DE69325287D1 - Verfahren zur herstellung von mikrolinsen - Google Patents
Verfahren zur herstellung von mikrolinsenInfo
- Publication number
- DE69325287D1 DE69325287D1 DE69325287T DE69325287T DE69325287D1 DE 69325287 D1 DE69325287 D1 DE 69325287D1 DE 69325287 T DE69325287 T DE 69325287T DE 69325287 T DE69325287 T DE 69325287T DE 69325287 D1 DE69325287 D1 DE 69325287D1
- Authority
- DE
- Germany
- Prior art keywords
- micro lenses
- producing micro
- producing
- lenses
- micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
- G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12002—Three-dimensional structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
- G02B6/1245—Geodesic lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
- C10M2201/06—Metal compounds
- C10M2201/065—Sulfides; Selenides; Tellurides
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
- C10M2201/06—Metal compounds
- C10M2201/065—Sulfides; Selenides; Tellurides
- C10M2201/066—Molybdenum sulfide
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/10—Carboxylix acids; Neutral salts thereof
- C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/125—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/10—Carboxylix acids; Neutral salts thereof
- C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/129—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of thirty or more carbon atoms
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2211/00—Organic non-macromolecular compounds containing halogen as ingredients in lubricant compositions
- C10M2211/06—Perfluorinated compounds
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2213/00—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2213/00—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions
- C10M2213/02—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions obtained from monomers containing carbon, hydrogen and halogen only
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2213/00—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions
- C10M2213/04—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions obtained from monomers containing carbon, hydrogen, halogen and oxygen
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2213/00—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions
- C10M2213/06—Perfluoro polymers
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2213/00—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions
- C10M2213/06—Perfluoro polymers
- C10M2213/062—Polytetrafluoroethylene [PTFE]
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2040/00—Specified use or application for which the lubricating composition is intended
- C10N2040/02—Bearings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12102—Lens
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12104—Mirror; Reflectors or the like
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12147—Coupler
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12154—Power divider
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12173—Masking
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12176—Etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12195—Tapering
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/982,514 US5310623A (en) | 1992-11-27 | 1992-11-27 | Method for fabricating microlenses |
PCT/US1993/009896 WO1994012911A1 (en) | 1992-11-27 | 1993-10-15 | Method and apparatus for fabricating microlenses |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69325287D1 true DE69325287D1 (de) | 1999-07-15 |
DE69325287T2 DE69325287T2 (de) | 1999-09-30 |
Family
ID=25529239
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69325287T Expired - Lifetime DE69325287T2 (de) | 1992-11-27 | 1993-10-15 | Verfahren zur herstellung von mikrolinsen |
Country Status (5)
Country | Link |
---|---|
US (3) | US5310623A (de) |
EP (1) | EP0671024B1 (de) |
JP (1) | JP3373518B2 (de) |
DE (1) | DE69325287T2 (de) |
WO (1) | WO1994012911A1 (de) |
Families Citing this family (109)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6749864B2 (en) * | 1986-02-13 | 2004-06-15 | Takeda Chemical Industries, Ltd. | Stabilized pharmaceutical composition |
US5444572A (en) * | 1992-11-27 | 1995-08-22 | Lockheed Missiles & Space Company, Inc. | Wavefront corrector for scanning microlens arrays |
CA2130738A1 (en) * | 1993-11-01 | 1995-05-02 | Keith Wayne Goossen | Method and arrangement for arbitrary angle mirrors in substrates for use in hybrid optical systems |
US5536455A (en) * | 1994-01-03 | 1996-07-16 | Omron Corporation | Method of manufacturing lens array |
US6392808B1 (en) * | 1994-02-28 | 2002-05-21 | Digital Optics Corporation | Broad band controlled angle analog diffuser and associated methods |
FR2722304B1 (fr) * | 1994-07-06 | 1996-08-14 | Commissariat Energie Atomique | Procede de realisation de guides d'onde circulares et enterres, et dispositifs associes. |
IL115295A0 (en) | 1995-09-14 | 1996-12-05 | Yeda Res & Dev | Multilevel diffractive optical element |
US5761364A (en) * | 1995-11-02 | 1998-06-02 | Motorola, Inc. | Optical waveguide |
DE19602736A1 (de) * | 1996-01-26 | 1997-07-31 | Inst Mikrotechnik Mainz Gmbh | Verfahren und Vorrichtung zur Herstellung von optischen Linsen und optischen Linsenarrays |
WO1997028473A1 (de) * | 1996-02-03 | 1997-08-07 | Robert Bosch Gmbh | Verfahren zur herstellung von optischen bauelementen und optisches bauelement |
US5718830A (en) * | 1996-02-15 | 1998-02-17 | Lucent Technologies Inc. | Method for making microlenses |
US5932397A (en) * | 1996-05-28 | 1999-08-03 | Rvm Scientific, Inc. | Multicolor lithography for control of three dimensional refractive index gradient processing |
US6562523B1 (en) | 1996-10-31 | 2003-05-13 | Canyon Materials, Inc. | Direct write all-glass photomask blanks |
AU729612B2 (en) * | 1996-11-19 | 2001-02-08 | Alcatel | Optical waveguide with Bragg grating |
US6107000A (en) * | 1996-12-17 | 2000-08-22 | Board Of Regents - University Of California - San Diego | Method for producing micro-optic elements with gray scale mask |
WO1998033222A1 (en) * | 1997-01-27 | 1998-07-30 | Corning Incorporated | Rigid battery separator with compliant layer |
US6420073B1 (en) | 1997-03-21 | 2002-07-16 | Digital Optics Corp. | Fabricating optical elements using a photoresist formed from proximity printing of a gray level mask |
US6071652A (en) * | 1997-03-21 | 2000-06-06 | Digital Optics Corporation | Fabricating optical elements using a photoresist formed from contact printing of a gray level mask |
US5998066A (en) * | 1997-05-16 | 1999-12-07 | Aerial Imaging Corporation | Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass |
US6043481A (en) * | 1997-04-30 | 2000-03-28 | Hewlett-Packard Company | Optoelectronic array device having a light transmissive spacer layer with a ridged pattern and method of making same |
FR2766582A1 (fr) | 1997-07-23 | 1999-01-29 | Corning Inc | Methode de fabrication de composant optique et composant optique fabrique selon cette methode |
US5966478A (en) * | 1997-09-17 | 1999-10-12 | Lucent Technologies Inc. | Integrated optical circuit having planar waveguide turning mirrors |
US6534221B2 (en) | 1998-03-28 | 2003-03-18 | Gray Scale Technologies, Inc. | Method for fabricating continuous space variant attenuating lithography mask for fabrication of devices with three-dimensional structures and microelectronics |
US6410213B1 (en) | 1998-06-09 | 2002-06-25 | Corning Incorporated | Method for making optical microstructures having profile heights exceeding fifteen microns |
US6613498B1 (en) * | 1998-09-17 | 2003-09-02 | Mems Optical Llc | Modulated exposure mask and method of using a modulated exposure mask |
US6259567B1 (en) | 1998-11-23 | 2001-07-10 | Mems Optical Inc. | Microlens structure having two anamorphic surfaces on opposing ends of a single high index substances and method of fabricating the same |
US6558878B1 (en) * | 1999-07-08 | 2003-05-06 | Korea Electronics Technology Institute | Microlens manufacturing method |
US6487017B1 (en) | 1999-07-23 | 2002-11-26 | Bae Systems Information And Electronic Systems Integration, Inc | Trimodal microlens |
US6665027B1 (en) | 1999-07-23 | 2003-12-16 | Bae Systems Information And Electronic System Integration Inc | Color liquid crystal display having diffractive color separation microlenses |
US6618106B1 (en) | 1999-07-23 | 2003-09-09 | Bae Systems Information And Electronics Systems Integration, Inc | Sunlight viewable color liquid crystal display using diffractive color separation microlenses |
US6464365B1 (en) | 1999-07-23 | 2002-10-15 | Bae Systems Information And Electronic Systems Integration Inc. | Light collimator for liquid crystal displays |
US7167615B1 (en) | 1999-11-05 | 2007-01-23 | Board Of Regents, The University Of Texas System | Resonant waveguide-grating filters and sensors and methods for making and using same |
DE19956654B4 (de) * | 1999-11-25 | 2005-04-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Strukturierung von Oberflächen von mikromechanischen und/oder mikrooptischen Bauelementen und/oder Funktionselementen aus glasartigen Materialien |
US6355399B1 (en) * | 2000-01-18 | 2002-03-12 | Chartered Semiconductor Manufacturing Ltd. | One step dual damascene patterning by gray tone mask |
TW575786B (en) * | 2000-03-14 | 2004-02-11 | Takashi Nishi | Exposure controlling photomask and production method thereof |
AU2001245787A1 (en) | 2000-03-17 | 2001-10-03 | Zograph, Llc | High acuity lens system |
US6301051B1 (en) * | 2000-04-05 | 2001-10-09 | Rockwell Technologies, Llc | High fill-factor microlens array and fabrication method |
JP4678640B2 (ja) * | 2000-05-01 | 2011-04-27 | リコー光学株式会社 | 濃度分布マスクとそれを用いた3次元構造体製造方法 |
JP4557373B2 (ja) * | 2000-06-13 | 2010-10-06 | リコー光学株式会社 | 濃度分布マスクを用いた3次元構造体製造方法 |
US6780570B2 (en) | 2000-06-28 | 2004-08-24 | Institut National D'optique | Method of fabricating a suspended micro-structure with a sloped support |
US6635412B2 (en) * | 2000-07-11 | 2003-10-21 | Martin A. Afromowitz | Method for fabricating 3-D structures with smoothly-varying topographic features in photo-sensitized epoxy resists |
AU2002222920A1 (en) * | 2000-07-13 | 2002-01-30 | Seagate Technology Llc | Method for topographical patterning of a device |
EP1269158A2 (de) | 2000-07-21 | 2003-01-02 | Vir A/S | Kopplungselemente für oberflächenplasmonen-resonanz-sensoren |
US6613243B2 (en) | 2000-07-25 | 2003-09-02 | Shipley Company, L.L.C. | Method of making a 3-D structure using an erodable mask formed from a film having a composition that varies in its direction of thickness |
US6661581B1 (en) | 2000-09-29 | 2003-12-09 | Rockwell Scientific Company | Graded index microlenses and methods of design and formation |
US6629292B1 (en) | 2000-10-06 | 2003-09-30 | International Business Machines Corporation | Method for forming graphical images in semiconductor devices |
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US6759173B2 (en) | 2000-10-26 | 2004-07-06 | Shipley Company, L.L.C. | Single mask process for patterning microchip having grayscale and micromachined features |
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JP4570007B2 (ja) * | 2001-09-26 | 2010-10-27 | 大日本印刷株式会社 | 微小な集光レンズの形成方法 |
US20030209819A1 (en) * | 2001-11-02 | 2003-11-13 | Brown David R. | Process for making micro-optical elements from a gray scale etched master mold |
FR2836558B1 (fr) * | 2002-02-22 | 2004-10-29 | Teem Photonics | Masque permettant la fabrication d'un guide optique a enterrage variable et procede d'utilisation dudit masque pour obtenir le guide a enterrage variable |
DE10392340T5 (de) * | 2002-03-05 | 2005-04-07 | Corning Incorporated | Optische Elemente und Verfahren zum Vorhersagen der Leistung eines optischen Elements und optischen Systems |
AU2003220148A1 (en) * | 2002-03-14 | 2003-09-29 | Corning Incorporated | Fiber array and methods of fabrication |
US7531104B1 (en) | 2002-03-20 | 2009-05-12 | Ruey-Jen Hwu | Micro-optic elements and method for making the same |
US7062135B2 (en) | 2002-03-21 | 2006-06-13 | Corning Incorporated | Method for fabricating curved elements |
US6875695B2 (en) * | 2002-04-05 | 2005-04-05 | Mems Optical Inc. | System and method for analog replication of microdevices having a desired surface contour |
KR20040102089A (ko) * | 2002-04-15 | 2004-12-03 | 코닌클리케 필립스 일렉트로닉스 엔.브이. | 이미징 방법 |
EP1499915A2 (de) * | 2002-04-29 | 2005-01-26 | E.I. Du Pont De Nemours And Company | Durch effektiven brechungsindex periodenmoduliertes bragggitter |
KR100450935B1 (ko) * | 2002-07-03 | 2004-10-02 | 삼성전자주식회사 | 테이퍼형 광도파로 제조방법 |
US20040012978A1 (en) * | 2002-07-18 | 2004-01-22 | Yutaka Doi | Direct deposition waveguide mirror |
JP2006502439A (ja) * | 2002-10-04 | 2006-01-19 | コーニング インコーポレイテッド | レンズアレイ、そのレンズアレイの製造方法および感光性ガラスプレート |
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- 1993-10-15 JP JP51311994A patent/JP3373518B2/ja not_active Expired - Lifetime
- 1993-10-15 WO PCT/US1993/009896 patent/WO1994012911A1/en active IP Right Grant
- 1993-10-15 DE DE69325287T patent/DE69325287T2/de not_active Expired - Lifetime
- 1993-10-15 EP EP93924334A patent/EP0671024B1/de not_active Expired - Lifetime
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1994
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US5480764A (en) | 1996-01-02 |
US5482800A (en) | 1996-01-09 |
JP3373518B2 (ja) | 2003-02-04 |
US5310623A (en) | 1994-05-10 |
JPH08504515A (ja) | 1996-05-14 |
EP0671024A1 (de) | 1995-09-13 |
WO1994012911A1 (en) | 1994-06-09 |
EP0671024B1 (de) | 1999-06-09 |
DE69325287T2 (de) | 1999-09-30 |
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