DE69429701T2 - Halbleiterschichtstruktur mit verteilter Verspannung - Google Patents

Halbleiterschichtstruktur mit verteilter Verspannung

Info

Publication number
DE69429701T2
DE69429701T2 DE69429701T DE69429701T DE69429701T2 DE 69429701 T2 DE69429701 T2 DE 69429701T2 DE 69429701 T DE69429701 T DE 69429701T DE 69429701 T DE69429701 T DE 69429701T DE 69429701 T2 DE69429701 T2 DE 69429701T2
Authority
DE
Germany
Prior art keywords
semiconductor layer
layer structure
distributed stress
stress
distributed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69429701T
Other languages
English (en)
Other versions
DE69429701T3 (de
DE69429701D1 (de
Inventor
Michiyo Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17498540&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69429701(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69429701D1 publication Critical patent/DE69429701D1/de
Publication of DE69429701T2 publication Critical patent/DE69429701T2/de
Publication of DE69429701T3 publication Critical patent/DE69429701T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
    • H01L29/201—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys
    • H01L29/205—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys in different semiconductor regions, e.g. heterojunctions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/0004—Devices characterised by their operation
    • H01L33/002—Devices characterised by their operation having heterojunctions or graded gap
    • H01L33/0025—Devices characterised by their operation having heterojunctions or graded gap comprising only AIIIBV compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/3201—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures incorporating bulkstrain effects, e.g. strain compensation, strain related to polarisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/3211—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/3409—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers special GRINSCH structures
DE69429701T 1993-10-04 1994-09-30 Halbleiterschichtstruktur mit verteilter Verspannung Expired - Lifetime DE69429701T3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP27132993A JP3226069B2 (ja) 1993-10-04 1993-10-04 半導体積層構造および半導体光素子
JP27132993 1993-10-04

Publications (3)

Publication Number Publication Date
DE69429701D1 DE69429701D1 (de) 2002-03-14
DE69429701T2 true DE69429701T2 (de) 2002-11-21
DE69429701T3 DE69429701T3 (de) 2006-08-31

Family

ID=17498540

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69429701T Expired - Lifetime DE69429701T3 (de) 1993-10-04 1994-09-30 Halbleiterschichtstruktur mit verteilter Verspannung

Country Status (4)

Country Link
US (1) US5550393A (de)
EP (1) EP0646951B2 (de)
JP (1) JP3226069B2 (de)
DE (1) DE69429701T3 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3080889B2 (ja) * 1996-09-02 2000-08-28 日本電気株式会社 半導体レーザ
JP3672062B2 (ja) * 1997-07-16 2005-07-13 三菱電機株式会社 半導体レーザ，及びその製造方法
US6332835B1 (en) 1997-11-20 2001-12-25 Canon Kabushiki Kaisha Polishing apparatus with transfer arm for moving polished object without drying it
FR2813449B1 (fr) * 2000-08-22 2003-01-17 Cit Alcatel Dispositif optique amplificateur
JP2005129696A (ja) * 2003-10-23 2005-05-19 Matsushita Electric Ind Co Ltd 半導体装置及びその製造方法
JP5003527B2 (ja) * 2008-02-22 2012-08-15 住友電気工業株式会社 Ｉｉｉ族窒化物発光素子、及びｉｉｉ族窒化物系半導体発光素子を作製する方法
US7967995B2 (en) * 2008-03-31 2011-06-28 Tokyo Electron Limited Multi-layer/multi-input/multi-output (MLMIMO) models and method for using
JP6158591B2 (ja) * 2013-05-22 2017-07-05 株式会社デンソー 半導体レーザ
JP6158590B2 (ja) * 2013-05-22 2017-07-05 株式会社デンソー 半導体レーザ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4916708A (en) * 1989-06-26 1990-04-10 Eastman Kodak Company Semiconductor light-emitting devices
US5021360A (en) * 1989-09-25 1991-06-04 Gte Laboratories Incorporated Method of farbicating highly lattice mismatched quantum well structures
JP2873856B2 (ja) * 1990-04-03 1999-03-24 キヤノン株式会社 光増幅器
US5331410A (en) * 1991-04-26 1994-07-19 Sumitomo Electric Industries, Ltd. Field effect transistor having a sandwiched channel layer
US5159603A (en) * 1991-06-05 1992-10-27 United States Of America As Represented By The Administrator, National Aeronautics And Space Administration Quantum well, beam deflecting surface emitting lasers

Also Published As

Publication number Publication date
DE69429701T3 (de) 2006-08-31
EP0646951A2 (de) 1995-04-05
EP0646951B2 (de) 2006-01-04
EP0646951B1 (de) 2002-01-23
JP3226069B2 (ja) 2001-11-05
JPH07106711A (ja) 1995-04-21
US5550393A (en) 1996-08-27
DE69429701D1 (de) 2002-03-14
EP0646951A3 (de) 1997-01-08

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings