DE69526485D1 - Verfahren zur Herstellung vergrabener Oxidschichten - Google Patents
Verfahren zur Herstellung vergrabener OxidschichtenInfo
- Publication number
- DE69526485D1 DE69526485D1 DE69526485T DE69526485T DE69526485D1 DE 69526485 D1 DE69526485 D1 DE 69526485D1 DE 69526485 T DE69526485 T DE 69526485T DE 69526485 T DE69526485 T DE 69526485T DE 69526485 D1 DE69526485 D1 DE 69526485D1
- Authority
- DE
- Germany
- Prior art keywords
- wafer
- buried oxide
- production
- oxide layers
- oxygen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26533—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically inactive species in silicon to make buried insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76243—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using silicon implanted buried insulating layers, e.g. oxide layers, i.e. SIMOX techniques
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US35529894A | 1994-12-12 | 1994-12-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69526485D1 true DE69526485D1 (de) | 2002-05-29 |
DE69526485T2 DE69526485T2 (de) | 2002-12-19 |
Family
ID=23396959
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69526485T Expired - Fee Related DE69526485T2 (de) | 1994-12-12 | 1995-11-29 | Verfahren zur Herstellung vergrabener Oxidschichten |
Country Status (6)
Country | Link |
---|---|
US (1) | US5891743A (de) |
EP (1) | EP0717437B1 (de) |
JP (1) | JPH08255885A (de) |
KR (1) | KR960026128A (de) |
AT (1) | ATE216802T1 (de) |
DE (1) | DE69526485T2 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2748851B1 (fr) * | 1996-05-15 | 1998-08-07 | Commissariat Energie Atomique | Procede de realisation d'une couche mince de materiau semiconducteur |
FR2773261B1 (fr) * | 1997-12-30 | 2000-01-28 | Commissariat Energie Atomique | Procede pour le transfert d'un film mince comportant une etape de creation d'inclusions |
US6486043B1 (en) | 2000-08-31 | 2002-11-26 | International Business Machines Corporation | Method of forming dislocation filter in merged SOI and non-SOI chips |
FR2823596B1 (fr) | 2001-04-13 | 2004-08-20 | Commissariat Energie Atomique | Substrat ou structure demontable et procede de realisation |
US6602757B2 (en) * | 2001-05-21 | 2003-08-05 | International Business Machines Corporation | Self-adjusting thickness uniformity in SOI by high-temperature oxidation of SIMOX and bonded SOI |
FR2830983B1 (fr) | 2001-10-11 | 2004-05-14 | Commissariat Energie Atomique | Procede de fabrication de couches minces contenant des microcomposants |
US7176108B2 (en) | 2002-11-07 | 2007-02-13 | Soitec Silicon On Insulator | Method of detaching a thin film at moderate temperature after co-implantation |
FR2848336B1 (fr) | 2002-12-09 | 2005-10-28 | Commissariat Energie Atomique | Procede de realisation d'une structure contrainte destinee a etre dissociee |
FR2856844B1 (fr) | 2003-06-24 | 2006-02-17 | Commissariat Energie Atomique | Circuit integre sur puce de hautes performances |
FR2857953B1 (fr) | 2003-07-21 | 2006-01-13 | Commissariat Energie Atomique | Structure empilee, et procede pour la fabriquer |
FR2861497B1 (fr) | 2003-10-28 | 2006-02-10 | Soitec Silicon On Insulator | Procede de transfert catastrophique d'une couche fine apres co-implantation |
US7772087B2 (en) | 2003-12-19 | 2010-08-10 | Commissariat A L'energie Atomique | Method of catastrophic transfer of a thin film after co-implantation |
FR2886051B1 (fr) | 2005-05-20 | 2007-08-10 | Commissariat Energie Atomique | Procede de detachement d'un film mince |
FR2889887B1 (fr) | 2005-08-16 | 2007-11-09 | Commissariat Energie Atomique | Procede de report d'une couche mince sur un support |
FR2891281B1 (fr) | 2005-09-28 | 2007-12-28 | Commissariat Energie Atomique | Procede de fabrication d'un element en couches minces. |
FR2899378B1 (fr) | 2006-03-29 | 2008-06-27 | Commissariat Energie Atomique | Procede de detachement d'un film mince par fusion de precipites |
FR2910179B1 (fr) | 2006-12-19 | 2009-03-13 | Commissariat Energie Atomique | PROCEDE DE FABRICATION DE COUCHES MINCES DE GaN PAR IMPLANTATION ET RECYCLAGE D'UN SUBSTRAT DE DEPART |
FR2925221B1 (fr) | 2007-12-17 | 2010-02-19 | Commissariat Energie Atomique | Procede de transfert d'une couche mince |
FR2947098A1 (fr) | 2009-06-18 | 2010-12-24 | Commissariat Energie Atomique | Procede de transfert d'une couche mince sur un substrat cible ayant un coefficient de dilatation thermique different de celui de la couche mince |
CN116759325B (zh) * | 2023-08-23 | 2023-11-03 | 江苏卓胜微电子股份有限公司 | 用于监控离子注入剂量的阻值监控方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3622382A (en) * | 1969-05-05 | 1971-11-23 | Ibm | Semiconductor isolation structure and method of producing |
US4151007A (en) * | 1977-10-11 | 1979-04-24 | Bell Telephone Laboratories, Incorporated | Hydrogen annealing process for stabilizing metal-oxide-semiconductor structures |
US4371420A (en) * | 1981-03-09 | 1983-02-01 | The United States Of America As Represented By The Secretary Of The Navy | Method for controlling impurities in liquid phase epitaxial growth |
JPS6031231A (ja) * | 1983-07-29 | 1985-02-18 | Toshiba Corp | 半導体基体の製造方法 |
US4522657A (en) * | 1983-10-20 | 1985-06-11 | Westinghouse Electric Corp. | Low temperature process for annealing shallow implanted N+/P junctions |
JPS6151930A (ja) * | 1984-08-22 | 1986-03-14 | Nec Corp | 半導体装置の製造方法 |
JP3066968B2 (ja) * | 1988-07-25 | 2000-07-17 | ソニー株式会社 | 半導体ウエハのゲッタリング方法 |
US5229311A (en) * | 1989-03-22 | 1993-07-20 | Intel Corporation | Method of reducing hot-electron degradation in semiconductor devices |
JPH03201535A (ja) * | 1989-12-28 | 1991-09-03 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置とその製造方法 |
JPH0411736A (ja) * | 1990-04-28 | 1992-01-16 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
US5244819A (en) * | 1991-10-22 | 1993-09-14 | Honeywell Inc. | Method to getter contamination in semiconductor devices |
-
1995
- 1995-11-29 AT AT95308590T patent/ATE216802T1/de not_active IP Right Cessation
- 1995-11-29 DE DE69526485T patent/DE69526485T2/de not_active Expired - Fee Related
- 1995-11-29 KR KR19950044881A patent/KR960026128A/ko active IP Right Grant
- 1995-11-29 EP EP95308590A patent/EP0717437B1/de not_active Expired - Lifetime
- 1995-12-12 JP JP7322879A patent/JPH08255885A/ja active Pending
-
1996
- 1996-12-24 US US08/773,769 patent/US5891743A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0717437B1 (de) | 2002-04-24 |
KR960026128A (de) | 1996-07-22 |
US5891743A (en) | 1999-04-06 |
EP0717437A3 (de) | 1997-04-02 |
DE69526485T2 (de) | 2002-12-19 |
JPH08255885A (ja) | 1996-10-01 |
ATE216802T1 (de) | 2002-05-15 |
EP0717437A2 (de) | 1996-06-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69526485D1 (de) | Verfahren zur Herstellung vergrabener Oxidschichten | |
DE3888883D1 (de) | Verfahren zur Herstellung einer vergrabenen isolierenden Schicht in einem Halbleitersubstrat durch Ionenimplantation und Halbleiterstruktur mit einer solchen Schicht. | |
ATE187844T1 (de) | Verfahren zur herstellung einer oxidschicht in der halbleitertechnik | |
AT382040B (de) | Verfahren zur herstellung von optisch strukturierten filtern fuer elektromagnetische strahlung und optisch strukturierter filter | |
DE3856084T2 (de) | Verfahren zur Herstellung einer Halbleiteranordnung mit isoliertem Gatter | |
JPS56115525A (en) | Manufacture of semiconductor device | |
GB2271465A (en) | Silicon-on-porous-silicon;method of production and material | |
ATE491225T1 (de) | Verfahren zur herstellung dünner schichten, die mikrokomponenten enthalten | |
WO2002045132A3 (en) | Low defect density, thin-layer, soi substrates | |
DE3856075T2 (de) | Verfahren zur herstellung dünner einzelkristallsiliciuminseln auf einem isolator | |
SE8502590L (sv) | Forfarande for framstellning av oxidiska skyddsskikt | |
KR960030316A (ko) | Soi 기판의 제조방법 | |
KR960012287A (ko) | 반도체기판(Semiconductor Substrate)의 제조방법 | |
DE3585115D1 (de) | Verfahren zur herstellung und einstellung von eingegrabenen schichten. | |
ATE87486T1 (de) | Verfahren zur herstellung von toxoid. | |
ATE319188T1 (de) | Verfahren zur herstellung einer mos- transistoranordnung | |
JPS5787119A (en) | Manufacture of semiconductor device | |
DE59002167D1 (de) | Verfahren zur herstellung gesinterter mikrokristalliner alpha-al2o3-koerper sowie deren verwendung. | |
DE59912665D1 (de) | Verfahren zur Herstellung von Leistungshalbleiterbauelementen | |
DE3784420T2 (de) | Keramischer koerper mit verdichteter oberflaeche und verfahren zu seiner herstellung. | |
EP0828286A3 (de) | Verfahren zum Herstellen von hochglanzpolierten Siliziumscheiben und Vorrichtung zur Behandlung von Siliziumscheiben | |
MY123628A (en) | Simox substrate and method for production thereof | |
DE68903610D1 (de) | Verfahren zur herstellung von fluorverbindungen sowie dadurch herstellbare produkte. | |
JPS5789476A (en) | Dry etching method | |
KR940003221B1 (ko) | 모스의 필드산화막 제조방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |