AU2001247252A1 - Mass flow controller and method of operation of mass flow controller - Google Patents

Mass flow controller and method of operation of mass flow controller

Info

Publication number
AU2001247252A1
AU2001247252A1 AU2001247252A AU4725201A AU2001247252A1 AU 2001247252 A1 AU2001247252 A1 AU 2001247252A1 AU 2001247252 A AU2001247252 A AU 2001247252A AU 4725201 A AU4725201 A AU 4725201A AU 2001247252 A1 AU2001247252 A1 AU 2001247252A1
Authority
AU
Australia
Prior art keywords
mass flow
flow controller
controller
mass
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001247252A
Inventor
Rajinder S. Gill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RAJINDER S GILL
Original Assignee
RAJINDER S GILL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/517,391 external-priority patent/US6314991B1/en
Application filed by RAJINDER S GILL filed Critical RAJINDER S GILL
Publication of AU2001247252A1 publication Critical patent/AU2001247252A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0368—By speed of fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
AU2001247252A 2000-03-02 2001-02-28 Mass flow controller and method of operation of mass flow controller Abandoned AU2001247252A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US09/517,391 2000-03-02
US09/517,391 US6314991B1 (en) 2000-03-02 2000-03-02 Mass flow controller
US09/741,552 2000-12-19
US09/741,552 US6543466B2 (en) 2000-03-02 2000-12-19 Mass flow controller and method of operation of mass flow controller
PCT/US2001/006671 WO2001065326A2 (en) 2000-03-02 2001-02-28 Mass flow controller and method of operation of mass flow controller

Publications (1)

Publication Number Publication Date
AU2001247252A1 true AU2001247252A1 (en) 2001-09-12

Family

ID=27059131

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001247252A Abandoned AU2001247252A1 (en) 2000-03-02 2001-02-28 Mass flow controller and method of operation of mass flow controller

Country Status (4)

Country Link
US (4) US6543466B2 (en)
AU (1) AU2001247252A1 (en)
FR (1) FR2805904B1 (en)
WO (1) WO2001065326A2 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6543466B2 (en) 2000-03-02 2003-04-08 Rajinder S. Gill Mass flow controller and method of operation of mass flow controller
US6782906B2 (en) * 2000-12-28 2004-08-31 Young-Chul Chang Time based mass flow controller and method for controlling flow rate using it
US7232588B2 (en) * 2004-02-23 2007-06-19 Eastman Kodak Company Device and method for vaporizing temperature sensitive materials
US7394639B2 (en) * 2005-07-08 2008-07-01 Advanced Energy Industries, Inc. System and method for driving an industrial control device
GB0607851D0 (en) * 2006-04-24 2006-05-31 Johnson Matthey Plc Particulate matter generator
US7651263B2 (en) * 2007-03-01 2010-01-26 Advanced Energy Industries, Inc. Method and apparatus for measuring the temperature of a gas in a mass flow controller
WO2008121713A1 (en) * 2007-03-30 2008-10-09 Fairchild Industrial Products Company High performance transducer
CN106948004A (en) * 2009-09-02 2017-07-14 Gtat公司 Improved under adjusted pressure using the high-temperature technology of helium
JP5887188B2 (en) * 2012-04-12 2016-03-16 株式会社堀場エステック Fluid control equipment
CN102840356B (en) * 2012-08-23 2013-11-13 杭州云谷科技有限公司 Electromagnetic flow measurement and control integrated device
US10161060B2 (en) * 2013-12-19 2018-12-25 Taiwan Semiconductor Manufacturing Co., Ltd. Gas-supply system and method
US9632516B2 (en) 2013-12-19 2017-04-25 Tawan Semiconductor Manufacturing Co., Ltd Gas-supply system and method
ITUB20154584A1 (en) * 2015-10-12 2017-04-12 Elbi Int Spa VALVE GROUP WITH ASSOCIATED MEASUREMENT DEVICE.
US10310521B2 (en) * 2016-04-07 2019-06-04 Hitachi Metals, Ltd. Bypass unit, a base for a flow meter, a base for a flow controller, a flow meter, and a flow controller
US10648842B2 (en) * 2016-06-22 2020-05-12 Benoit & Cote Inc. Fluid flow measuring and control devices and method
US9785154B2 (en) * 2017-02-13 2017-10-10 Robert M. McMillan Reconfigurable modular fluid flow control system for liquids or gases

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3386472A (en) 1965-03-25 1968-06-04 Leeds & Northrup Co Valves for gas chromatography
US4690371A (en) 1985-10-22 1987-09-01 Innovus Electromagnetic valve with permanent magnet armature
US4794947A (en) * 1986-11-29 1989-01-03 Kabushiki Kaisha Nippon IC (also trading as Nippon IC, Inc.) Mass flow controller
US5080131A (en) 1989-09-26 1992-01-14 Lintec Co., Ltd. Mass flow controller
US6044701A (en) 1992-10-16 2000-04-04 Unit Instruments, Inc. Thermal mass flow controller having orthogonal thermal mass flow sensor
JPH0784650A (en) 1993-07-23 1995-03-31 Hitachi Metals Ltd Mass flow controller, its operation method and solenoid valve
FR2739968B1 (en) 1995-10-12 1998-01-02 Aerospatiale ELECTROMAGNETIC LINEAR ACTUATOR WITH MOBILE PLATES AND FLUID REGULATOR WITH VALVES DRIVEN BY SUCH AN ACTUATOR
US6314991B1 (en) 2000-03-02 2001-11-13 Rajinder S. Gill Mass flow controller
US6543466B2 (en) * 2000-03-02 2003-04-08 Rajinder S. Gill Mass flow controller and method of operation of mass flow controller

Also Published As

Publication number Publication date
US20010018927A1 (en) 2001-09-06
US20030127131A1 (en) 2003-07-10
WO2001065326A9 (en) 2002-12-27
WO2001065326A3 (en) 2002-02-07
US6543466B2 (en) 2003-04-08
US20030127139A1 (en) 2003-07-10
US20040163712A1 (en) 2004-08-26
WO2001065326A2 (en) 2001-09-07
US6619315B2 (en) 2003-09-16
FR2805904B1 (en) 2007-02-23
US6705341B2 (en) 2004-03-16
FR2805904A1 (en) 2001-09-07

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