DE69324527T2 - Verfahren zur Herstellung optischer Siliciumdioxid-Wellenleiterkomponente - Google Patents

Verfahren zur Herstellung optischer Siliciumdioxid-Wellenleiterkomponente

Info

Publication number
DE69324527T2
DE69324527T2 DE69324527T DE69324527T DE69324527T2 DE 69324527 T2 DE69324527 T2 DE 69324527T2 DE 69324527 T DE69324527 T DE 69324527T DE 69324527 T DE69324527 T DE 69324527T DE 69324527 T2 DE69324527 T2 DE 69324527T2
Authority
DE
Germany
Prior art keywords
manufacturing optical
waveguide component
silica waveguide
optical silica
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69324527T
Other languages
English (en)
Other versions
DE69324527D1 (de
Inventor
Mino Green
R R A Syms
Sean Andrew Holmes
Ken Ueki
Hisaharu Yanagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Publication of DE69324527D1 publication Critical patent/DE69324527D1/de
Application granted granted Critical
Publication of DE69324527T2 publication Critical patent/DE69324527T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C1/00—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
    • C03C1/006—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels to produce glass through wet route
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Glass Melting And Manufacturing (AREA)
DE69324527T 1992-06-16 1993-06-16 Verfahren zur Herstellung optischer Siliciumdioxid-Wellenleiterkomponente Expired - Fee Related DE69324527T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4156598A JPH05345619A (ja) 1992-06-16 1992-06-16 石英導波路型光部品の製造方法

Publications (2)

Publication Number Publication Date
DE69324527D1 DE69324527D1 (de) 1999-05-27
DE69324527T2 true DE69324527T2 (de) 1999-12-23

Family

ID=15631258

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69324527T Expired - Fee Related DE69324527T2 (de) 1992-06-16 1993-06-16 Verfahren zur Herstellung optischer Siliciumdioxid-Wellenleiterkomponente

Country Status (4)

Country Link
US (1) US5378256A (de)
EP (1) EP0575157B1 (de)
JP (1) JPH05345619A (de)
DE (1) DE69324527T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2759465B1 (fr) * 1996-04-30 1999-04-30 Corning Inc Procede de formation d'un circuit optique
US6309803B1 (en) * 1999-07-01 2001-10-30 Lumenon, Innovative Lightwave Technology, Inc. On-substrate cleaving of sol-gel waveguide
US7058245B2 (en) * 2000-04-04 2006-06-06 Waveguide Solutions, Inc. Integrated optical circuits
US7087179B2 (en) 2000-12-11 2006-08-08 Applied Materials, Inc. Optical integrated circuits (ICs)
US7079740B2 (en) 2004-03-12 2006-07-18 Applied Materials, Inc. Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides
JP5499380B2 (ja) * 2009-10-19 2014-05-21 公立大学法人高知工科大学 光変調器
KR20190028514A (ko) * 2016-07-15 2019-03-18 코닝 인코포레이티드 적층 구조의 광 도파관 물품 및 이를 형성하는 방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56114904A (en) * 1980-02-18 1981-09-09 Nippon Telegr & Teleph Corp <Ntt> Manufacture of light directing film
JPS6191020A (ja) * 1984-09-20 1986-05-09 Seiko Epson Corp 石英ガラス管の製造方法
US4816049A (en) * 1985-07-12 1989-03-28 Hoya Corporation Process of surface treating laser glass
JPH0717407B2 (ja) * 1989-10-09 1995-03-01 旭硝子株式会社 機能薄膜付ガラスの製造方法
JPH04147201A (ja) * 1990-10-11 1992-05-20 Sumitomo Electric Ind Ltd 石英系光導波路及びその製造方法
US5143533A (en) * 1991-08-22 1992-09-01 The United States Of America As Represented By The Department Of Energy Method of producing amorphous thin films

Also Published As

Publication number Publication date
EP0575157B1 (de) 1999-04-21
JPH05345619A (ja) 1993-12-27
EP0575157A1 (de) 1993-12-22
US5378256A (en) 1995-01-03
DE69324527D1 (de) 1999-05-27

Similar Documents

Publication Publication Date Title
DE69212575D1 (de) Verfahren zur Herstellung eines optischen Wellenleiters
DE69420149D1 (de) Faseroptisches Element und Verfahren zur Herstellung
DE69325287D1 (de) Verfahren zur herstellung von mikrolinsen
DE69520702D1 (de) Optischer Wellenleiter und Verfahren zu seiner Herstellung
DE69226794T2 (de) Verfahren zur Herstellung einer Objektivlinsenhalterung
FI955264A0 (fi) Kolmiulotteisia optisia efektejä käsittävien pinnoitteiden valmistusmenetelmä
DE69117253D1 (de) Verfahren zur Herstellung einer Kontaktlinse
DE69128097D1 (de) Verfahren zur Herstellung einer optischen Halbleitervorrichtung
DE69029175T2 (de) Methode zur Herstellung eines Lichtwellenleiter-Kopplers
DE69426090T2 (de) Verfahren zur Herstellung einer optische Halbleitervorrichtung
DE59810704D1 (de) Verfahren zur Herstellung von Wellenleiterstrukturen mit optischen Komponenten
DE69328731T2 (de) Verfahren zur Herstellung eines faseroptischen Kopplers
DE69109423D1 (de) Verfahren zur Herstellung eines optischen Quarz-Wellenleiters.
DE69017519T2 (de) Optischer Wellenleiter und Verfahren zur Herstellung.
DE59306358D1 (de) Verfahren zur Herstellung optoelektronischer Bauelemente
DE58909542D1 (de) Verfahren zur Herstellung eines Lichtwellenleiters
DE69324527T2 (de) Verfahren zur Herstellung optischer Siliciumdioxid-Wellenleiterkomponente
DE69323980D1 (de) Verfahren zur Herstellung von Vorformen für optische Wellenleiter
DE69309566T2 (de) Struktur mit integrierten Lichtwellenleiter und Spiegel und Verfahren zur Herstellung einer solchen Struktur
DE69315811T2 (de) Verfahren zur Herstellung einer optoelektrischen Halbleitervorrichtung
DE69115513D1 (de) Verfahren zur Herstellung einer optischen Platte
DE69328735D1 (de) Verfahren zur Herstellung von faseroptischen Kopplern
DE69311045T2 (de) Verfahren zur Herstellung eines faseroptischen Übertragungssystems
DE4294682T1 (de) Verfahren zur Herstellung einer Kontaktlinse
DE59405347D1 (de) Verfahren zur Herstellung eines optischen Kabels

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee