DE69410917D1 - Vibrationskreisel - Google Patents

Vibrationskreisel

Info

Publication number
DE69410917D1
DE69410917D1 DE69410917T DE69410917T DE69410917D1 DE 69410917 D1 DE69410917 D1 DE 69410917D1 DE 69410917 T DE69410917 T DE 69410917T DE 69410917 T DE69410917 T DE 69410917T DE 69410917 D1 DE69410917 D1 DE 69410917D1
Authority
DE
Germany
Prior art keywords
vibratory gyroscope
vibratory
gyroscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69410917T
Other languages
English (en)
Other versions
DE69410917T2 (de
Inventor
Nobuo Kurata
Hobuyoshi Sugitani
Takashi Ozaki
Kenji Haradao
Kimitoshi Tsuji
Yutaka Nonomura
Takeshi Morikawa
Masayuki Okuwa
Kouji Tsukada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Publication of DE69410917D1 publication Critical patent/DE69410917D1/de
Application granted granted Critical
Publication of DE69410917T2 publication Critical patent/DE69410917T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE69410917T 1993-10-15 1994-10-12 Vibrationskreisel Expired - Fee Related DE69410917T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5281596A JPH07113645A (ja) 1993-10-15 1993-10-15 振動ジャイロ

Publications (2)

Publication Number Publication Date
DE69410917D1 true DE69410917D1 (de) 1998-07-16
DE69410917T2 DE69410917T2 (de) 1998-12-17

Family

ID=17641356

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69410917T Expired - Fee Related DE69410917T2 (de) 1993-10-15 1994-10-12 Vibrationskreisel

Country Status (4)

Country Link
US (1) US5585562C1 (de)
EP (1) EP0649002B1 (de)
JP (1) JPH07113645A (de)
DE (1) DE69410917T2 (de)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3326989B2 (ja) * 1994-08-25 2002-09-24 株式会社豊田中央研究所 振動子とその調整方法および角速度センサ
JP3392959B2 (ja) * 1994-11-01 2003-03-31 富士通株式会社 音叉形振動ジャイロ及びこれを用いたセンサシステム
US5861705A (en) * 1994-11-01 1999-01-19 Fujitsu Limited Tuning-fork vibratory gyro and sensor system using the same
US6064169A (en) * 1995-10-11 2000-05-16 The Charles Stark Draper Laboratory, Inc. Motor amplitude control circuit in conductor-on-insulator tuning fork gyroscope
JPH09311041A (ja) * 1996-05-24 1997-12-02 Toyota Motor Corp 角速度検出装置
JPH1047971A (ja) * 1996-08-05 1998-02-20 Nippon Soken Inc 角速度センサ
JP3805837B2 (ja) * 1996-08-12 2006-08-09 トヨタ自動車株式会社 角速度検出装置
JP3752737B2 (ja) * 1996-08-12 2006-03-08 トヨタ自動車株式会社 角速度検出装置
US6281619B1 (en) * 1997-05-09 2001-08-28 Citizen Watch Co., Ltd. Vibration gyro
JP3973742B2 (ja) * 1997-07-04 2007-09-12 日本碍子株式会社 振動型ジャイロスコープ
US6651498B1 (en) 1997-10-06 2003-11-25 Ngk Insulators, Ltd. Vibratory gyroscope, vibrator used in this gyroscope, method for analyzing vibration of the vibrator, method for supporting the vibrator, and method for manufacturing the vibratory gyroscope
US6186003B1 (en) * 1997-10-06 2001-02-13 Ngk Insulators, Ltd. Vibratory gyroscope, vibrator used in this gyroscope, method for analyzing vibration of the vibrator, method for supporting the vibrator, and method for manufacturing the vibratory gyroscope
EP1094297B1 (de) * 1999-10-20 2005-07-27 Murata Manufacturing Co., Ltd. Winkelgeschwindigkeitsmessverfahren und Vibrationskreisel
US7523537B1 (en) * 2000-07-13 2009-04-28 Custom Sensors & Technologies, Inc. Method of manufacturing a tuning fork with reduced quadrature errror and symmetrical mass balancing
US6462530B1 (en) * 2001-01-25 2002-10-08 Bei Technologies, Inc. Redundant rate sensor and method
JP4147784B2 (ja) 2001-10-09 2008-09-10 富士通株式会社 角速度センサ
JP4305623B2 (ja) * 2002-03-13 2009-07-29 セイコーエプソン株式会社 振動子および振動型ジャイロスコープ
AU2003901914A0 (en) * 2003-04-22 2003-05-08 Quantum Precision Instruments Pty Ltd Quantum tunnelling transducer device
JP4163067B2 (ja) * 2003-07-14 2008-10-08 日本碍子株式会社 物理量測定方法および装置
JP4352975B2 (ja) * 2003-07-25 2009-10-28 セイコーエプソン株式会社 圧電振動片、圧電振動片の支持構造、圧電振動子及び振動型圧電ジャイロスコープ
JP2005070030A (ja) * 2003-08-04 2005-03-17 Seiko Epson Corp ジャイロ振動子及び電子機器
FR2859526B1 (fr) * 2003-09-09 2005-11-11 Sagem Dispositif de mesure mecanique d'un organe vibrant, et gyrometre en faisant application
JP2006030125A (ja) * 2004-07-21 2006-02-02 Fujitsu Media Device Kk 角速度センサ
JP2006058101A (ja) * 2004-08-19 2006-03-02 Seiko Epson Corp 振動片、振動子および応用機器
US7975545B2 (en) * 2006-12-08 2011-07-12 Tdk Corporation Angular velocity sensor and angular velocity sensor device
JP4415997B2 (ja) * 2007-03-19 2010-02-17 セイコーエプソン株式会社 角速度センサおよび電子機器
JP5360361B2 (ja) 2008-07-17 2013-12-04 セイコーエプソン株式会社 角速度検出装置用回路、角速度検出装置及び故障判定システム
JP5360362B2 (ja) 2008-07-17 2013-12-04 セイコーエプソン株式会社 角速度検出装置用回路、角速度検出装置及び故障判定システム
JP5786303B2 (ja) * 2009-12-10 2015-09-30 セイコーエプソン株式会社 振動片、振動子、物理量センサー、及び電子機器
JP2011145278A (ja) * 2009-12-16 2011-07-28 Seiko Epson Corp 振動片、振動子、物理量センサー、および電子機器
JP5652155B2 (ja) * 2010-11-24 2015-01-14 セイコーエプソン株式会社 振動片、センサーユニット、電子機器、振動片の製造方法、および、センサーユニットの製造方法
JP5942097B2 (ja) * 2011-10-24 2016-06-29 パナソニックＩｐマネジメント株式会社 角速度センサとそれに用いられる検出素子
CN103245339B (zh) 2012-02-14 2017-05-24 精工爱普生株式会社 振动片、传感器单元以及电子设备
JP6007541B2 (ja) * 2012-03-28 2016-10-12 セイコーエプソン株式会社 振動片およびその製造方法並びにジャイロセンサーおよび電子機器および移動体
JP6078968B2 (ja) * 2012-03-29 2017-02-15 セイコーエプソン株式会社 振動片の製造方法
JP5974629B2 (ja) * 2012-05-23 2016-08-23 セイコーエプソン株式会社 振動片、振動片の製造方法、角速度センサー、電子機器、移動体
JP2013253895A (ja) * 2012-06-08 2013-12-19 Seiko Epson Corp 電子デバイス、電子機器、移動体、および電子デバイスの製造方法
JP6264839B2 (ja) * 2013-10-29 2018-01-24 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
US20170059393A1 (en) 2015-08-26 2017-03-02 Seiko Epson Corporation Physical Quantity Detection Device, Manufacturing Method For Physical Quantity Detection Device, Electronic Apparatus, And Moving Object

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5166571A (en) * 1987-08-28 1992-11-24 Nec Home Electronics, Ltd. Vibration gyro having an H-shaped vibrator
GB2215054B (en) * 1988-02-19 1992-09-30 Yazaki Corp Oscillatory angular velocity detecting apparatus
US4930351A (en) * 1988-03-24 1990-06-05 Wjm Corporation Vibratory linear acceleration and angular rate sensing system
JPH02187621A (ja) * 1989-01-17 1990-07-23 Nec Home Electron Ltd 車両
JPH02218913A (ja) * 1989-02-18 1990-08-31 Nec Home Electron Ltd 振動ジャイロ
US5056366A (en) * 1989-12-26 1991-10-15 Litton Systems, Inc. Piezoelectric vibratory rate sensor
JPH04102013A (ja) * 1990-08-21 1992-04-03 Nec Home Electron Ltd 振動ジャイロおよびその駆動方法
SE512378C2 (sv) * 1991-01-08 2000-03-06 Colibri Pro Dev Ab För stämgaffelgyro avsett elektrodmönster

Also Published As

Publication number Publication date
US5585562A (en) 1996-12-17
EP0649002A1 (de) 1995-04-19
EP0649002B1 (de) 1998-06-10
DE69410917T2 (de) 1998-12-17
JPH07113645A (ja) 1995-05-02
US5585562C1 (en) 2001-05-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee