DE69510484T2 - Metaloxidhalbleiter-Anordnung mit einer Substratkontaktstruktur - Google Patents
Metaloxidhalbleiter-Anordnung mit einer SubstratkontaktstrukturInfo
- Publication number
- DE69510484T2 DE69510484T2 DE69510484T DE69510484T DE69510484T2 DE 69510484 T2 DE69510484 T2 DE 69510484T2 DE 69510484 T DE69510484 T DE 69510484T DE 69510484 T DE69510484 T DE 69510484T DE 69510484 T2 DE69510484 T2 DE 69510484T2
- Authority
- DE
- Germany
- Prior art keywords
- metal oxide
- oxide semiconductor
- contact structure
- substrate contact
- semiconductor arrangement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910044991 metal oxide Inorganic materials 0.000 title 1
- 150000004706 metal oxides Chemical class 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78639—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with a drain or source connected to a bulk conducting substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/107—Substrate region of field-effect devices
- H01L29/1075—Substrate region of field-effect devices of field-effect transistors
- H01L29/1079—Substrate region of field-effect devices of field-effect transistors with insulated gate
- H01L29/1087—Substrate region of field-effect devices of field-effect transistors with insulated gate characterised by the contact structure of the substrate region, e.g. for controlling or preventing bipolar effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78612—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing the kink- or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Thin Film Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6066832A JPH07283414A (ja) | 1994-04-05 | 1994-04-05 | Mos型半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69510484D1 DE69510484D1 (de) | 1999-08-05 |
DE69510484T2 true DE69510484T2 (de) | 1999-11-18 |
Family
ID=13327215
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69510484T Expired - Lifetime DE69510484T2 (de) | 1994-04-05 | 1995-04-05 | Metaloxidhalbleiter-Anordnung mit einer Substratkontaktstruktur |
Country Status (5)
Country | Link |
---|---|
US (1) | US5929488A (de) |
EP (1) | EP0676815B1 (de) |
JP (1) | JPH07283414A (de) |
DE (1) | DE69510484T2 (de) |
MY (1) | MY114267A (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100253699B1 (ko) * | 1996-06-29 | 2000-05-01 | 김영환 | Soi소자 및 그 제조방법 |
US5841166A (en) | 1996-09-10 | 1998-11-24 | Spectrian, Inc. | Lateral DMOS transistor for RF/microwave applications |
JPH11204799A (ja) * | 1998-01-20 | 1999-07-30 | Mitsubishi Electric Corp | 高周波mosfet装置とその製造方法 |
US6121659A (en) * | 1998-03-27 | 2000-09-19 | International Business Machines Corporation | Buried patterned conductor planes for semiconductor-on-insulator integrated circuit |
US6521947B1 (en) * | 1999-01-28 | 2003-02-18 | International Business Machines Corporation | Method of integrating substrate contact on SOI wafers with STI process |
EP1187220A3 (de) * | 2000-09-11 | 2007-10-10 | Kabushiki Kaisha Toshiba | MOS-Feldeffekttransistor mit reduziertem Anschaltwiderstand |
JP2002110990A (ja) * | 2000-09-27 | 2002-04-12 | Toshiba Corp | 半導体装置およびその製造方法 |
US6844224B2 (en) * | 2001-11-15 | 2005-01-18 | Freescale Semiconductor, Inc. | Substrate contact in SOI and method therefor |
JP4034099B2 (ja) | 2002-03-28 | 2008-01-16 | 株式会社ルネサステクノロジ | 高周波用モノリシック集積回路装置およびその製造方法 |
US20040031996A1 (en) * | 2002-08-16 | 2004-02-19 | Brian Li Chi Nan | Semiconductor device and method for forming |
US7087977B2 (en) | 2002-09-27 | 2006-08-08 | Renesas Technology Corp. | Semiconductor device including multiple wiring layers and circuits operating in different frequency bands |
DE10250832B4 (de) * | 2002-10-31 | 2010-02-11 | Infineon Technologies Ag | MOS-Transistor auf SOI-Substrat mit Source-Durchkontaktierung und Verfahren zur Herstellung eines solchen Transistors |
