DE69418983T2 - Verfahren und Vorrichtung zur Abgabe von Gasmengen unter Druck - Google Patents

Verfahren und Vorrichtung zur Abgabe von Gasmengen unter Druck

Info

Publication number
DE69418983T2
DE69418983T2 DE69418983T DE69418983T DE69418983T2 DE 69418983 T2 DE69418983 T2 DE 69418983T2 DE 69418983 T DE69418983 T DE 69418983T DE 69418983 T DE69418983 T DE 69418983T DE 69418983 T2 DE69418983 T2 DE 69418983T2
Authority
DE
Germany
Prior art keywords
chamber
pressure
gas
under pressure
delivering gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69418983T
Other languages
English (en)
Other versions
DE69418983D1 (de
Inventor
Dominique Thomas
Olivier Benrubi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SEVA CHALON SUR SAONE
Original Assignee
SEVA CHALON SUR SAONE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SEVA CHALON SUR SAONE filed Critical SEVA CHALON SUR SAONE
Publication of DE69418983D1 publication Critical patent/DE69418983D1/de
Application granted granted Critical
Publication of DE69418983T2 publication Critical patent/DE69418983T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F3/00—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow
    • G01F3/36—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with stationary measuring chambers having constant volume during measurement
    • G01F3/38—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with stationary measuring chambers having constant volume during measurement having only one measuring chamber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G01F11/28—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with stationary measuring chambers having constant volume during measurement
DE69418983T 1993-12-24 1994-12-14 Verfahren und Vorrichtung zur Abgabe von Gasmengen unter Druck Expired - Fee Related DE69418983T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9315652A FR2714460B1 (fr) 1993-12-24 1993-12-24 Procédé et dispositif de fourniture de gaz sous pression.

Publications (2)

Publication Number Publication Date
DE69418983D1 DE69418983D1 (de) 1999-07-15
DE69418983T2 true DE69418983T2 (de) 1999-11-04

Family

ID=9454401

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69418983T Expired - Fee Related DE69418983T2 (de) 1993-12-24 1994-12-14 Verfahren und Vorrichtung zur Abgabe von Gasmengen unter Druck

Country Status (7)

Country Link
US (1) US5742523A (de)
EP (1) EP0660091B1 (de)
JP (1) JP2971002B2 (de)
AT (1) ATE181153T1 (de)
DE (1) DE69418983T2 (de)
ES (1) ES2134328T3 (de)
FR (1) FR2714460B1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2767206B1 (fr) * 1997-08-05 1999-10-01 Luc Heliot Generateur de faibles quantites de gaz et procede de generation d'un debit constant de gaz au moyen de ce generateur
WO1999053297A1 (en) 1998-04-14 1999-10-21 Instrumentarium Corporation Sensor assembly and method for measuring nitrogen dioxide
US6131572A (en) * 1998-05-20 2000-10-17 Instrumentarium Oy Medical dosing device having dosing chamber with a pressure sensor
US6408674B1 (en) * 1999-04-07 2002-06-25 Fisher Controls International Pressure activated calibration system for chemical sensors
US6390473B1 (en) * 1999-09-09 2002-05-21 Olaf Vancura Apportionment of pay out of casino game with escrow
ES2184550B1 (es) * 2000-03-02 2004-06-01 Polaris Technology, S.L. Metodo para la regulacion del flujo y concentracion de gases en camaras de desverdizacion de frutas, y dispositivo para la regulacion del flujo de gases correspondientes.
WO2002054020A1 (en) * 2000-12-28 2002-07-11 Ses Tech Co Ltd Time based mass flow controller and method for controlling flow rate using it
DE10162286B4 (de) 2001-12-19 2004-08-05 SCHLÄFER, Wolfgang Vorrichtung zur Bestimmung des Volumens eines Gases bei Umgebungsdruck
DE102004047560B3 (de) * 2004-09-30 2006-02-16 Clausthaler Umwelttechnikinstitut Gmbh, (Cutec-Institut) Biogas-Messeinrichtung und Verfahren zur Messung von Biogasvolumen
US8790464B2 (en) 2010-01-19 2014-07-29 Mks Instruments, Inc. Control for and method of pulsed gas delivery
CN103307441B (zh) * 2013-06-28 2016-08-10 江苏海企化工仓储股份有限公司 一种环氧丙烷存储装置及存储工艺
CN103791951B (zh) * 2013-12-24 2016-09-28 兰州空间技术物理研究所 正压标准气体流量计及正压标准气体流量测量方法
KR101623875B1 (ko) * 2014-11-14 2016-06-07 주식회사 포스코 변압기 질소 충전 장치 및 질소 충전 방법
US10627278B2 (en) 2015-03-23 2020-04-21 Hans-Jürgen Keil Anlagenbau Gmbh & Co. Kg Hydrostatic metering system and method for metering fluids by using such a metering system
CN110234965B (zh) * 2017-02-10 2020-10-27 株式会社富士金 流量测定方法以及流量测定装置
CN111120858A (zh) * 2019-11-25 2020-05-08 宣化钢铁集团有限责任公司 废气回收控制系统及其控制方法
EP3929541B1 (de) * 2020-06-26 2023-03-29 Astraveus Mikrofluidische flüssigkeitsabgabevorrichtung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT215688B (de) * 1960-03-22 1961-06-12 Balzers Hochvakuum Meßanordnung zur fortlaufenden digitalen Messung von Gasmengen
FR2243424B1 (de) * 1973-09-12 1976-05-14 Siac
US4373549A (en) * 1979-02-12 1983-02-15 Hewlett-Packard Company Mass flow/pressure control system
US4364413A (en) * 1981-01-07 1982-12-21 The Perkin-Elmer Corporation Molar gas-flow controller
US4829449A (en) * 1986-02-05 1989-05-09 Rockwell International Corporation Method and apparatus for measuring and providing corrected gas flow
DE3630078A1 (de) * 1986-09-04 1988-03-17 Kruse Hans Hinrich Dipl Chem Vorrichtung zur transformation von gasmengen
US5220515A (en) * 1991-04-22 1993-06-15 Applied Materials, Inc. Flow verification for process gas in a wafer processing system apparatus and method
DE4118502C2 (de) * 1991-06-06 1997-01-23 Liebisch Geb Verfahren und Vorrichtung zum Dosieren von Gasen
US5367910A (en) * 1992-03-12 1994-11-29 Curtin Matheson Scientific, Inc. Method and apparatus for measuring gas flow using Boyle's law
US5411685A (en) * 1992-10-08 1995-05-02 Design-Rite, Inc. Gas control unit and process for gas-assisted injection molding

Also Published As

Publication number Publication date
DE69418983D1 (de) 1999-07-15
JPH085437A (ja) 1996-01-12
EP0660091A1 (de) 1995-06-28
ATE181153T1 (de) 1999-06-15
EP0660091B1 (de) 1999-06-09
FR2714460B1 (fr) 1996-02-02
FR2714460A1 (fr) 1995-06-30
US5742523A (en) 1998-04-21
ES2134328T3 (es) 1999-10-01
JP2971002B2 (ja) 1999-11-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee