EP1354180A4 - Time based mass flow controller and method for controlling flow rate using it - Google Patents
Time based mass flow controller and method for controlling flow rate using itInfo
- Publication number
- EP1354180A4 EP1354180A4 EP01272934A EP01272934A EP1354180A4 EP 1354180 A4 EP1354180 A4 EP 1354180A4 EP 01272934 A EP01272934 A EP 01272934A EP 01272934 A EP01272934 A EP 01272934A EP 1354180 A4 EP1354180 A4 EP 1354180A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- time based
- flow rate
- based mass
- mass flow
- flow controller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
- G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
- G05D7/0647—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in series
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20000084326 | 2000-12-28 | ||
KR2000084326 | 2000-12-28 | ||
KR2001041670 | 2001-07-11 | ||
KR20010041670 | 2001-07-11 | ||
KR2001052398 | 2001-08-29 | ||
KR10-2001-0052398A KR100458511B1 (en) | 2000-12-28 | 2001-08-29 | Time-based flow controller and method for controlling mass flow using it |
PCT/KR2001/002016 WO2002054020A1 (en) | 2000-12-28 | 2001-11-22 | Time based mass flow controller and method for controlling flow rate using it |
US10/112,692 US6782906B2 (en) | 2000-12-28 | 2002-03-29 | Time based mass flow controller and method for controlling flow rate using it |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1354180A1 EP1354180A1 (en) | 2003-10-22 |
EP1354180A4 true EP1354180A4 (en) | 2005-01-12 |
Family
ID=29740958
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01272934A Withdrawn EP1354180A4 (en) | 2000-12-28 | 2001-11-22 | Time based mass flow controller and method for controlling flow rate using it |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP1354180A4 (en) |
WO (1) | WO2002054020A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6782906B2 (en) * | 2000-12-28 | 2004-08-31 | Young-Chul Chang | Time based mass flow controller and method for controlling flow rate using it |
DE102010064017A1 (en) * | 2010-12-23 | 2012-06-28 | Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG | Device for controlling volumetric flow of liquid used in e.g. sewage treatment plant, adjusts auxiliary pressure generated by auxiliary pressure sensor through gas line between regulated gas pressure generating and tracking units |
CN113203443A (en) * | 2021-04-27 | 2021-08-03 | 西安热工研究院有限公司 | Differential pressure type online micro gas flowmeter and automatic detection method |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1165432A (en) * | 1966-10-24 | 1969-10-01 | Balzers Patent Und Beseiligung | Improvements in and relating to the Continuous Digital Measuring of Amounts of Gas Given Off or Sorbed by Specimens |
US4285245A (en) * | 1979-12-06 | 1981-08-25 | Precision Machine Products, Inc. | Method and apparatus for measuring and controlling volumetric flow rate of gases in a line |
US4364413A (en) * | 1981-01-07 | 1982-12-21 | The Perkin-Elmer Corporation | Molar gas-flow controller |
EP0660091A1 (en) * | 1993-12-24 | 1995-06-28 | SEVA, Société anonyme | Method and device for metering gas under pressure |
US5925829A (en) * | 1994-01-14 | 1999-07-20 | Unit Instruments, Inc. | Method and apparatus for determining a rate of flow of gas by a rate of change of pressure |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09222344A (en) * | 1996-02-16 | 1997-08-26 | Hitachi Metals Ltd | Mass flow controller |
US5720415A (en) * | 1996-04-02 | 1998-02-24 | American Medical Systems, Inc. | Apparatus for delivering fluid at a controlled rate and pressure |
US6074691A (en) * | 1997-06-24 | 2000-06-13 | Balzers Aktiengesellschaft | Method for monitoring the flow of a gas into a vacuum reactor |
-
2001
- 2001-11-22 WO PCT/KR2001/002016 patent/WO2002054020A1/en not_active Application Discontinuation
- 2001-11-22 EP EP01272934A patent/EP1354180A4/en not_active Withdrawn
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1165432A (en) * | 1966-10-24 | 1969-10-01 | Balzers Patent Und Beseiligung | Improvements in and relating to the Continuous Digital Measuring of Amounts of Gas Given Off or Sorbed by Specimens |
US4285245A (en) * | 1979-12-06 | 1981-08-25 | Precision Machine Products, Inc. | Method and apparatus for measuring and controlling volumetric flow rate of gases in a line |
US4364413A (en) * | 1981-01-07 | 1982-12-21 | The Perkin-Elmer Corporation | Molar gas-flow controller |
EP0660091A1 (en) * | 1993-12-24 | 1995-06-28 | SEVA, Société anonyme | Method and device for metering gas under pressure |
US5925829A (en) * | 1994-01-14 | 1999-07-20 | Unit Instruments, Inc. | Method and apparatus for determining a rate of flow of gas by a rate of change of pressure |
Non-Patent Citations (1)
Title |
---|
See also references of WO02054020A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO2002054020A1 (en) | 2002-07-11 |
EP1354180A1 (en) | 2003-10-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20030725 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: CHANG, YOUNG-CHUL |
|
RBV | Designated contracting states (corrected) |
Designated state(s): DE FR GB IT |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20041130 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: 7G 01F 1/68 A Ipc: 7G 05D 7/06 B |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20050214 |