DE69321764D1 - Tintenstrahlkopfherstellungsverfahren, nach dem Verfahren hergestellter Tintenstrahlkopf und Tintenstrahlgerät damit versehen - Google Patents

Tintenstrahlkopfherstellungsverfahren, nach dem Verfahren hergestellter Tintenstrahlkopf und Tintenstrahlgerät damit versehen

Info

Publication number
DE69321764D1
DE69321764D1 DE69321764T DE69321764T DE69321764D1 DE 69321764 D1 DE69321764 D1 DE 69321764D1 DE 69321764 T DE69321764 T DE 69321764T DE 69321764 T DE69321764 T DE 69321764T DE 69321764 D1 DE69321764 D1 DE 69321764D1
Authority
DE
Germany
Prior art keywords
ink jet
aforesaid
formation
jet head
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69321764T
Other languages
English (en)
Other versions
DE69321764T2 (de
Inventor
Junichi Kobayashi
Keiichi Murai
Shigeo Toganoh
Toshiaki Sasaki
Hajime Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP14450392A external-priority patent/JPH05330071A/ja
Priority claimed from JP17119492A external-priority patent/JP3004812B2/ja
Priority claimed from JP4171193A external-priority patent/JP2997132B2/ja
Priority claimed from JP17119792A external-priority patent/JP3093033B2/ja
Priority claimed from JP17119692A external-priority patent/JP3004814B2/ja
Priority claimed from JP17119592A external-priority patent/JP3004813B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69321764D1 publication Critical patent/DE69321764D1/de
Publication of DE69321764T2 publication Critical patent/DE69321764T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter
DE69321764T 1992-06-04 1993-06-02 Tintenstrahlkopfherstellungsverfahren, nach dem Verfahren hergestellter Tintenstrahlkopf und Tintenstrahlgerät damit versehen Expired - Fee Related DE69321764T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP14450392A JPH05330071A (ja) 1992-06-04 1992-06-04 インクジェット記録ヘッド、その製造方法、及びインクジェット記録ヘッドを備えた記録装置
JP17119492A JP3004812B2 (ja) 1992-06-29 1992-06-29 インクジェット記録ヘッド、その製造方法及びインクジェット記録ヘッドを備えた記録装置
JP4171193A JP2997132B2 (ja) 1992-06-29 1992-06-29 インクジェット記録ヘッドの製造方法
JP17119792A JP3093033B2 (ja) 1992-06-29 1992-06-29 インクジェット記録ヘッド、その製造方法及びインクジェット記録ヘッドを備えた記録装置
JP17119692A JP3004814B2 (ja) 1992-06-29 1992-06-29 インクジェット記録ヘッド、その製造方法及びインクジェット記録ヘッドを備えた記録装置
JP17119592A JP3004813B2 (ja) 1992-06-29 1992-06-29 インクジェット記録ヘッド、その製造方法及びインクジェット記録ヘッドを備えた記録装置

Publications (2)

Publication Number Publication Date
DE69321764D1 true DE69321764D1 (de) 1998-12-03
DE69321764T2 DE69321764T2 (de) 1999-05-06

Family

ID=27552985

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69321764T Expired - Fee Related DE69321764T2 (de) 1992-06-04 1993-06-02 Tintenstrahlkopfherstellungsverfahren, nach dem Verfahren hergestellter Tintenstrahlkopf und Tintenstrahlgerät damit versehen

Country Status (4)

Country Link
US (1) US5774150A (de)
EP (1) EP0573014B1 (de)
AT (1) ATE172672T1 (de)
DE (1) DE69321764T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG52140A1 (en) * 1994-03-04 1998-09-28 Canon Kk Ink jet recording head and method of manufacture therefor and laser processing apparatus and ink jet recording apparatus
DE69509862T2 (de) * 1994-12-05 2000-03-09 Canon Kk Verfahren zur Herstellung eines Tintenstrahlkopfes
AU4377600A (en) * 1995-06-20 2000-09-28 Canon Kabushiki Kaisha A method for manufacturing an ink jet head, and an ink jet head
JP3459703B2 (ja) * 1995-06-20 2003-10-27 キヤノン株式会社 インクジェットヘッドの製造方法、およびインクジェットヘッド
EP0786347B1 (de) * 1995-12-26 2003-05-14 Canon Kabushiki Kaisha Herstellungsverfahren für einen Flüssigkeitsstrahlaufzeichnungskopf, damit hergestellter Flüssigkeitsstrahlaufzeichnungskopf und mit diesem Kopf montierte Flüssigkeitsstrahlaufzeichnungsvorrichtung
JP3554159B2 (ja) * 1996-11-12 2004-08-18 キヤノン株式会社 インクジェットヘッド及びインクジェットヘッドの製造方法
JP3048957B2 (ja) * 1997-05-26 2000-06-05 新潟日本電気株式会社 静電式インクジェットプリントヘッド
JP4731763B2 (ja) 2001-09-12 2011-07-27 キヤノン株式会社 液体噴射記録ヘッドおよびその製造方法
US8018852B2 (en) * 2003-08-22 2011-09-13 Alcatel Lucent Equal-cost source-resolved routing system and method
US7296871B2 (en) * 2004-12-29 2007-11-20 Lexmark International, Inc. Device and structure arrangements for integrated circuits and methods for analyzing the same
JP4834426B2 (ja) * 2006-03-06 2011-12-14 キヤノン株式会社 インクジェット記録ヘッドの製造方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1127227A (en) * 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
JPS54117205A (en) * 1978-03-03 1979-09-12 Canon Kk Recording liquid
US4330787A (en) * 1978-10-31 1982-05-18 Canon Kabushiki Kaisha Liquid jet recording device
US4345262A (en) * 1979-02-19 1982-08-17 Canon Kabushiki Kaisha Ink jet recording method
US4463359A (en) * 1979-04-02 1984-07-31 Canon Kabushiki Kaisha Droplet generating method and apparatus thereof
US4313124A (en) * 1979-05-18 1982-01-26 Canon Kabushiki Kaisha Liquid jet recording process and liquid jet recording head
US4558333A (en) * 1981-07-09 1985-12-10 Canon Kabushiki Kaisha Liquid jet recording head
JPS59123670A (ja) * 1982-12-28 1984-07-17 Canon Inc インクジエツトヘツド
JPS59138461A (ja) * 1983-01-28 1984-08-08 Canon Inc 液体噴射記録装置
JPH0645242B2 (ja) * 1984-12-28 1994-06-15 キヤノン株式会社 液体噴射記録ヘツドの製造方法
JPS62231761A (ja) * 1985-11-06 1987-10-12 Canon Inc 液体噴射記録ヘツド
JPH0698755B2 (ja) * 1986-04-28 1994-12-07 キヤノン株式会社 液体噴射記録ヘツドの製造方法
US4831390A (en) * 1988-01-15 1989-05-16 Xerox Corporation Bubble jet printing device with improved printhead heat control
JPH01306251A (ja) * 1988-06-03 1989-12-11 Canon Inc インクジェット記録ヘッド
US4878992A (en) * 1988-11-25 1989-11-07 Xerox Corporation Method of fabricating thermal ink jet printheads
DE69114938T2 (de) * 1990-08-03 1996-06-13 Canon Kk Farbstrahlaufzeichnungskopfherstellungsverfahren.

Also Published As

Publication number Publication date
EP0573014A3 (en) 1994-06-01
DE69321764T2 (de) 1999-05-06
EP0573014A2 (de) 1993-12-08
EP0573014B1 (de) 1998-10-28
US5774150A (en) 1998-06-30
ATE172672T1 (de) 1998-11-15

Similar Documents

Publication Publication Date Title
DE69321764D1 (de) Tintenstrahlkopfherstellungsverfahren, nach dem Verfahren hergestellter Tintenstrahlkopf und Tintenstrahlgerät damit versehen
DE69329702T2 (de) Verfahren zur Herstellung von Flüssigkeitsstrahlaufzeichnungskopf
ATE139186T1 (de) Verfahren für die herstellung von tintenstrahl- aufzeichnungsköpfen
EP0844090A3 (de) Verfahren zum Bilden eines mehrkanaligen linienförmigen Druckkopfskörpers für einen Tintenstrahldruckkopf mit gesteuerter Tropfenerzeugung
EP0925932B1 (de) Druckkopfspannungsentlastung
KR19980080813A (ko) 개량된 유동 특징으로 설계된 잉크젯 프린터 노즐판
TW368515B (en) Ink composite, pattern forming method and color filter
EP2502747A2 (de) Tintenstrahlkopf und Herstellungsverfahren dafür
US20040179064A1 (en) Nozzle plate for droplet deposition apparatus
US5332466A (en) Liquid jet recording head manufacturing method
DE69329359T2 (de) Verfahren zur Herstellung eines Tintenstrahlaufzeichnungskopfes
CN102673152A (zh) 喷墨头及喷墨头的制造方法
BE901198A (fr) Imprimante a jets d'encre.
JPS5758797B2 (de)
EP1147899A4 (de) Tintenstrahldruckkopf und sein herstellungsverfahren
JPS54148533A (en) Head of ink jet recorder
JPS56123869A (en) Ink jet recording head
JPS56108877A (en) Manufacture of fluid spray nozzle
JPH0242670B2 (de)
EP0930167A3 (de) Tintenstrahlaufzeichnungskopf, Substrat für diesen Kopf, Herstellungsverfahren für dieses Substrat und Tintenstrahlaufzeichnungsgerät
JP3175335B2 (ja) インクジェットヘッドの製造方法
DE69014690D1 (de) Methode zur Herstellung eines Substrates für einen Flüssigkeitsstrahl-Aufzeichnungskopf.
CA2129182C (en) An edge-shooter ink-jet print head and a procedure for manufacturing this
JPH068433A (ja) インクジエット記録ヘッドの製造方法
JPS60204367A (ja) インクジエツト記録ヘツドの作製方法

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee