DE69429122T2 - Verfahren zum Schützen der Oberfläche eines halbleitenden Substrats während des Schleifens - Google Patents
Verfahren zum Schützen der Oberfläche eines halbleitenden Substrats während des SchleifensInfo
- Publication number
- DE69429122T2 DE69429122T2 DE69429122T DE69429122T DE69429122T2 DE 69429122 T2 DE69429122 T2 DE 69429122T2 DE 69429122 T DE69429122 T DE 69429122T DE 69429122 T DE69429122 T DE 69429122T DE 69429122 T2 DE69429122 T2 DE 69429122T2
- Authority
- DE
- Germany
- Prior art keywords
- protecting
- substrate during
- during grinding
- semiconducting substrate
- semiconducting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/959—Mechanical polishing of wafer
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/005,713 US5424224A (en) | 1993-01-19 | 1993-01-19 | Method of surface protection of a semiconductor wafer during polishing |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69429122D1 DE69429122D1 (de) | 2002-01-03 |
DE69429122T2 true DE69429122T2 (de) | 2002-06-20 |
Family
ID=21717325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69429122T Expired - Fee Related DE69429122T2 (de) | 1993-01-19 | 1994-01-19 | Verfahren zum Schützen der Oberfläche eines halbleitenden Substrats während des Schleifens |
Country Status (4)
Country | Link |
---|---|
US (1) | US5424224A (de) |
EP (1) | EP0607940B1 (de) |
JP (1) | JPH06349796A (de) |
DE (1) | DE69429122T2 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2719113B2 (ja) * | 1994-05-24 | 1998-02-25 | 信越半導体株式会社 | 単結晶シリコンウェーハの歪付け方法 |
US5958794A (en) * | 1995-09-22 | 1999-09-28 | Minnesota Mining And Manufacturing Company | Method of modifying an exposed surface of a semiconductor wafer |
JPH09270400A (ja) * | 1996-01-31 | 1997-10-14 | Shin Etsu Handotai Co Ltd | 半導体ウェーハの製造方法 |
JP3339545B2 (ja) * | 1996-05-22 | 2002-10-28 | 信越半導体株式会社 | 半導体ウエーハの製造方法 |
JP3620679B2 (ja) * | 1996-08-27 | 2005-02-16 | 信越半導体株式会社 | 遊離砥粒によるウエーハの面取装置及び面取方法 |
US5780204A (en) * | 1997-02-03 | 1998-07-14 | Advanced Micro Devices, Inc. | Backside wafer polishing for improved photolithography |
DE19704546A1 (de) * | 1997-02-06 | 1998-08-13 | Wacker Siltronic Halbleitermat | Verfahren zur Herstellung einer einseitig beschichteten und mit einem Finish versehenen Halbleiterscheibe |
US6194317B1 (en) | 1998-04-30 | 2001-02-27 | 3M Innovative Properties Company | Method of planarizing the upper surface of a semiconductor wafer |
US8092707B2 (en) | 1997-04-30 | 2012-01-10 | 3M Innovative Properties Company | Compositions and methods for modifying a surface suited for semiconductor fabrication |
JPH10309666A (ja) * | 1997-05-09 | 1998-11-24 | Speedfam Co Ltd | エッジポリッシング装置及びその方法 |
US6080042A (en) * | 1997-10-31 | 2000-06-27 | Virginia Semiconductor, Inc. | Flatness and throughput of single side polishing of wafers |
US6023094A (en) | 1998-01-14 | 2000-02-08 | National Semiconductor Corporation | Semiconductor wafer having a bottom surface protective coating |
DE19915078A1 (de) | 1999-04-01 | 2000-10-12 | Siemens Ag | Verfahren zur Prozessierung einer monokristallinen Halbleiterscheibe und teilweise prozessierte Halbleiterscheibe |
US6245677B1 (en) * | 1999-07-28 | 2001-06-12 | Noor Haq | Backside chemical etching and polishing |
US6376335B1 (en) | 2000-02-17 | 2002-04-23 | Memc Electronic Materials, Inc. | Semiconductor wafer manufacturing process |
US6622334B1 (en) | 2000-03-29 | 2003-09-23 | International Business Machines Corporation | Wafer edge cleaning utilizing polish pad material |
US6709981B2 (en) | 2000-08-16 | 2004-03-23 | Memc Electronic Materials, Inc. | Method and apparatus for processing a semiconductor wafer using novel final polishing method |
US6790125B2 (en) * | 2000-12-11 | 2004-09-14 | International Business Machines Corporation | Backside integrated circuit die surface finishing technique and tool |
US6852241B2 (en) | 2001-08-14 | 2005-02-08 | Lexmark International, Inc. | Method for making ink jet printheads |
US7018268B2 (en) * | 2002-04-09 | 2006-03-28 | Strasbaugh | Protection of work piece during surface processing |
US8339904B2 (en) * | 2005-06-28 | 2012-12-25 | Eta Sa Manufacture Horlogère Suisse | Reinforced micro-mechanical part |
US7559825B2 (en) * | 2006-12-21 | 2009-07-14 | Memc Electronic Materials, Inc. | Method of polishing a semiconductor wafer |
JP5795461B2 (ja) * | 2009-08-19 | 2015-10-14 | 株式会社Sumco | エピタキシャルシリコンウェーハの製造方法 |
CN102044432B (zh) * | 2009-10-13 | 2012-12-05 | 中芯国际集成电路制造(上海)有限公司 | 防止晶圆表面不平及曝光中失焦的方法 |
CN115256108B (zh) * | 2022-07-12 | 2023-12-19 | 山东润马光能科技有限公司 | 一种浮动式晶圆边缘打磨方法及装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4384919A (en) * | 1978-11-13 | 1983-05-24 | Sperry Corporation | Method of making x-ray masks |
JPS5958827A (ja) * | 1982-09-28 | 1984-04-04 | Toshiba Corp | 半導体ウエ−ハ、半導体ウエ−ハの製造方法及び半導体ウエ−ハの製造装置 |
JPS59174514A (ja) * | 1983-03-22 | 1984-10-03 | Hoxan Corp | 多結晶シリコンウエハの製造方法 |
JPS62132324A (ja) * | 1985-12-04 | 1987-06-15 | Showa Denko Kk | ウエハ−の面取り研削ダメ−ジ層の除去方法および除去用治具 |
JPS63117427A (ja) * | 1986-11-06 | 1988-05-21 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
IT1229640B (it) * | 1987-06-29 | 1991-09-04 | S G S Microelettronica S P A O | Processo di conformazione del bordo di fette di materiale semiconduttore e relativa apparecchiatura |
JPH06103678B2 (ja) * | 1987-11-28 | 1994-12-14 | 株式会社東芝 | 半導体基板の加工方法 |
US5128281A (en) * | 1991-06-05 | 1992-07-07 | Texas Instruments Incorporated | Method for polishing semiconductor wafer edges |
-
1993
- 1993-01-19 US US08/005,713 patent/US5424224A/en not_active Expired - Lifetime
-
1994
- 1994-01-18 JP JP6003643A patent/JPH06349796A/ja active Pending
- 1994-01-19 DE DE69429122T patent/DE69429122T2/de not_active Expired - Fee Related
- 1994-01-19 EP EP94100715A patent/EP0607940B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69429122D1 (de) | 2002-01-03 |
EP0607940A2 (de) | 1994-07-27 |
EP0607940A3 (de) | 1996-12-27 |
US5424224A (en) | 1995-06-13 |
JPH06349796A (ja) | 1994-12-22 |
EP0607940B1 (de) | 2001-11-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |