DE69422566D1 - Optischer Lageänderungssensor - Google Patents

Optischer Lageänderungssensor

Info

Publication number
DE69422566D1
DE69422566D1 DE69422566T DE69422566T DE69422566D1 DE 69422566 D1 DE69422566 D1 DE 69422566D1 DE 69422566 T DE69422566 T DE 69422566T DE 69422566 T DE69422566 T DE 69422566T DE 69422566 D1 DE69422566 D1 DE 69422566D1
Authority
DE
Germany
Prior art keywords
position change
optical position
change sensor
sensor
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69422566T
Other languages
English (en)
Other versions
DE69422566T2 (de
Inventor
Yasushi Kaneda
Koh Ishizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69422566D1 publication Critical patent/DE69422566D1/de
Application granted granted Critical
Publication of DE69422566T2 publication Critical patent/DE69422566T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE69422566T 1993-09-29 1994-09-28 Optischer Lageänderungssensor Expired - Lifetime DE69422566T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5265764A JP3028716B2 (ja) 1993-09-29 1993-09-29 光学式変位センサ

Publications (2)

Publication Number Publication Date
DE69422566D1 true DE69422566D1 (de) 2000-02-17
DE69422566T2 DE69422566T2 (de) 2000-07-20

Family

ID=17421701

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69422566T Expired - Lifetime DE69422566T2 (de) 1993-09-29 1994-09-28 Optischer Lageänderungssensor

Country Status (4)

Country Link
US (1) US5621527A (de)
EP (1) EP0645608B1 (de)
JP (1) JP3028716B2 (de)
DE (1) DE69422566T2 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6229140B1 (en) 1995-10-27 2001-05-08 Canon Kabushiki Kaisha Displacement information detection apparatus
US6151185A (en) * 1996-09-05 2000-11-21 Canon Kabushiki Kaisha Position detecting apparatus, positioning apparatus, and information recording apparatus using the same
JP3429961B2 (ja) * 1996-11-05 2003-07-28 株式会社ミツトヨ 光学式エンコーダ
US6631047B2 (en) 1997-09-22 2003-10-07 Canon Kabushiki Kaisha Interference device, position detecting device, positioning device and information recording apparatus using the same
US5909283A (en) * 1997-10-07 1999-06-01 Eselun; Steven Albert Linear encoder using diverging light beam diffraction
JPH11351813A (ja) 1998-06-08 1999-12-24 Canon Inc 干渉装置及びそれを用いた位置検出装置
JP3937596B2 (ja) * 1998-06-16 2007-06-27 キヤノン株式会社 変位情報測定装置
US6188484B1 (en) 1998-10-29 2001-02-13 Maxtor Corporation Method and apparatus for measuring angular displacement of an actuator arm relative to a reference position
JP4365927B2 (ja) * 1999-03-12 2009-11-18 キヤノン株式会社 干渉計測装置及び格子干渉式エンコーダ
US6674066B1 (en) 1999-04-16 2004-01-06 Canon Kabushiki Kaisha Encoder
JP2000321021A (ja) 1999-05-10 2000-11-24 Canon Inc 干渉装置、変位測定装置、及びそれを用いた情報記録又は／及び再生装置
JP4846909B2 (ja) 2000-02-15 2011-12-28 キヤノン株式会社 光学式エンコーダ及び回折格子の変位測定方法
JP2001273661A (ja) * 2000-03-28 2001-10-05 Samsung Electro Mech Co Ltd 傾き検出装置
US6713756B2 (en) * 2000-05-09 2004-03-30 Olympus Corporation Optical encoder and optical rotary encoder
JP2001336952A (ja) 2000-05-26 2001-12-07 Canon Inc 測定装置
JP4713019B2 (ja) * 2001-06-13 2011-06-29 株式会社ミツトヨ 格子干渉型変位検出装置
EP1345082A1 (de) * 2002-03-15 2003-09-17 ASML Netherlands BV Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
US6905258B2 (en) * 2003-08-27 2005-06-14 Mitutoyo Corporation Miniature imaging encoder readhead using fiber optic receiver channels
TWI295408B (en) * 2003-10-22 2008-04-01 Asml Netherlands Bv Lithographic apparatus and device manufacturing method, and measurement system
DE112005001619B4 (de) * 2004-07-12 2014-03-06 Mitsubishi Denki K.K. Optischer Codierer
DE102005029917A1 (de) * 2005-06-28 2007-01-04 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP4724496B2 (ja) * 2005-08-29 2011-07-13 キヤノン株式会社 光学式エンコーダ
KR100709762B1 (ko) * 2005-12-22 2007-04-23 주식회사 대우일렉트로닉스 광 다중화기 및 그 제조방법, 광정보 다중화 기록장치 및방법, 광정보 다중화 재생장치 및 방법
US7460231B2 (en) * 2006-03-27 2008-12-02 Asml Netherlands B.V. Alignment tool for a lithographic apparatus
US7510505B2 (en) * 2006-08-29 2009-03-31 General Motors Corporation Powertrain and method of operation
CH698965B1 (de) * 2006-11-16 2009-12-15 Baumer Electric Ag Optischer Sensor und Verfahren zum Homogenisieren eines Lichtstrahls.
DE102007023300A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
JP5147877B2 (ja) * 2010-03-01 2013-02-20 三菱電機株式会社 光学式エンコーダ用センサ及び光学式エンコーダ
JP5163713B2 (ja) * 2010-08-24 2013-03-13 カシオ計算機株式会社 距離画像センサ及び距離画像生成装置並びに距離画像データ取得方法及び距離画像生成方法
US8604413B2 (en) * 2011-06-13 2013-12-10 Mitutoyo Corporation Optical encoder including displacement sensing normal to the encoder scale grating surface
JP6696748B2 (ja) * 2014-10-21 2020-05-20 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングＤｒ． Ｊｏｈａｎｎｅｓ Ｈｅｉｄｅｎｈａｉｎ Ｇｅｓｅｌｌｓｃｈａｆｔ Ｍｉｔ Ｂｅｓｃｈｒａｎｋｔｅｒ Ｈａｆｔｕｎｇ 光学式エンコーダ
US10077991B2 (en) * 2016-09-27 2018-09-18 Mitutoyo Corporation Optical encoder configured to mitigate undesired interfering light components
US10895752B1 (en) * 2018-01-10 2021-01-19 Facebook Technologies, Llc Diffractive optical elements (DOEs) for high tolerance of structured light
US11852843B1 (en) 2018-01-10 2023-12-26 Meta Platforms Technologies, Llc Diffractive optical elements (DOEs) for high tolerance of structured light
JP7475973B2 (ja) * 2020-06-08 2024-04-30 キヤノン株式会社 光学式エンコーダ及び制御装置
JP7513510B2 (ja) * 2020-11-24 2024-07-09 株式会社ミツトヨ 変位センサ及び形状測定装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1474049A (en) * 1974-01-12 1977-05-18 Leitz Ernst Gmbh Arrangement for the modulation of light
JPH0621801B2 (ja) * 1985-07-03 1994-03-23 キヤノン株式会社 ロ−タリ−エンコ−ダ−
DE3541199C1 (de) * 1985-11-21 1987-06-25 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmesseinrichtung
JPH01180615A (ja) * 1988-01-12 1989-07-18 Nec Corp クロック供給方式
GB2216257B (en) * 1988-02-26 1992-06-24 Okuma Machinery Works Ltd Optical linear encoder
JP2560513B2 (ja) * 1990-03-29 1996-12-04 株式会社ニコン 回析干渉型エンコーダ
US5283434A (en) * 1991-12-20 1994-02-01 Canon Kabushiki Kaisha Displacement detecting device with integral optics
US5390022A (en) * 1992-04-07 1995-02-14 Canon Kabushiki Kaisha Displacement information detection apparatus for receiving a divergent light beam
JP3254737B2 (ja) * 1992-06-17 2002-02-12 キヤノン株式会社 エンコーダー
JPH06194123A (ja) * 1992-12-24 1994-07-15 Canon Inc 変位検出装置
JP3173208B2 (ja) * 1993-01-29 2001-06-04 キヤノン株式会社 変位測定装置

Also Published As

Publication number Publication date
JP3028716B2 (ja) 2000-04-04
EP0645608B1 (de) 2000-01-12
DE69422566T2 (de) 2000-07-20
JPH0798207A (ja) 1995-04-11
EP0645608A1 (de) 1995-03-29
US5621527A (en) 1997-04-15

Similar Documents

Publication Publication Date Title
DE69422566D1 (de) Optischer Lageänderungssensor
DE69207176D1 (de) Optischer Sensor
DE69529116D1 (de) Optischer Verschiebungssensor
DE59202372D1 (de) Optischer abstandssensor.
DE69434204D1 (de) Optischer Magnetfeldfühler
DE69528921D1 (de) Optische Sensoranordnung
NO972327D0 (no) Optisk posisjonssensor
DE59609158D1 (de) Optischer abstandssensor
DE59700293D1 (de) Optischer sensor
DE69511542D1 (de) Positionsgeber
DE69325165D1 (de) Verschiebungssensor
DE69406823D1 (de) Geschwindigkeitssensor
BR8902431A (pt) Sensor otico de posicao
DE59608120D1 (de) Positionssensor
DE69412199D1 (de) Weggeber
DE59408094D1 (de) Drehratensensor
DE69220923D1 (de) Optischer sensor
DE59308671D1 (de) Fühler
DE69423268D1 (de) Positionsbestimmung
DE59401139D1 (de) Optoelektronische Sensoreinrichtung
DE59306188D1 (de) Polarographischer sensor
DE69528866D1 (de) Optischer Sensor
DE69311653D1 (de) Optisches Sensorsystem
DE69527498D1 (de) Optischer Sensor
KR910014686A (ko) 광센서

Legal Events

Date Code Title Description
8364 No opposition during term of opposition