DE69510484D1 - Metaloxidhalbleiter-Anordnung mit einer Substratkontaktstruktur - Google Patents

Metaloxidhalbleiter-Anordnung mit einer Substratkontaktstruktur

Info

Publication number
DE69510484D1
DE69510484D1 DE69510484T DE69510484T DE69510484D1 DE 69510484 D1 DE69510484 D1 DE 69510484D1 DE 69510484 T DE69510484 T DE 69510484T DE 69510484 T DE69510484 T DE 69510484T DE 69510484 D1 DE69510484 D1 DE 69510484D1
Authority
DE
Germany
Prior art keywords
metal oxide
oxide semiconductor
contact structure
substrate contact
semiconductor arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69510484T
Other languages
English (en)
Other versions
DE69510484T2 (de
Inventor
Kazuo Endou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE69510484D1 publication Critical patent/DE69510484D1/de
Publication of DE69510484T2 publication Critical patent/DE69510484T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
    • H01L29/78639—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with a drain or source connected to a bulk conducting substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/107—Substrate region of field-effect devices
    • H01L29/1075—Substrate region of field-effect devices of field-effect transistors
    • H01L29/1079—Substrate region of field-effect devices of field-effect transistors with insulated gate
    • H01L29/1087—Substrate region of field-effect devices of field-effect transistors with insulated gate characterised by the contact structure of the substrate region, e.g. for controlling or preventing bipolar effect
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
    • H01L29/78612—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing the kink- or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
DE69510484T 1994-04-05 1995-04-05 Metaloxidhalbleiter-Anordnung mit einer Substratkontaktstruktur Expired - Lifetime DE69510484T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6066832A JPH07283414A (ja) 1994-04-05 1994-04-05 Ｍｏｓ型半導体装置

Publications (2)

Publication Number Publication Date
DE69510484D1 true DE69510484D1 (de) 1999-08-05
DE69510484T2 DE69510484T2 (de) 1999-11-18

Family

ID=13327215

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69510484T Expired - Lifetime DE69510484T2 (de) 1994-04-05 1995-04-05 Metaloxidhalbleiter-Anordnung mit einer Substratkontaktstruktur

Country Status (5)

Country Link
US (1) US5929488A (de)
EP (1) EP0676815B1 (de)
JP (1) JPH07283414A (de)
DE (1) DE69510484T2 (de)
MY (1) MY114267A (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
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KR100253699B1 (ko) * 1996-06-29 2000-05-01 김영환 Soi소자 및 그 제조방법
US5841166A (en) 1996-09-10 1998-11-24 Spectrian, Inc. Lateral DMOS transistor for RF/microwave applications
JPH11204799A (ja) * 1998-01-20 1999-07-30 Mitsubishi Electric Corp 高周波ｍｏｓｆｅｔ装置とその製造方法
US6121659A (en) * 1998-03-27 2000-09-19 International Business Machines Corporation Buried patterned conductor planes for semiconductor-on-insulator integrated circuit
US6521947B1 (en) * 1999-01-28 2003-02-18 International Business Machines Corporation Method of integrating substrate contact on SOI wafers with STI process
EP1187220A3 (de) * 2000-09-11 2007-10-10 Kabushiki Kaisha Toshiba MOS-Feldeffekttransistor mit reduziertem Anschaltwiderstand
JP2002110990A (ja) * 2000-09-27 2002-04-12 Toshiba Corp 半導体装置およびその製造方法
US6844224B2 (en) * 2001-11-15 2005-01-18 Freescale Semiconductor, Inc. Substrate contact in SOI and method therefor
JP4034099B2 (ja) 2002-03-28 2008-01-16 株式会社ルネサステクノロジ 高周波用モノリシック集積回路装置およびその製造方法
US20040031996A1 (en) * 2002-08-16 2004-02-19 Brian Li Chi Nan Semiconductor device and method for forming
US7087977B2 (en) 2002-09-27 2006-08-08 Renesas Technology Corp. Semiconductor device including multiple wiring layers and circuits operating in different frequency bands
DE10250832B4 (de) * 2002-10-31 2010-02-11 Infineon Technologies Ag MOS-Transistor auf SOI-Substrat mit Source-Durchkontaktierung und Verfahren zur Herstellung eines solchen Transistors
TWI361490B (en) 2003-09-05 2012-04-01 Renesas Electronics Corp A semiconductor device and a method of manufacturing the same
US7102201B2 (en) * 2004-07-15 2006-09-05 International Business Machines Corporation Strained semiconductor device structures
JP2006269491A (ja) * 2005-03-22 2006-10-05 Seiko Epson Corp 半導体装置の製造方法
US8133774B2 (en) 2009-03-26 2012-03-13 International Business Machines Corporation SOI radio frequency switch with enhanced electrical isolation
US9654094B2 (en) 2014-03-12 2017-05-16 Kabushiki Kaisha Toshiba Semiconductor switch circuit and semiconductor substrate
JP2015173227A (ja) * 2014-03-12 2015-10-01 株式会社東芝 半導体スイッチ及び半導体基板
US20220223696A1 (en) * 2021-01-13 2022-07-14 Electronics And Telecommunications Research Institute Method for manufacturing power semiconductor device
CN114975609A (zh) 2021-02-24 2022-08-30 联华电子股份有限公司 横向双扩散的金属氧化物半导体场效晶体管及其制作方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143656A (ja) * 1983-12-29 1985-07-29 Fujitsu Ltd 半導体装置
US4875086A (en) * 1987-05-22 1989-10-17 Texas Instruments Incorporated Silicon-on-insulator integrated circuits and method
JPH081912B2 (ja) * 1987-12-10 1996-01-10 三菱電機株式会社 半導体装置
JP2509708B2 (ja) * 1989-09-07 1996-06-26 株式会社東芝 Ｓｏｉ型半導体装置及びその製造方法
US5241211A (en) * 1989-12-20 1993-08-31 Nec Corporation Semiconductor device
JPH03214773A (ja) * 1990-01-19 1991-09-19 Fujitsu Ltd 半導体装置
JPH043456A (ja) * 1990-04-19 1992-01-08 Nec Corp 能動層積層素子形成方法
JP2616134B2 (ja) * 1990-04-19 1997-06-04 日本電気株式会社 Ｓｏｉトランジスタ積層半導体装置とその製造方法
JPH04226082A (ja) * 1990-05-21 1992-08-14 Seiko Instr Inc 半導体装置
JPH0463469A (ja) * 1990-07-03 1992-02-28 Sharp Corp Ｓｏｉ型半導体装置
US5196373A (en) * 1990-08-06 1993-03-23 Harris Corporation Method of making trench conductor and crossunder architecture
JPH04150070A (ja) * 1990-10-15 1992-05-22 Seiko Epson Corp 半導体装置
JPH04179271A (ja) * 1990-11-14 1992-06-25 Fujitsu Ltd 半導体装置及びその製造方法
JPH05198739A (ja) * 1991-09-10 1993-08-06 Mitsubishi Electric Corp 積層型半導体装置およびその製造方法
JP2808965B2 (ja) * 1992-02-19 1998-10-08 日本電気株式会社 半導体装置
SE500814C2 (sv) * 1993-01-25 1994-09-12 Ericsson Telefon Ab L M Halvledaranordning i ett tunt aktivt skikt med hög genombrottsspänning
US5306659A (en) * 1993-03-29 1994-04-26 International Business Machines Corporation Reach-through isolation etching method for silicon-on-insulator devices
US5793107A (en) * 1993-10-29 1998-08-11 Vlsi Technology, Inc. Polysilicon pillar heat sinks for semiconductor on insulator circuits
US5393703A (en) * 1993-11-12 1995-02-28 Motorola, Inc. Process for forming a conductive layer for semiconductor devices
US5612552A (en) * 1994-03-31 1997-03-18 Lsi Logic Corporation Multilevel gate array integrated circuit structure with perpendicular access to all active device regions

Also Published As

Publication number Publication date
JPH07283414A (ja) 1995-10-27
EP0676815A1 (de) 1995-10-11
MY114267A (en) 2002-09-30
US5929488A (en) 1999-07-27
EP0676815B1 (de) 1999-06-30
DE69510484T2 (de) 1999-11-18

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