キヤノン株式会社 揺動体を用いた電位測定装置、電位測定方法、及び画像形成装置
JP2005079508A (ja) * 2003-09-03 2005-03-24 Canon Inc 磁性膜及び多層磁性膜、磁性膜の磁化反転方法及び磁化反転機構、磁気ランダムアクセスメモリ
DE10348335B4 (de) * 2003-10-17 2013-12-24 Universität Ulm Brückenförmiges Mikrobauteil mit einem bimetallischen Biegeelement
US20050128927A1 (en) * 2003-12-15 2005-06-16 Hewlett-Packard Development Co., L.P. Electrostatic actuator for contact probe storage device
US7193492B2 (en) * 2004-09-29 2007-03-20 Lucent Technologies Inc. Monolithic MEMS device having a balanced cantilever plate
US7787350B2 (en) * 2005-01-13 2010-08-31 International Business Machines Corporation Data storage device
JP4731927B2 (ja) * 2005-01-31 2011-07-27 キヤノン株式会社 磁性体センサおよび検出キット
JP2006317358A (ja) * 2005-05-16 2006-11-24 Canon Inc 電位測定装置、およびそれを用いた画像形成装置
US7382137B2 (en) * 2005-05-27 2008-06-03 Canon Kabushiki Kaisha Potential measuring apparatus
CN101079331B (zh) * 2005-08-04 2010-12-08 中国科学院物理研究所 一种用于扫描隧道显微镜的隧道探针及其制备方法
JP5188024B2 (ja) * 2006-02-09 2013-04-24 キヤノン株式会社 揺動体装置、電位測定装置、及び光偏向装置
JP4309413B2 (ja) * 2006-08-31 2009-08-05 株式会社東芝 情報記録再生装置
JP2008116444A (ja) * 2006-10-12 2008-05-22 Canon Inc 複合機能センサー及び検知方法
JP4309438B2 (ja) * 2007-03-20 2009-08-05 株式会社東芝 情報記録再生装置
JP5226481B2 (ja) * 2008-11-27 2013-07-03 株式会社日立ハイテクサイエンス 自己変位検出型カンチレバーおよび走査型プローブ顕微鏡

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3572030D1 (en) * 1985-03-07 1989-09-07 Ibm Scanning tunneling microscope
JP2556492B2 (ja) * 1986-12-24 1996-11-20 キヤノン株式会社 再生装置及び再生法
JP2556491B2 (ja) * 1986-12-24 1996-11-20 キヤノン株式会社 記録装置及び記録法
US4906840A (en) 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
JPH041948A (ja) 1990-04-18 1992-01-07 Canon Inc 情報記録装置及び情報再生装置及び情報記録再生装置
DE69023347T2 (de) * 1990-12-21 1996-05-30 International Business Machines Corp., Armonk, N.Y. Integriertes Rastertunnelmikroskop mit pneumatischer und elektrostatischer Steuerung und Verfahren zum Herstellen desselben.
US5283437A (en) * 1990-12-21 1994-02-01 International Business Machines Corporation Pneumatically and electrostatically driven scanning tunneling microscope
JP2884447B2 (ja) * 1991-04-22 1999-04-19 キヤノン株式会社 カンチレバー型プローブ、及びこれを用いた走査型トンネル顕微鏡、情報処理装置
JP2923813B2 (ja) * 1991-06-11 1999-07-26 キヤノン株式会社 カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置
GB9112777D0 (en) * 1991-06-13 1991-07-31 Buser Rudolf A Microprobe for surface scanning microscopes
US5319961A (en) * 1991-09-17 1994-06-14 Olympus Optical Co., Ltd. Cantilever chip for use in scanning probe microscope
JP3184619B2 (ja) * 1991-09-24 2001-07-09 キヤノン株式会社 平行平面保持機構及びそれを用いたメモリ装置及びｓｔｍ装置
US5386720A (en) * 1992-01-09 1995-02-07 Olympus Optical Co., Ltd. Integrated AFM sensor
US5444244A (en) * 1993-06-03 1995-08-22 Park Scientific Instruments Corporation Piezoresistive cantilever with integral tip for scanning probe microscope

Also Published As

Publication number Publication date
US5574279A (en) 1996-11-12
JPH0894647A (ja) 1996-04-12
DE69527904T2 (de) 2003-04-24
JP3192887B2 (ja) 2001-07-30
EP0703429A3 (de) 1996-10-16
EP0703429B1 (de) 2002-08-28
EP0703429A2 (de) 1996-03-27

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