DE69430370D1 - Magnetorheologische poliervorrichtungen und verfahren - Google Patents
Magnetorheologische poliervorrichtungen und verfahrenInfo
- Publication number
- DE69430370D1 DE69430370D1 DE69430370T DE69430370T DE69430370D1 DE 69430370 D1 DE69430370 D1 DE 69430370D1 DE 69430370 T DE69430370 T DE 69430370T DE 69430370 T DE69430370 T DE 69430370T DE 69430370 D1 DE69430370 D1 DE 69430370D1
- Authority
- DE
- Germany
- Prior art keywords
- fluid
- polishing
- polishing devices
- magnetorheological polishing
- polishing zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title abstract 6
- 238000000034 method Methods 0.000 title abstract 2
- 239000012530 fluid Substances 0.000 abstract 5
- 230000001939 inductive effect Effects 0.000 abstract 2
- 238000007517 polishing process Methods 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B39/00—Burnishing machines or devices, i.e. requiring pressure members for compacting the surface zone; Accessories therefor
- B24B39/02—Burnishing machines or devices, i.e. requiring pressure members for compacting the surface zone; Accessories therefor designed for working internal surfaces of revolution
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/071,813 US5449313A (en) | 1992-04-14 | 1993-06-04 | Magnetorheological polishing devices and methods |
BY863 | 1993-12-09 | ||
PCT/US1994/006209 WO1994029077A1 (en) | 1993-06-04 | 1994-06-03 | Magnetorheological polishing devices and methods |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69430370D1 true DE69430370D1 (de) | 2002-05-16 |
DE69430370T2 DE69430370T2 (de) | 2002-12-12 |
Family
ID=25665737
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69430370T Expired - Lifetime DE69430370T2 (de) | 1993-06-04 | 1994-06-03 | Magnetorheologische poliervorrichtungen und verfahren |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0703847B1 (de) |
JP (2) | JPH08510695A (de) |
KR (1) | KR100335219B1 (de) |
AT (1) | ATE215869T1 (de) |
CA (3) | CA2497731C (de) |
DE (1) | DE69430370T2 (de) |
WO (1) | WO1994029077A1 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0687525A1 (de) * | 1994-06-13 | 1995-12-20 | Read-Rite Corporation | Lappsystem zur automatisierten Oberflächenformgebung |
JP4805640B2 (ja) * | 2005-09-16 | 2011-11-02 | 株式会社リコー | 表面処理装置 |
JP2007326183A (ja) * | 2006-06-08 | 2007-12-20 | Fdk Corp | 磁気研磨液 |
US7364493B1 (en) | 2006-07-06 | 2008-04-29 | Itt Manufacturing Enterprises, Inc. | Lap grinding and polishing machine |
KR100788796B1 (ko) | 2006-11-20 | 2007-12-27 | 연세대학교 산학협력단 | 집속이온빔과 mrf를 이용한 나노 구조물의 제조방법 |
US8974268B2 (en) * | 2010-06-25 | 2015-03-10 | Corning Incorporated | Method of preparing an edge-strengthened article |
US9102030B2 (en) | 2010-07-09 | 2015-08-11 | Corning Incorporated | Edge finishing apparatus |
JP5124034B2 (ja) * | 2011-06-14 | 2013-01-23 | 有限会社村松研磨工業 | バレル研磨装置 |
CN102284890A (zh) * | 2011-09-26 | 2011-12-21 | 厦门大学 | 面形自适应回转轴对称光学元件抛光装置 |
EA024869B1 (ru) * | 2013-12-27 | 2016-10-31 | Государственное Научное Учреждение "Институт Тепло- И Массообмена Имени А.В. Лыкова Национальной Академии Наук Беларуси" | Способ магнитореологического формообразования и полирования поверхности сложной формы |
CN104308671B (zh) * | 2014-10-09 | 2017-01-11 | 东北大学 | 一种磁流变抛光装置与方法 |
CN105014484A (zh) * | 2015-08-17 | 2015-11-04 | 宇环数控机床股份有限公司 | 磁流变抛光设备的磁场发生装置 |
CN107378651A (zh) * | 2017-08-04 | 2017-11-24 | 北京交通大学 | 一种磁流变平面抛光装置 |
KR101932413B1 (ko) * | 2017-08-29 | 2018-12-27 | 인하대학교 산학협력단 | 표면광택 생성장치 |
KR101994029B1 (ko) * | 2018-01-02 | 2019-09-30 | 인하대학교 산학협력단 | 평면 연마 장치 |
US11440156B2 (en) * | 2018-06-19 | 2022-09-13 | Islamic Azad University of Najafabad | Magnetic abrasive finishing of curved surfaces |
CN108789117B (zh) * | 2018-06-20 | 2020-05-05 | 中国科学院上海光学精密机械研究所 | 米级大口径光学元件高效抛光机及抛光方法 |
CN109623507A (zh) * | 2019-01-02 | 2019-04-16 | 中国科学院上海光学精密机械研究所 | Yag板条激光晶体反射面形加工方法 |
CN110421412A (zh) * | 2019-09-05 | 2019-11-08 | 河北工业大学 | 一种小型磁流变平面抛光装置 |
CN112123029B (zh) * | 2020-09-25 | 2022-09-06 | 山东理工大学 | 一种基于磁场辅助的微细结构振动光整装置及光整方法 |
CN112536649A (zh) * | 2020-12-21 | 2021-03-23 | 浙江师范大学 | 一种基于磁性磨粒流的光学玻璃抛光方法及其装置 |
CN113561035B (zh) * | 2021-07-30 | 2023-04-11 | 西安工业大学 | 一种点云交变磁流变抛光装置及方法 |
CN113752098B (zh) * | 2021-09-29 | 2022-06-21 | 哈尔滨工业大学 | 一种基于水浴加热辅助的小球头磁流变抛光方法 |
CN113941904B (zh) * | 2021-10-29 | 2022-07-29 | 哈尔滨工业大学 | 一种基于小型回转体零件旋转超声振动的小球头磁流变抛光工艺方法 |
CN113878413B (zh) * | 2021-11-15 | 2022-12-13 | 华圭精密科技(东莞)有限公司 | 一种抛光防撞磁流变抛光机与控制方法 |
CN114055258B (zh) * | 2021-11-19 | 2023-04-18 | 浙江师范大学 | 一种磁性抛光装置及磁性抛光控制方法 |
CN117428580B (zh) * | 2023-12-15 | 2024-03-19 | 成都市凯林机械贸易有限责任公司 | 一种阀门加工用抛光装置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2735231A (en) * | 1953-05-22 | 1956-02-21 | Reflectone Corp | simjian |
US3848363A (en) * | 1973-02-20 | 1974-11-19 | Minnesota Mining & Mfg | Apparatus for treating objects with particles moved by magnetic force |
US3897350A (en) * | 1974-05-30 | 1975-07-29 | Mobil Oil Corp | Anti-rust compositions |
US4186528A (en) * | 1978-05-23 | 1980-02-05 | Kosobutsky Alexandr A | Machine for treating spherical surfaces of parts with magneto-abrasive powder |
US4485024A (en) * | 1982-04-07 | 1984-11-27 | Nippon Seiko Kabushiki Kaisha | Process for producing a ferrofluid, and a composition thereof |
JPS6067057A (ja) * | 1983-09-21 | 1985-04-17 | Taihoo Kogyo Kk | 研磨方法 |
JPS6173305A (ja) * | 1984-09-18 | 1986-04-15 | Tdk Corp | 磁性流体 |
JPS6167045A (ja) * | 1984-09-10 | 1986-04-07 | Canon Inc | トナ−塗布方法 |
DD227372A1 (de) * | 1984-10-25 | 1985-09-18 | Orsta Hydraulik Veb K | Verfahren zur feinstbearbeitung von stahlrohren |
US4821466A (en) * | 1987-02-09 | 1989-04-18 | Koji Kato | Method for grinding using a magnetic fluid and an apparatus thereof |
JPS63232402A (ja) * | 1987-03-20 | 1988-09-28 | Nippon Seiko Kk | 導電性磁性流体組成物とその製造方法 |
US4839074A (en) * | 1987-05-22 | 1989-06-13 | Exxon Chemical Patents Inc. | Specified C14 -carboxylate/vinyl ester polymer-containing compositions for lubricating oil flow improvement |
JPH01303446A (ja) * | 1988-06-01 | 1989-12-07 | Asahi Chem Ind Co Ltd | 磁性粒子とその製造方法 |
JP2632943B2 (ja) * | 1988-07-26 | 1997-07-23 | 戸田工業株式会社 | 磁気記録媒体 |
JP2949289B2 (ja) * | 1989-03-28 | 1999-09-13 | 日本エクスラン工業株式会社 | ポリマー被覆磁性粒子の製造法 |
US4992190A (en) * | 1989-09-22 | 1991-02-12 | Trw Inc. | Fluid responsive to a magnetic field |
JP3069612B2 (ja) * | 1990-06-13 | 2000-07-24 | 科学技術庁金属材料技術研究所長 | 磁性流体及びその製造方法 |
JP2889664B2 (ja) * | 1990-07-19 | 1999-05-10 | 株式会社リコー | 回転量測定方法 |
-
1994
- 1994-06-03 JP JP7501936A patent/JPH08510695A/ja not_active Withdrawn
- 1994-06-03 CA CA002497731A patent/CA2497731C/en not_active Expired - Lifetime
- 1994-06-03 DE DE69430370T patent/DE69430370T2/de not_active Expired - Lifetime
- 1994-06-03 KR KR1019950705488A patent/KR100335219B1/ko not_active IP Right Cessation
- 1994-06-03 WO PCT/US1994/006209 patent/WO1994029077A1/en active IP Right Grant
- 1994-06-03 CA CA2497732A patent/CA2497732C/en not_active Expired - Lifetime
- 1994-06-03 AT AT94919329T patent/ATE215869T1/de not_active IP Right Cessation
- 1994-06-03 CA CA002163671A patent/CA2163671C/en not_active Expired - Lifetime
- 1994-06-03 EP EP94919329A patent/EP0703847B1/de not_active Expired - Lifetime
-
2004
- 2004-08-19 JP JP2004239946A patent/JP4741212B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
ATE215869T1 (de) | 2002-04-15 |
KR960702786A (ko) | 1996-05-23 |
WO1994029077A1 (en) | 1994-12-22 |
DE69430370T2 (de) | 2002-12-12 |
CA2497732A1 (en) | 1994-12-22 |
KR100335219B1 (ko) | 2002-11-07 |
EP0703847A1 (de) | 1996-04-03 |
JPH08510695A (ja) | 1996-11-12 |
CA2163671A1 (en) | 1994-12-22 |
JP4741212B2 (ja) | 2011-08-03 |
CA2497732C (en) | 2011-03-01 |
JP2005040944A (ja) | 2005-02-17 |
EP0703847A4 (de) | 1997-07-09 |
CA2497731C (en) | 2006-02-07 |
CA2497731A1 (en) | 1994-12-22 |
CA2163671C (en) | 2005-10-25 |
EP0703847B1 (de) | 2002-04-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69430370D1 (de) | Magnetorheologische poliervorrichtungen und verfahren | |
SE8800380D0 (sv) | A method for grinding using a magnetic fluid and an apparatus thereof | |
KR950702144A (ko) | 웨이퍼 연마 방법 및 장치(Wafer polishing method and apparatus) | |
DE60102891D1 (de) | Vorrichtung und vefahren für das kontrollierte polieren und planarisieren von halbleiterschleifen | |
MY130639A (en) | Method of rough polishing semiconductor wafers to reduce surface roughness | |
EP0454362A3 (en) | Backing pad, method for precision surface machining thereof, and method for polishing semiconductor wafer by use of the backing pad | |
EP0447885A3 (en) | Polishing method of goods and abrasive pad therefor | |
AU4795590A (en) | Apparatus for processing fluid and method of driving the same | |
FI872908A (fi) | Haorspaenne och dess anvaendningsfoerfarande. | |
IT9048331A0 (it) | Dispositivo di finissaggio per tubolari di calze e simili. | |
GR3020416T3 (en) | Method of reversibly fixing a covering to a supporting surface, and part suitable for carrying out the method | |
IT8249575A0 (it) | Metodo e dispositivo per il controllo funzionale di macchine rettificatrici | |
EP0967499A4 (de) | Optisches Teil und Verfahren und Vorrichtung zum Polieren der Endfläche desselben. | |
ATE252958T1 (de) | Feinstbearbeitungsvorrichtung für oberflächen | |
DE69004696D1 (de) | Steuereinrichtung und verfahren eines integrierten triebwerks. | |
AU1398688A (en) | Mixing apparatus and method | |
EP0475770A3 (en) | Electro-optical device and method for driving the same | |
ES8405436A1 (es) | Procedimiento para la elaboracion de una formulacion detergente jabonosa. | |
DE59204312D1 (de) | Verfahren und Einrichtung zum induktiven Randschichthärten von Haupt- oder Hublagerzapfen an Kurbelwellen. | |
DK1131186T3 (da) | Slibe- eller polere-indretning | |
IT8321037A0 (it) | Procedimento e dispositivo utilizzati per il finissaggio di pezze tessili in movimento esimilari. | |
BR9105723A (pt) | Ferramenta abrasiva | |
ATE207598T1 (de) | Verbindungsmittel | |
IT8241618A0 (it) | Ferromagnetico esteso in moto. metodo e dispositivo per il controllo magnetico delle proprieta' meccaniche di un oggetto | |
IT1150421B (it) | Dispositivo di lappatura e lucidatura per la lavorazione dei pezzi piani |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: QED TECHNOLOGIES INTERNATIONAL, INC., AURORA, , US |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: LORENZ UND KOLLEGEN, 89522 HEIDENHEIM |