EP1354180A4 - Massenflusssteuerung auf zeitbasis und verfahren zur strömungsgeschwindigkeitsteuerung damit - Google Patents
Massenflusssteuerung auf zeitbasis und verfahren zur strömungsgeschwindigkeitsteuerung damitInfo
- Publication number
- EP1354180A4 EP1354180A4 EP01272934A EP01272934A EP1354180A4 EP 1354180 A4 EP1354180 A4 EP 1354180A4 EP 01272934 A EP01272934 A EP 01272934A EP 01272934 A EP01272934 A EP 01272934A EP 1354180 A4 EP1354180 A4 EP 1354180A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- time based
- flow rate
- based mass
- mass flow
- flow controller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
- G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
- G05D7/0647—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in series
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20000084326 | 2000-12-28 | ||
KR2000084326 | 2000-12-28 | ||
KR2001041670 | 2001-07-11 | ||
KR20010041670 | 2001-07-11 | ||
KR2001052398 | 2001-08-29 | ||
KR10-2001-0052398A KR100458511B1 (ko) | 2000-12-28 | 2001-08-29 | 시간식 유량 제어장치 및 방법 |
PCT/KR2001/002016 WO2002054020A1 (en) | 2000-12-28 | 2001-11-22 | Time based mass flow controller and method for controlling flow rate using it |
US10/112,692 US6782906B2 (en) | 2000-12-28 | 2002-03-29 | Time based mass flow controller and method for controlling flow rate using it |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1354180A1 EP1354180A1 (de) | 2003-10-22 |
EP1354180A4 true EP1354180A4 (de) | 2005-01-12 |
Family
ID=29740958
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01272934A Withdrawn EP1354180A4 (de) | 2000-12-28 | 2001-11-22 | Massenflusssteuerung auf zeitbasis und verfahren zur strömungsgeschwindigkeitsteuerung damit |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP1354180A4 (de) |
WO (1) | WO2002054020A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6782906B2 (en) * | 2000-12-28 | 2004-08-31 | Young-Chul Chang | Time based mass flow controller and method for controlling flow rate using it |
DE102010064017A1 (de) * | 2010-12-23 | 2012-06-28 | Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG | Vorrichtung und Verfahren zur pneumatischen Regelung eines Volumenstroms einer Flüssigkeit |
CN113203443A (zh) * | 2021-04-27 | 2021-08-03 | 西安热工研究院有限公司 | 一种压差型在线微量气体流量计及自动检测方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1165432A (en) * | 1966-10-24 | 1969-10-01 | Balzers Patent Und Beseiligung | Improvements in and relating to the Continuous Digital Measuring of Amounts of Gas Given Off or Sorbed by Specimens |
US4285245A (en) * | 1979-12-06 | 1981-08-25 | Precision Machine Products, Inc. | Method and apparatus for measuring and controlling volumetric flow rate of gases in a line |
US4364413A (en) * | 1981-01-07 | 1982-12-21 | The Perkin-Elmer Corporation | Molar gas-flow controller |
EP0660091A1 (de) * | 1993-12-24 | 1995-06-28 | SEVA, Société anonyme | Verfahren und Vorrichtung zur Abgabe von Gasmengen unter Druck |
US5925829A (en) * | 1994-01-14 | 1999-07-20 | Unit Instruments, Inc. | Method and apparatus for determining a rate of flow of gas by a rate of change of pressure |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09222344A (ja) * | 1996-02-16 | 1997-08-26 | Hitachi Metals Ltd | マスフローコントローラ |
US5720415A (en) * | 1996-04-02 | 1998-02-24 | American Medical Systems, Inc. | Apparatus for delivering fluid at a controlled rate and pressure |
US6074691A (en) * | 1997-06-24 | 2000-06-13 | Balzers Aktiengesellschaft | Method for monitoring the flow of a gas into a vacuum reactor |
-
2001
- 2001-11-22 WO PCT/KR2001/002016 patent/WO2002054020A1/en not_active Application Discontinuation
- 2001-11-22 EP EP01272934A patent/EP1354180A4/de not_active Withdrawn
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1165432A (en) * | 1966-10-24 | 1969-10-01 | Balzers Patent Und Beseiligung | Improvements in and relating to the Continuous Digital Measuring of Amounts of Gas Given Off or Sorbed by Specimens |
US4285245A (en) * | 1979-12-06 | 1981-08-25 | Precision Machine Products, Inc. | Method and apparatus for measuring and controlling volumetric flow rate of gases in a line |
US4364413A (en) * | 1981-01-07 | 1982-12-21 | The Perkin-Elmer Corporation | Molar gas-flow controller |
EP0660091A1 (de) * | 1993-12-24 | 1995-06-28 | SEVA, Société anonyme | Verfahren und Vorrichtung zur Abgabe von Gasmengen unter Druck |
US5925829A (en) * | 1994-01-14 | 1999-07-20 | Unit Instruments, Inc. | Method and apparatus for determining a rate of flow of gas by a rate of change of pressure |
Non-Patent Citations (1)
Title |
---|
See also references of WO02054020A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO2002054020A1 (en) | 2002-07-11 |
EP1354180A1 (de) | 2003-10-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20030725 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: CHANG, YOUNG-CHUL |
|
RBV | Designated contracting states (corrected) |
Designated state(s): DE FR GB IT |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20041130 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: 7G 01F 1/68 A Ipc: 7G 05D 7/06 B |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20050214 |