TWI361490B (en) | 2003-09-05 | 2012-04-01 | Renesas Electronics Corp | A semiconductor device and a method of manufacturing the same |
US7102201B2 (en) * | 2004-07-15 | 2006-09-05 | International Business Machines Corporation | Strained semiconductor device structures |
JP2006269491A (ja) * | 2005-03-22 | 2006-10-05 | Seiko Epson Corp | 半導体装置の製造方法 |
US8133774B2 (en) | 2009-03-26 | 2012-03-13 | International Business Machines Corporation | SOI radio frequency switch with enhanced electrical isolation |
US9654094B2 (en) | 2014-03-12 | 2017-05-16 | Kabushiki Kaisha Toshiba | Semiconductor switch circuit and semiconductor substrate |
JP2015173227A (ja) * | 2014-03-12 | 2015-10-01 | 株式会社東芝 | 半導体スイッチ及び半導体基板 |
US20220223696A1 (en) * | 2021-01-13 | 2022-07-14 | Electronics And Telecommunications Research Institute | Method for manufacturing power semiconductor device |
CN114975609A (zh) | 2021-02-24 | 2022-08-30 | 联华电子股份有限公司 | 横向双扩散的金属氧化物半导体场效晶体管及其制作方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60143656A (ja) * | 1983-12-29 | 1985-07-29 | Fujitsu Ltd | 半導体装置 |
US4875086A (en) * | 1987-05-22 | 1989-10-17 | Texas Instruments Incorporated | Silicon-on-insulator integrated circuits and method |
JPH081912B2 (ja) * | 1987-12-10 | 1996-01-10 | 三菱電機株式会社 | 半導体装置 |
JP2509708B2 (ja) * | 1989-09-07 | 1996-06-26 | 株式会社東芝 | Soi型半導体装置及びその製造方法 |
US5241211A (en) * | 1989-12-20 | 1993-08-31 | Nec Corporation | Semiconductor device |
JPH03214773A (ja) * | 1990-01-19 | 1991-09-19 | Fujitsu Ltd | 半導体装置 |
JP2616134B2 (ja) * | 1990-04-19 | 1997-06-04 | 日本電気株式会社 | Soiトランジスタ積層半導体装置とその製造方法 |
JPH043456A (ja) * | 1990-04-19 | 1992-01-08 | Nec Corp | 能動層積層素子形成方法 |
JPH04226082A (ja) * | 1990-05-21 | 1992-08-14 | Seiko Instr Inc | 半導体装置 |
JPH0463469A (ja) * | 1990-07-03 | 1992-02-28 | Sharp Corp | Soi型半導体装置 |
US5196373A (en) * | 1990-08-06 | 1993-03-23 | Harris Corporation | Method of making trench conductor and crossunder architecture |
JPH04150070A (ja) * | 1990-10-15 | 1992-05-22 | Seiko Epson Corp | 半導体装置 |
JPH04179271A (ja) * | 1990-11-14 | 1992-06-25 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JPH05198739A (ja) * | 1991-09-10 | 1993-08-06 | Mitsubishi Electric Corp | 積層型半導体装置およびその製造方法 |
JP2808965B2 (ja) * | 1992-02-19 | 1998-10-08 | 日本電気株式会社 | 半導体装置 |
SE500814C2 (sv) * | 1993-01-25 | 1994-09-12 | Ericsson Telefon Ab L M | Halvledaranordning i ett tunt aktivt skikt med hög genombrottsspänning |
US5306659A (en) * | 1993-03-29 | 1994-04-26 | International Business Machines Corporation | Reach-through isolation etching method for silicon-on-insulator devices |
US5793107A (en) * | 1993-10-29 | 1998-08-11 | Vlsi Technology, Inc. | Polysilicon pillar heat sinks for semiconductor on insulator circuits |
US5393703A (en) * | 1993-11-12 | 1995-02-28 | Motorola, Inc. | Process for forming a conductive layer for semiconductor devices |
US5612552A (en) * | 1994-03-31 | 1997-03-18 | Lsi Logic Corporation | Multilevel gate array integrated circuit structure with perpendicular access to all active device regions |
-
1994
- 1994-04-05 JP JP6066832A patent/JPH07283414A/ja active Pending
-
1995
- 1995-04-04 MY MYPI95000852A patent/MY114267A/en unknown
- 1995-04-05 DE DE69510484T patent/DE69510484T2/de not_active Expired - Lifetime
- 1995-04-05 EP EP95105114A patent/EP0676815B1/de not_active Expired - Lifetime
-
1996
- 1996-12-12 US US08/764,274 patent/US5929488A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0676815A1 (de) | 1995-10-11 |
MY114267A (en) | 2002-09-30 |
US5929488A (en) | 1999-07-27 |
DE69510484D1 (de) | 1999-08-05 |
EP0676815B1 (de) | 1999-06-30 |
JPH07283414A (ja) | 1995-10-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |