DE69327874D1 - Verfahren und element zur herstellung eines reliefbildes mittels einsatz einer infrarot empfindlichen schicht - Google Patents

Verfahren und element zur herstellung eines reliefbildes mittels einsatz einer infrarot empfindlichen schicht

Info

Publication number
DE69327874D1
DE69327874D1 DE69327874T DE69327874T DE69327874D1 DE 69327874 D1 DE69327874 D1 DE 69327874D1 DE 69327874 T DE69327874 T DE 69327874T DE 69327874 T DE69327874 T DE 69327874T DE 69327874 D1 DE69327874 D1 DE 69327874D1
Authority
DE
Germany
Prior art keywords
producing
sensitive layer
relief image
infrared sensitive
infrared
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69327874T
Other languages
English (en)
Other versions
DE69327874T2 (de
Inventor
Roxy Ni Fan
Reid E Kellogg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Application granted granted Critical
Publication of DE69327874D1 publication Critical patent/DE69327874D1/de
Publication of DE69327874T2 publication Critical patent/DE69327874T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
    • G03F7/2016—Contact mask being integral part of the photosensitive element and subject to destructive removal during post-exposure processing
    • G03F7/202—Masking pattern being obtained by thermal means, e.g. laser ablation

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
DE69327874T 1992-08-07 1993-08-02 Verfahren und element zur herstellung eines reliefbildes mittels einsatz einer infrarot empfindlichen schicht Expired - Lifetime DE69327874T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/926,887 US5607814A (en) 1992-08-07 1992-08-07 Process and element for making a relief image using an IR sensitive layer
PCT/US1993/007075 WO1994003839A1 (en) 1992-08-07 1993-08-02 Process and element for making a relief image using an ir sensitive layer

Publications (2)

Publication Number Publication Date
DE69327874D1 true DE69327874D1 (de) 2000-03-23
DE69327874T2 DE69327874T2 (de) 2000-07-20

Family

ID=25453846

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69327874T Expired - Lifetime DE69327874T2 (de) 1992-08-07 1993-08-02 Verfahren und element zur herstellung eines reliefbildes mittels einsatz einer infrarot empfindlichen schicht

Country Status (6)

Country Link
US (1) US5607814A (de)
EP (1) EP0654151B1 (de)
JP (1) JP2773847B2 (de)
CA (1) CA2140873C (de)
DE (1) DE69327874T2 (de)
WO (1) WO1994003839A1 (de)

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Also Published As

Publication number Publication date
CA2140873C (en) 1999-09-21
JP2773847B2 (ja) 1998-07-09
EP0654151A1 (de) 1995-05-24
DE69327874T2 (de) 2000-07-20
CA2140873A1 (en) 1994-02-17
US5607814A (en) 1997-03-04
WO1994003839A1 (en) 1994-02-17
EP0654151B1 (de) 2000-02-16
JPH07509789A (ja) 1995-10-26

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